Diffraction unlimited photolithography
    2.
    发明授权
    Diffraction unlimited photolithography 失效
    衍射无限光刻

    公开(公告)号:US08697346B2

    公开(公告)日:2014-04-15

    申请号:US13078485

    申请日:2011-04-01

    IPC分类号: G03F7/00 G03F7/20

    摘要: Methods, devices, systems, and materials are disclosed for diffraction unlimited photofabrication. A method is provided where a photoresponsive material is illuminated with a first optical pattern at a first wavelength of light. The first wavelength of light alters a solubility of the photoresponsive organic material. The photoresponsive material is also illuminated with a second optical pattern at a second wavelength of light. The second wavelength of light hinders the ability of the first wavelength of light to alter the solubility of the photoresponsive organic material where the second optical pattern overlaps the first optical pattern. The photoresponsive organic material is then developed.

    摘要翻译: 公开了用于衍射无限制造的方法,装置,系统和材料。 提供一种方法,其中光响应材料在第一波长的光下用第一光学图案照亮。 光的第一波长改变光响应有机材料的溶解度。 光响应材料也用第二波长的光照射第二光学图案。 光的第二波长阻碍第一波长的光改变光响应有机材料在第二光学图案与第一光学图案重叠的溶解度的能力。 然后开发光响应有机材料。

    Polarization-dependent retroreflection mirror device

    公开(公告)号:US06545805B2

    公开(公告)日:2003-04-08

    申请号:US09855569

    申请日:2001-05-16

    IPC分类号: G02B530

    CPC分类号: G02B27/28 G02B5/12

    摘要: Conventional retroreflection mirrors in the form of right angle prisms are quite sensitive to beam position and beam angle errors. Manufacturing and assembly tolerances are also a cause of concern in conventional devices. Accordingly, the present invention solves these aforementioned problems by providing a retroreflection device comprising: a beam director, preferably in the form of a Wollaston prism; a polarization rotator, preferably in the form of a quarter wave plate; and a flat reflective surface, such as a plane mirror. The device of the present invention is far less sensitive to beam angle alignment and is completely independent of the beam position. The present invention is particularly useful as a beam splitter for directing orthogonally polarized beams of light back along parallel paths in an interleaver apparatus.

    Focus error signal generation using a birefringent lens with confocal detection
    4.
    发明授权
    Focus error signal generation using a birefringent lens with confocal detection 有权
    使用共聚焦检测的双折射透镜产生聚焦误差信号

    公开(公告)号:US06269057B1

    公开(公告)日:2001-07-31

    申请号:US09229138

    申请日:1999-01-12

    IPC分类号: G11B700

    摘要: An improved focus error signal generator device including two optical lenses in series; a birefringent optical lens followed by a standard optical lens, the lenses being disposed in the path of a return read beam wherein the birefringent optical lens has a first and second focal plane. A pinhole is disposed in the path of the return read beam in close proximity to the first and second focal planes. A polarizing beam splitter is positioned after the second focal plane and serves to split the return read beam into two light beams of polarization associated with the first and second focal planes. First and second detectors are positioned so as to read the two light beams signals output from the polarizing beam splitter and the detectors are connected to an electrical differencing circuit having an output to an optical head servo system.

    摘要翻译: 一种改进的聚焦误差信号发生器装置,包括串联的两个光学透镜; 双折射光学透镜后面是标准光学透镜,透镜设置在返回读取光束的路径中,其中双折射光学透镜具有第一和第二焦平面。 针孔布置在返回读取光束的路径中,紧邻第一和第二焦平面。 偏振分束器位于第二焦平面之后,用于将返回读取光束分成与第一和第二焦平面相关联的两个偏振光束。 定位第一和第二检测器以便读取从偏振分束器输出的两个光束信号,并且检测器连接到具有到光学头伺服系统的输出的电差分电路。

    System and method for correcting sampling errors associated with radiation source tuning rate fluctuations in swept-wavelength interferometry
    5.
    发明授权
    System and method for correcting sampling errors associated with radiation source tuning rate fluctuations in swept-wavelength interferometry 失效
    用于校正与扫描波长干涉测量中的辐射源调谐速率波动相关的采样误差的系统和方法

    公开(公告)号:US08392138B2

    公开(公告)日:2013-03-05

    申请号:US12537003

    申请日:2009-08-06

    IPC分类号: G01B9/02 G06F19/00

    摘要: The frequency-sampling method is widely used to accommodate nonlinear electromagnetic source tuning in swept-wavelength interferometric techniques, such as optical frequency domain reflectometry (OFDR) and swept-wavelength optical coherence tomography (OCT). Two sources of sampling errors are associated with the frequency-sampling method. One source of error is the limit of an underlying approximation for long interferometer path mismatches and fast electromagnetic source tuning rates. A second source of error is transmission delays in data acquisition hardware. Aspects of the invention relate to a method and system for correcting sampling errors in swept-wavelength interferometry systems such that the two error sources correct sampling errors associated with the first radiation path and the second radiation path cancel to second order.

