公开(公告)号：US20190011259A1

公开(公告)日：2019-01-10

申请号：US15690443

申请日：2017-08-30

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Chiung-Wen Lin ,  Chiung-Cheng Lo

IPC: G01C19/5621 ,  B81B3/00

Abstract: A MEMS device includes at least two masses and at least one spring assembly, each of the spring assemblies including at least two folded-shape springs and at least two connection portions. The folded-shape springs are directly connected to each other at a connection point, and the folded-shape springs are respectively connected to the masses through the corresponding connection portions, for operably driving the masses to move simultaneously inward or outward in a first direction.

公开(公告)号：US20170328800A1

公开(公告)日：2017-11-16

申请号：US15649062

申请日：2017-07-13

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Cheng-Syun Li ,  Chiung-Cheng Lo ,  Chia-Yu Wu ,  Shih-Chieh Lin

IPC: G01L19/00 ,  B81B7/02 ,  G01L9/00

CPC classification number: G01L19/0092 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/0353 ,  B81B2207/11 ,  B81C1/00309 ,  G01L9/0042 ,  G01L9/0054 ,  G01L9/0072 ,  G01L9/0073 ,  G01L19/0618

Abstract: The invention provides a combo MEMS device. The combo MEMS device includes a substrate, a device layer, a cap, and at least two sensor units. The device layer is on the substrate. The cap is on the device layer. At least two sensor units which are adjacent to each other are both formed by the substrate, the device layer, and the cap. The first sensor unit includes a sealed space, and the second sensor unit includes a membrane and a semi-sealed space. The membrane is formed by reducing a thickness of a portion of the device layer. The semi-sealed space is formed between the substrate and the device layer or between the device layer and the cap, to receive an external pressure through an external pressure communication opening. The external pressure communication opening is formed between the substrate and the device layer, or between the device layer and the cap, or between the substrate and the cap.

公开(公告)号：US20190120625A1

公开(公告)日：2019-04-25

申请号：US15915925

申请日：2018-03-08

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Chiung-Cheng Lo ,  Chiung-Wen Lin ,  Jye Ren

IPC: G01C19/5712 ,  B81B3/00

Abstract: A MEMS device, includes: a substrate; at least two driving units, located on the substrate; at least two movable structures, respectively connected to the at least two driving units; and at least two internal mass structures, or at least one internal mass structure and at least two external mass structures, the internal mass structure being connected between the two movable structures, wherein the external mass structures are connected to and located outside the two movable structures. In response to a movement of the MEMS device, the internal mass structure rotates, and the external mass structures move in opposite directions. There is no flexible element directly connecting the mass structures, so as to reduce a coupling effect between the mass structures.

公开(公告)号：US20180299270A1

公开(公告)日：2018-10-18

申请号：US15596857

申请日：2017-05-16

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Chia-Yu Wu ,  Chiung-Cheng Lo

IPC: G01C19/5726 ,  G01C19/5755

Abstract: A MEMS (Micro-Electro-Mechanical System) device includes: a substrate, including an anchor; a proof mass, including a centroid, wherein there is a distance between the centroid and the anchor; at least two spring assemblies, connected between two opposite sides of the anchor and the proof mass, to assist a motion of the proof mass; and plural sensing capacitances, located between the substrate and the proof mass to operably sense the motion of the mass; wherein each of the spring assemblies includes a parallel-swing spring and a compression spring which are serially connected to each other.

公开(公告)号：US20180004233A1

公开(公告)日：2018-01-04

申请号：US15249253

申请日：2016-08-26

Applicant: Richtek Technology Corporation

Inventor： Shih-Chieh Lin ,  Yu-Fu Kang ,  Chiung-Cheng Lo

IPC: G05D7/06 ,  F16K1/04 ,  B67D7/32 ,  B05B12/08 ,  B67D7/12 ,  B67D7/04 ,  F16K1/12 ,  B67D7/42

CPC classification number: G05D7/0635 ,  B05B12/08 ,  B67D7/04 ,  B67D7/12 ,  B67D7/3218 ,  B67D7/425 ,  F16K1/04 ,  F16K1/126 ,  F16K17/36

Abstract: A fluid dispenser, includes: a fluid dispensation pipe, for receiving a fluid and controlling a dispensation the fluid; a MEMS sensor, for sensing a movement of the fluid dispenser, wherein when the movement is determined to be in an abnormal status, the MEMS sensor generates an alarm signal; and a dispensation stopper, for stopping the dispensation of the fluid according to the alarm signal.