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公开(公告)号：US08163144B2
公开(公告)日：2012-04-24
申请号：US11205398
申请日：2005-08-17
IPC分类号： C23C14/00
CPC分类号： H01J37/34 , H01J37/32541 , H01J37/3438
摘要： The present invention relates to a magnetron sputtering device and technique for depositing materials onto a substrate at a high production rate in which the deposited films have predictive thickness distribution and in which the apparatus can operate continuously and repeatedly for very long periods. The present invention has realized increased production by reducing cycle time. Increased coating rates are achieved by coupling a planetary drive system with a large cathode. The cathode diameter is greater than the diameter of a planet and less than twice the diameter of the planet. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.
摘要翻译： 磁控溅射装置及其制造方法技术领域本发明涉及一种磁控溅射装置及其制造方法，其特征在于，以高生产率将基板上的材料沉积在基板上，其中沉积膜具有预测的厚度分布，并且该装置能够连续且重复地操作非常长的 本发明通过减少循环时间实现了增加的生产。 通过将行星驱动系统与大阴极联接来实现涂层速率的提高。 阴极直径大于行星的直径，小于行星直径的两倍。 通过阴极处的较低的功率密度获得较低的缺陷率，其抑制电弧，同时径流通过阴极至行星几何形状而被最小化，而不使用掩模。
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公开(公告)号：US07879209B2
公开(公告)日：2011-02-01
申请号：US11177465
申请日：2005-07-08
IPC分类号： C23C14/42
CPC分类号： H01J37/34 , H01J37/32541 , H01J37/3438
摘要： A magnetron sputtering cathode for use in a vacuum deposition process is disclosed wherein the cathode is coated on its sides with an electrically insulating material such as alumina to prevent arcing, and wherein the first end surface of the cathode supports a material to be sputtered. The bottom of the cathode may also be coated with an electrically insulating coating or may be resting upon an insulating platform.
摘要翻译： 公开了一种用于真空沉积工艺中的磁控溅射阴极，其中阴极通过电绝缘材料如氧化铝在其侧面上涂覆以防止电弧，并且其中阴极的第一端面支撑待溅射的材料。 阴极的底部也可以涂覆有电绝缘涂层，或者可以搁置在绝缘平台上。
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公开(公告)号：US20090250341A1
公开(公告)日：2009-10-08
申请号：US12402322
申请日：2009-03-11
IPC分类号： C23C14/34
CPC分类号： H01J37/3405 , H01J37/3438
摘要： A sputtering anode is disclosed wherein the anode is in the form of a container or vessel; and, wherein the conducting surface communicating with a cathode is the inside surface of the container or vessel. The anode can be mounted outside of a coating chamber having its opening communicating with the chamber or alternatively may be mounted within the chamber. The anode may be an inlet port for receiving inert gas for use in forming the plasma and for pressurizing the anode.
摘要翻译： 公开了一种溅射阳极，其中阳极是容器或容器的形式; 并且其中与阴极连通的导电表面是容器或容器的内表面。 阳极可以安装在其开口与腔室连通的涂覆室的外部，或者可以安装在腔室内。 阳极可以是用于接收用于形成等离子体和用于对阳极加压的惰性气体的入口。
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公开(公告)号：US07785456B2
公开(公告)日：2010-08-31
申请号：US10968642
申请日：2004-10-19
CPC分类号： C23C14/505 , C23C16/4584 , C23C16/4586 , H01J37/32715 , H01J37/34 , H01J37/3417 , H01L21/68764 , H01L21/68771 , H01L21/68785 , H01L21/68792
摘要： The invention relates to a magnetic latch for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The magnetic latch includes a permanent magnetic, which is moveable between a latching position, in which the permanent magnet magnetizes the latch for attracting a substrate holder, and an unlatching position, in which the permanent magnet is connected in a bypass circuit, thereby demagnetizing the latch for releasing the substrate holder.