    摘要翻译: 频率采样方法被广泛用于适应扫描波长干涉技术中的非线性电磁源调谐,如光频域反射测量(OFDR)和扫描波长光学相干断层扫描(OCT)。 采样误差的两个来源与频率采样方法相关。 误差的一个来源是长干涉仪路径不匹配和快速电磁源调谐速率的底层近似的极限。 第二个错误来源是数据采集硬件中的传输延迟。 本发明的方面涉及用于校正扫频波长干涉测量系统中的采样误差的方法和系统,使得两个误差源校正与第一辐射路径相关联的采样误差和第二辐射路径取消到二阶。

    SYSTEM AND METHOD FOR CORRECTING SAMPLING ERRORS ASSOCIATED WITH RADIATION SOURCE TUNING RATE FLUCTUATIONS IN SWEPT-WAVELENGTH INTERFEROMETRY
    6.
    发明申请
    SYSTEM AND METHOD FOR CORRECTING SAMPLING ERRORS ASSOCIATED WITH RADIATION SOURCE TUNING RATE FLUCTUATIONS IN SWEPT-WAVELENGTH INTERFEROMETRY 失效
    用于校正与SWEPT-WAVELENGTH INTERFEROMETRY中的辐射源调谐速率波动相关的采样误差的系统和方法

    公开(公告)号:US20100145648A1

    公开(公告)日:2010-06-10

    申请号:US12537003

    申请日:2009-08-06

    IPC分类号: G01B9/02 G01R35/00 G06F19/00

    摘要: The frequency-sampling method is widely used to accommodate nonlinear electromagnetic source tuning in swept-wavelength interferometric techniques, such as optical frequency domain reflectometry (OFDR) and swept-wavelength optical coherence tomography (OCT). Two sources of sampling errors are associated with the frequency-sampling method. One source of error is the limit of an underlying approximation for long interferometer path mismatches and fast electromagnetic source tuning rates. A second source of error is transmission delays in data acquisition hardware. Aspects of the invention relate to a method and system for correcting to sampling errors in swept-wavelength interferometry systems such that the two error sources correct sampling errors associated with the first radiation path and the second radiation path cancel to second order.

    摘要翻译: 频率采样方法被广泛用于适应扫描波长干涉技术中的非线性电磁源调谐,如光频域反射测量(OFDR)和扫描波长光学相干断层扫描(OCT)。 采样误差的两个来源与频率采样方法相关。 误差的一个来源是长干涉仪路径不匹配和快速电磁源调谐速率的底层近似的极限。 第二个错误来源是数据采集硬件中的传输延迟。 本发明的方面涉及用于校正扫频波长干涉测量系统中的采样误差的方法和系统,使得两个误差源校正与第一辐射路径相关联的采样误差和第二辐射路径抵消到二阶。

    Monolithic waveguide arrays
    7.
    发明授权
    Monolithic waveguide arrays 有权
    单片波导阵列

    公开(公告)号:US07212723B2

    公开(公告)日:2007-05-01

    申请号:US11357737

    申请日:2006-02-16

    IPC分类号: G02B6/00

    CPC分类号: G02B6/13 G02B6/138

    摘要: A waveguide array is fabricated by providing a photoreactive material and generating an optical intensity pattern corresponding to a geometry of the waveguide array. A relative translation of the photoreactive material is effected through the optical intensity pattern. Thereafter, the photoreactive material is rendered substantially unreactive to light at at least a wavelength of the optical intensity pattern.

