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公开(公告)号：US07785456B2
公开(公告)日：2010-08-31
申请号：US10968642
申请日：2004-10-19
CPC分类号： C23C14/505 , C23C16/4584 , C23C16/4586 , H01J37/32715 , H01J37/34 , H01J37/3417 , H01L21/68764 , H01L21/68771 , H01L21/68785 , H01L21/68792
摘要： The invention relates to a magnetic latch for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The magnetic latch includes a permanent magnetic, which is moveable between a latching position, in which the permanent magnet magnetizes the latch for attracting a substrate holder, and an unlatching position, in which the permanent magnet is connected in a bypass circuit, thereby demagnetizing the latch for releasing the substrate holder.
摘要翻译： 本发明涉及一种用于将基板固定在悬浮在气相沉积系统的真空室中的涂覆源上方的行星旋转平台上的磁性闩锁， 化学气相沉积（CVD）系统或物理气相沉积（PVD）系统。 磁性闩锁包括永久磁铁，该永久磁铁可以在其中永磁体磁化闩锁以吸引衬底保持器的闩锁位置与永久磁铁连接在旁路电路中的解锁位置之间移动，从而使 用于释放衬底保持器的闩锁。
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公开(公告)号：US08163144B2
公开(公告)日：2012-04-24
申请号：US11205398
申请日：2005-08-17
IPC分类号： C23C14/00
CPC分类号： H01J37/34 , H01J37/32541 , H01J37/3438
摘要： The present invention relates to a magnetron sputtering device and technique for depositing materials onto a substrate at a high production rate in which the deposited films have predictive thickness distribution and in which the apparatus can operate continuously and repeatedly for very long periods. The present invention has realized increased production by reducing cycle time. Increased coating rates are achieved by coupling a planetary drive system with a large cathode. The cathode diameter is greater than the diameter of a planet and less than twice the diameter of the planet. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.
摘要翻译： 磁控溅射装置及其制造方法技术领域本发明涉及一种磁控溅射装置及其制造方法，其特征在于，以高生产率将基板上的材料沉积在基板上，其中沉积膜具有预测的厚度分布，并且该装置能够连续且重复地操作非常长的 本发明通过减少循环时间实现了增加的生产。 通过将行星驱动系统与大阴极联接来实现涂层速率的提高。 阴极直径大于行星的直径，小于行星直径的两倍。 通过阴极处的较低的功率密度获得较低的缺陷率，其抑制电弧，同时径流通过阴极至行星几何形状而被最小化，而不使用掩模。
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公开(公告)号：US20060081468A1
公开(公告)日：2006-04-20
申请号：US10968642
申请日：2004-10-19
申请人： Richard Seddon , Markus Tilsch , Jeremy Hayes
发明人： Richard Seddon , Markus Tilsch , Jeremy Hayes
CPC分类号： C23C14/505 , C23C16/4584 , C23C16/4586 , H01J37/32715 , H01J37/34 , H01J37/3417 , H01L21/68764 , H01L21/68771 , H01L21/68785 , H01L21/68792
摘要： The invention relates to a magnetic latch for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The magnetic latch includes a permanent magnetic, which is moveable between a latching position, in which the permanent magnet magnetizes the latch for attracting a substrate holder, and an unlatching position, in which the permanent magnet is connected in a bypass circuit, thereby demagnetizing the latch for releasing the substrate holder.
摘要翻译： 本发明涉及一种用于将基板固定在悬浮在气相沉积系统的真空室中的涂覆源上方的行星旋转平台上的磁性闩锁， 化学气相沉积（CVD）系统或物理气相沉积（PVD）系统。 磁性闩锁包括永久磁铁，该永久磁铁可以在其中永磁体磁化闩锁以吸引衬底保持器的闩锁位置和永久磁铁连接在旁路电路中的解锁位置之间移动，从而使 用于释放衬底保持器的闩锁。
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公开(公告)号：US20140041772A1
公开(公告)日：2014-02-13
申请号：US13568550
申请日：2012-08-07
申请人： Brooke Hayes , Jeremy Hayes
发明人： Brooke Hayes , Jeremy Hayes
IPC分类号： A45C15/00
摘要： An apparatus is disclosed comprising a portable, handheld bag for toting personal effects. In various embodiments, the external surfaces of the handbag comprises flexible digital displays, including LED and/or LCD displays. The handbag itself may comprise an internal power supply and one or more USB ports for interfacing the handbag with other data processing devices. The In some embodiments, the LED or LCD displays may be configured to display a colored, repeating patters which aesthetically matches the ensemble or outerwear of user. Various embodiments of the present invention comprise touch screens and software for assisting users with typical day-to-day needs, including a virtual calculator, GPS, virtual notepads, and the like.
摘要翻译： 公开了一种装置，其包括便携式手提袋，用于踩踏个人物品。 在各种实施例中，手提包的外表面包括柔性数字显示器，包括LED和/或LCD显示器。 手提包本身可以包括内部电源和用于将手提包与其他数据处理装置对接的一个或多个USB端口。 在一些实施例中，LED或LCD显示器可以被配置为显示美观地匹配用户的整体或外衣的彩色重复图案。 本发明的各种实施例包括触摸屏和软件，用于帮助用户具有典型的日常需要，包括虚拟计算器，GPS，虚拟记事本等。
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公开(公告)号：US20060070877A1
公开(公告)日：2006-04-06
申请号：US11205398
申请日：2005-08-17
申请人： Markus Tilsch , Richard Seddon , Georg Ockenfuss , Jeremy Hayes , Robert Klinger
发明人： Markus Tilsch , Richard Seddon , Georg Ockenfuss , Jeremy Hayes , Robert Klinger
CPC分类号： H01J37/34 , H01J37/32541 , H01J37/3438
摘要： The present invention relates to a magnetron sputtering device and technique for depositing materials onto a substrate at a high production rate in which the deposited films have predictive thickness distribution and in which the apparatus can operate continuously and repeatedly for very long periods. The present invention has realized increased production by reducing cycle time. Increased coating rates are achieved by coupling a planetary drive system with a large cathode. The cathode diameter is greater than the diameter of a planet and less than twice the diameter of the planet. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.
摘要翻译： 磁控溅射装置及其制造方法技术领域本发明涉及一种磁控溅射装置及其制造方法，其特征在于，以高生产率将基板上的材料沉积在基板上，其中沉积膜具有预测的厚度分布，并且该装置能够连续且重复地操作非常长的 本发明通过减少循环时间实现了增加的生产。 通过将行星驱动系统与大阴极联接来实现涂层速率的提高。 阴极直径大于行星的直径，小于行星直径的两倍。 通过阴极处的较低的功率密度获得较低的缺陷率，其抑制电弧，同时径流通过阴极至行星几何形状而被最小化，而不使用掩模。
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