摘要翻译： 本发明涉及一种用于将基板固定在悬浮在气相沉积系统的真空室中的涂覆源上方的行星旋转平台上的磁性闩锁， 化学气相沉积（CVD）系统或物理气相沉积（PVD）系统。 磁性闩锁包括永久磁铁，该永久磁铁可以在其中永磁体磁化闩锁以吸引衬底保持器的闩锁位置与永久磁铁连接在旁路电路中的解锁位置之间移动，从而使 用于释放衬底保持器的闩锁。
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公开(公告)号：US07954219B2
公开(公告)日：2011-06-07
申请号：US11851779
申请日：2007-09-07
IPC分类号： B25B27/04
CPC分类号： C23C14/50 , H01L21/68721 , H01L21/68728 , H01L21/68764 , Y10T29/49895 , Y10T29/49998 , Y10T29/53957
摘要： A device for mounting and removing a substrate from a baseplate, in particular a substrate holder assembly device, including automated features for latching and unlatching a substrate, for use in a coating mechanism, from a baseplate, which includes an adjustable snap ring holder.
摘要翻译： 一种用于从基板，特别是基板保持器组件装置安装和移除基板的装置，包括用于从包括可调节卡环的基板在用于涂覆机构中的用于锁定和解锁基板的自动特征。
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公开(公告)号：US08500973B2
公开(公告)日：2013-08-06
申请号：US12402322
申请日：2009-03-11
CPC分类号： H01J37/3405 , H01J37/3438
摘要： A sputtering anode is disclosed wherein the anode is in the form of a container or vessel; and, wherein the conducting surface communicating with a cathode is the inside surface of the container or vessel. The anode can be mounted outside of a coating chamber having its opening communicating with the chamber or alternatively may be mounted within the chamber. The anode may be an inlet port for receiving inert gas for use in forming the plasma and for pressurizing the anode.
摘要翻译： 公开了一种溅射阳极，其中阳极是容器或容器的形式; 并且其中与阴极连通的导电表面是容器或容器的内表面。 阳极可以安装在其开口与腔室连通的涂覆室的外部，或者可以安装在腔室内。 阳极可以是用于接收用于形成等离子体和用于对阳极加压的惰性气体的入口。
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公开(公告)号：US5112644A
公开(公告)日：1992-05-12
申请号：US491474
申请日：1990-03-08
IPC分类号： C23C14/50
CPC分类号： C23C14/505 , Y10S414/123
摘要： A simple, double rotary workpiece or cage holder is disclosed for coating articles such as tubes or article-holders. The articles or article holders are supported in oversized support holes or on undersized pegs so that rotation of the cage about a horizontal axis causes gravity-induced precession of the tubes. The center of gravity of the article holders may be displaced so that the article holders are maintained at an acute angle relative to the cage axis, to facilitate coating difficult shapes such as lenses.
摘要翻译： 公开了一种简单的双旋转工件或保持架，用于涂覆物品如管或物品保持器。 物品或物品保持器支撑在超大的支撑孔或小尺寸的钉中，使得笼围绕水平轴的旋转引起重力引起的管的进动。 物品保持器的重心可以移位，使得物品保持器相对于保持架轴线保持锐角，以便于涂覆诸如透镜的困难形状。
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8.发明授权
公开(公告)号：US4293732A
公开(公告)日：1981-10-06
申请号：US51379
申请日：1979-06-25
IPC分类号： H01L31/0216 , H01L31/06
CPC分类号： C03C17/3417 , H01L31/02168 , Y02E10/50
摘要： Solar cell construction having a body formed essentially of silicon and having a surface with a photovoltaic junction applied thereon. An anti-reflection coating is formed on the surface. A transparent protective cover is provided. A cut-on filter is carried by the cover for reflecting solar energy below approximately 350 nanometers. A layer of substantially transparent cement is used for securing the protective cover to the body so that it overlies the junction and the anti-reflection coating. The cut-on filter includes a stack of high and low index layers for reflecting solar energy in the ultra-violet region of 350 nanometers and below and also may include at least one additional layer of material of absorbing ultraviolet energy below 350 nanometers which passes through the high and low index layers above it.