    摘要翻译: 通过提供光反应材料并产生对应于波导阵列的几何形状的光强度图案来制造波导阵列。 通过光强度图案实现光反应性材料的相对平移。 此后,使光反应性材料在光强度图案的至少一个波长处基本上不反应光。

    Tracking error signal generation using confocally filtered detection
    9.
    发明授权
    Tracking error signal generation using confocally filtered detection 失效
    使用并行滤波检测跟踪误差信号生成

    公开(公告)号:US06563779B1

    公开(公告)日:2003-05-13

    申请号:US09595433

    申请日:2000-06-15

    IPC分类号: G11B700

    摘要: A tracking error signal generation apparatus and method which utilizes confocal detection with a split detector and a differencing circuit for generation of tracking error signals. A first lens is positioned in the path of a light beam returning from an optical medium. A pinhole is positioned in the path of the light beam after the first lens and proximate to the focal plane of the first lens. A second lens is positioned in the path of the light beam after the pinhole, and a split detector, having equal halves is positioned in the path of the light beam after the second lens. A differencing circuit is operatively coupled to each of the halves of the split detector. In operation, a light beam is focused by an optical head onto a track in the optical medium, and the reflection of the beam from the optical medium is directed through the first lens, through the pinhole, through the second lens, and onto the split detector. When the focus of the light beam is centered on the track, the reflected light reaching the split detector is evenly distributed on the two halves of the detector, such that the differencing circuit will generate a tracking error signal (TES) having nominally a zero value. When the focus of the light beam is off-center with respect to the track, the reflected light received by detector is unevenly distributed on the two halves of the detector such that the differencing circuit generates a non-zero tracking error signal, which will be of positive or negative value depending upon the direction off-center of the light beam focus spot. The tracking error signals thus generated are communicated to a servo system which will reposition the optical head to maintain the light beam focus spot on the center of the track.

    摘要翻译: 一种跟踪误差信号产生装置和方法,其利用具有分离检测器的共焦检测和用于产生跟踪误差信号的差分电路。 第一透镜位于从光学介质返回的光束的路径中。 针孔位于第一透镜之后的光束的路径中并且靠近第一透镜的焦平面。 第二透镜位于针孔之后的光束的路径中,并且具有相等的一半的分割检测器位于第二透镜之后的光束的路径中。 差分电路可操作地耦合到分离检测器的每个半部。 在操作中,光束被光学头聚焦在光学介质中的轨道上,并且来自光学介质的光束的反射通过第一透镜,穿过针孔穿过第二透镜并被引导到分裂 探测器。 当光束的焦点以轨迹为中心时,到达分割检测器的反射光均匀分布在检测器的两半上,使得差分电路将产生标称为零值的跟踪误差信号(TES) 。 当光束的焦点相对于轨道偏心时,由检测器接收的反射光不均匀地分布在检测器的两半上,使得差分电路产生非零跟踪误差信号,这将是 取决于光束聚焦点的偏心方向的正值或负值。 如此生成的跟踪误差信号被传送到伺服系统,该伺服系统将重新定位光头以将光束聚焦点保持在轨道的中心。

    Strain-stabilized birefringent crystal
    10.
    发明授权
    Strain-stabilized birefringent crystal 失效
    应变稳定的双折射晶体

    公开(公告)号:US06437916B1

    公开(公告)日:2002-08-20

    申请号:US09727439

    申请日:2000-12-04

    IPC分类号: G02B530

    CPC分类号: G02B5/3083 Y10S359/90

    摘要: The invention provides an optical system for use in a stable, temperature-insensitive birefringent crystal interferometer (BCI). The optical system includes a first block of light transmissive birefringent material having an input port and an output port, the material having in the spectral region of desired device operation a net retardance at a first temperature, and straining means for inducing a strain in one of the first block and a second block of light transmissive material optically coupled to the first block, the strain induced for maintaining the net retardance substantially unchanged from the net retardance at least a second other temperature. Advantageously, the optical system uses a single variety of crystal, which is cheaper, more robust, and has better performance than BCIs having two crystal varieties.

    摘要翻译: 本发明提供一种用于稳定的不敏感双折射晶体干涉仪(BCI)的光学系统。 光学系统包括具有输入端口和输出端口的第一透光双折射材料块,该材料在所需器件操作的光谱区域具有在第一温度下的净延迟,以及用于在第一温度之一中诱发应变的应变装置 光学耦合到第一块的第一块和第二光透射材料块,所述应变被引导用于将净延迟保持在与至少第二其它温度的净延迟性基本上不变的位置。 有利地,光学系统使用比具有两个晶体品种的BCI更便宜,更坚固并且具有更好性能的单种晶体。