摘要:
A batch of wafer substrates is provided with each wafer substrate having a surface. Each surface is coated with a layer of material applied simultaneously to the surface of each of the batch of wafer substrates. The layer of material is applied to a thickness that varies less than four thickness percent across the surface and exclusive of an edge boundary and having a wafer-to-wafer thickness variation of less than three percent. The layer of material so applied is a silicon oxide, silicon nitride or silicon oxynitride with the layer of material being devoid of carbon and chlorine. Formation of silicon oxide or a silicon oxynitride requires the inclusion of a co-reactant. Silicon nitride is also formed with the inclusion of a nitrification co-reactant. A process for forming such a batch of wafer substrates involves feeding the precursor into a reactor containing a batch of wafer substrates and reacting the precursor at a wafer substrate temperature, total pressure, and precursor flow rate sufficient to create such a layer of material. The delivery of a precursor and co-reactant as needed through vertical tube injectors having multiple orifices with at least one orifice in registry with each of the batch of wafer substrates and exit slits within the reactor to create flow across the surface of each of the wafer substrates in the batch provides the within-wafer and wafer-to-wafer uniformity.
摘要:
An apparatus is provided for thermally processing substrates held in a carrier. The apparatus includes a cross-flow liner to improve gas flow uniformity across the surface of each substrate. The cross-flow liner of the present invention includes a longitudinal bulging section to accommodate a cross-flow injection system. The liner is patterned and sized so that it is conformal to the wafer carrier, and as a result, reduces the gap between the liner and the wafer carrier to reduce or eliminate vortices and stagnation in the gap areas between the wafer carrier and the liner inner wall.
摘要:
An apparatus is provided for thermally processing substrates held in a carrier. The apparatus includes an across-flow liner to improve gas flow uniformity across the surface of each substrate. The across-flow liner of the present invention includes a longitudinal bulging section to accommodate a across-flow injection system. The liner is patterned and sized so that it is conformal to the wafer carrier, and as a result, reduces the gap between the liner and the wafer carrier to reduce or eliminate vortices and stagnation in the gap areas between the wafer carrier and the liner inner wall.
摘要:
A seat assembly machine includes a plurality of grippers useful for securing a piece of trim to a seat cushion. In a disclosed example, each gripper includes a plurality of prongs that are moved between neutral, closed and released positions that each facilitate a different portion of the assembly process. In one example, each gripper includes a sleeve within which the prongs are moveable so that the prongs are manipulated between the neutral, closed and released positions. A disclosed example sleeve includes an interior channel having a contour that manipulates the prongs between the different positions based on the location of the prongs within the sleeve.
摘要:
An assembly machine includes a support structure having a plurality of selectively moveable support members that facilitate manually manipulating a tool relative to a work piece. A controller continuously gathers position information regarding the support members to determine every position of the tool. The controller includes a teach mode that allows for storing selected tool activation positions in particular sequences for subsequent control of the tool according to necessary procedures for completing a variety of assembly processes. One example machine designed according to this invention includes selectively controlled biasing members that maintain a zero balance on the tool, provide an operator assist to moving the tool or both.
摘要:
A seat assembly machine includes a plurality of grippers useful for securing a piece of trim to a seat cushion. In a disclosed example, each gripper includes a plurality of prongs that are moved between neutral, closed and released positions that each facilitate a different portion of the assembly process. In one example, each gripper includes a sleeve within which the prongs are moveable so that the prongs are manipulated between the neutral, closed and released positions. A disclosed example sleeve includes an interior channel having a contour that manipulates the prongs between the different positions based on the location of the prongs within the sleeve.
摘要:
A drywall patch includes a base member having a handle attached to it by frangible arms of a yoke, allowing the drywall patch, which also serves as a strong reinforcement plate, strengthening the wall in the repaired area, to be pulled against the blind side of a wall following insertion of the drywall patch into a hole. While the drywall patch is held against the blind side of the wall, screws are used to fasten the patch to the wall, then the handle is removed by breaking it from the base member. Patching compound is then applied, sanded and painted to finish the repair. The base member includes an array of conical apertures to hold patching compound better. Alternatively, the handle may be left attached to the base member and used as a hanger.
摘要:
Improved methods, apparatus, and systems for obtaining information regarding a formation, a casing, or fluid within the casing utilize an interrogator and one or more sensing devices attached to a casing in a wellbore. The interrogator, which is located and typically movable inside the wellbore, is effectively a toroidal transformer which includes an elongate conducting body surrounded by a core of high magnetic permeability material and carrying a winding. The sensing device, which is positioned and fixed in an opening cut in the casing, includes a housing, a sensor with associated electronic circuitry and an electrode. The electrode is insulated from the casing by an insulator, and the housing of the sensing device is typically adapted to provide a hydraulic seal with the opening in the casing. The interrogator and sensing device communicate in a wireless manner.
摘要:
The device to store, sift and measure flour has a container that is generally rectangular in cross section, and that is relatively tall in relation to its horizontal dimensions. A sifting mechanism divides the container roughly in half vertically, and a measuring mechanism is disposed just below the sifting mechanism. Flour is stored in the upper portion of the container, and sifted and measured flour is received into the lower portion of the container, preferably into a removable drawer.
摘要:
A method and apparatus are disclosed to enhance access to an archive of motion picture assets for which the storage volume has been physically reduced. All B-negative, trims and outs, sound rolls, mag, dailies, work prints, scripts, and reports are manually consolidated and indexed by a computer database retain accessibility. The consolidated assets are digitized and made available in thumbnail versions to users remote from the archive, thereby increasing the availability, usability, security, and value of the consolidated assets.