摘要翻译： 太阳能电池结构具有基本上由硅形成并且具有其上施加有光伏结的表面的主体。 在表面上形成防反射涂层。 提供透明保护罩。 封闭式过滤器由盖子承载，用于将太阳能反射到大约350纳米以下。 一层基本上透明的水泥用于将保护盖固定到主体上，使其覆盖在接合处和防反射涂层之间。 切入式过滤器包括用于在350纳米及以下的紫外区域反射太阳能的高折射率层和低折射率层的堆叠，并且还可以包括至少一个额外的吸收低于350纳米的紫外线能量的材料层，其通过 其上方的高和低折射率层。
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公开(公告)号：US4276855A
公开(公告)日：1981-07-07
申请号：US35396
申请日：1979-05-02
申请人： Richard I. Seddon
发明人： Richard I. Seddon
CPC分类号： C23C14/564 , C23C14/50
摘要： A coating apparatus having a housing and a vacuum pump for establishing a vacuum in the housing. First and second rotors are disposed within the housing for rotation about axes which are offset from the horizontal by less than 45.degree. whereby the upper portions of the rotors are in relatively close proximity to each other and the lower portions of the rotors are spaced apart from each other. A source of coating material is disposed between the rotors generally in line with the axis of rotation of the rotors. The rotors have substrate carrying surfaces having longitudinal dimensions extending generally parallel to the axis of rotation which is such so that an imaginary vertical line extending downwardly from the top portion of the substrate carrying surface from the inner extremity of the same clears the outermost margin of the lower portion of the substrate carrying surfaces of the rotor whereby debris and the like falling by force of gravity from the top portion of the rotor will clear the lower portion of the rotor.
摘要翻译： 一种具有壳体和用于在壳体中建立真空的真空泵的涂覆装置。 第一转子和第二转子设置在壳体内，用于围绕与水平偏移小于45度的轴旋转，由此转子的上部彼此相对靠近并且转子的下部与 彼此。 涂层材料的源头设置在转子之间，大体上与转子的旋转轴线一致。 转子具有基本承载表面，其具有大体上平行于旋转轴线延伸的纵向尺寸，使得从基板承载表面的顶部向下延伸的从该基板承载表面的顶部向下延伸的假想垂直线将第一边缘的最外边缘清除 转子的承载表面的底部的下部，由于来自转子的顶部的力的重力引起的碎屑等将使转子的下部部分清除。
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公开(公告)号：US5124013A
公开(公告)日：1992-06-23
申请号：US640487
申请日：1991-01-10
IPC分类号： C23C8/02 , C23C14/00 , C23C14/08 , C23C14/10 , C23C14/34 , C23C14/35 , C23C14/50 , C23C14/56 , C23C14/58
CPC分类号： C23C14/3407 , C23C14/0047 , C23C14/0078 , C23C14/083 , C23C14/10 , C23C14/352 , C23C14/505 , C23C14/56 , C23C14/562 , C23C14/58 , C23C8/02 , H01J2237/022
摘要： A high ratio planetary drive system, a vacuum processing chamber system incorporating the planetary drive system, and a method of operating the system are disclosed. The planetary drive system provides relatively slow planetary workpiece rotation for effecting processing (deposition and reaction) of thin films, in particular, optical thin films, with complete film oxidation, controlled film uniformity, reduced bearing wear and reduced heat dissipation.
摘要翻译： 公开了一种高比例的行星驱动系统，包括行星驱动系统的真空处理室系统和操作该系统的方法。 行星驱动系统提供相对较慢的行星工件旋转，用于实现薄膜特别是光学薄膜的处理（沉积和反应），具有完整的膜氧化，受控的膜均匀性，降低的轴承磨损和减少的散热。
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