公开(公告)号：USRE36498E

公开(公告)日：2000-01-18

申请号：US172541

申请日：1998-10-14

Applicant: Roger T. Howe ,  Stephen Bart

Inventor： Roger T. Howe ,  Stephen Bart

IPC: G01L1/14 ,  G01P15/125 ,  G01P15/13 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01L1/148 ,  G01P15/131 ,  H01G5/14 ,  G01P2015/0814

Abstract: A micromachined force sensor containing separate sensing and actuator structures. A member is suspended above the substrate so that it is movable along an axis in response to a force. The member includes a set of parallel sense fingers and a separate set of parallel force fingers. The sense fingers are positioned between fingers of two sense plates, to form a first differential capacitor, whose capacitance changes when the member moves in response to a force along the axis. The change in capacitance induces a sense signal on the member, which permits the measurement of the magnitude and duration of the force. The force fingers are positioned between fingers of two actuator plates, to form a second differential capacitor. The sense signal can be used to provide feedback to the second differential capacitor to generate different electrostatic forces between the force fingers and the two actuator plates, to offset the force applied along the preferred axis. Limit stops limit the movement of the member to less than the distance between the electrodes of the differential capacitors, to prevent contact between the electrodes. Additional fingers be positioned around the differential capacitors to minimize parasitic capacitances.

Abstract translation: 包含单独的传感和致动器结构的微加工力传感器。 构件悬挂在基板上方，使得其可以响应于力而沿轴线移动。 该构件包括一组平行的手指和一组单独的平行的手指。 感测指状物定位在两个感测板的指状物之间，以形成第一差分电容器，当构件响应于沿着轴的力移动时，其电容发生变化。 电容的变化会引起元件上的感应信号，这样可以测量力的大小和持续时间。 力指定位于两个致动器板的指状物之间，以形成第二差分电容器。 感测信号可以用于向第二差分电容器提供反馈以在力指和两个致动器板之间产生不同的静电力，以抵消沿着优选轴施加的力。 限制停止将构件的移动限制为小于差分电容器的电极之间的距离，以防止电极之间的接触。 附加指状物位于差分电容器周围，以最小化寄生电容。

公开(公告)号：US5565625A

公开(公告)日：1996-10-15

申请号：US347795

申请日：1994-12-01

Applicant: Roger T. Howe ,  Stephen Bart

Inventor： Roger T. Howe ,  Stephen Bart

IPC: G01L1/14 ,  G01P15/125 ,  G01P15/13 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01L1/148 ,  G01P15/131 ,  H01G5/14 ,  G01P2015/0814

Abstract: A micromachined force sensor containing separate sensing and actuator structures. A member is suspended above the substrate so that it is movable along an axis in response to a force. The member includes a set of parallel sense fingers and a separate set of parallel force fingers. The sense fingers are positioned between fingers of two sense plates, to form a first differential capacitor, whose capacitance changes when the member moves in response to a force along the axis. The change in capacitance induces a sense signal on the member, which permits the measurement of the magnitude and duration of the force. The force fingers are positioned between fingers of two actuator plates, to form a second differential capacitor. The sense signal can be used to provide feedback to the second differential capacitor to generate different electrostatic forces between the force fingers and the two actuator plates, to offset the force applied along the preferred axis. Limit stops limit the movement of the member to less than the distance between the electrodes of the differential capacitors, to prevent contact between the electrodes. Additional fingers be positioned around the differential capacitors to minimize parasitic capacitances.

公开(公告)号：US08329559B2

公开(公告)日：2012-12-11

申请号：US11737545

申请日：2007-04-19

Applicant: Hideki Takeuchi ,  Emmanuel P. Quevy ,  Tsu-Jae King ,  Roger T. Howe

Inventor： Hideki Takeuchi ,  Emmanuel P. Quevy ,  Tsu-Jae King ,  Roger T. Howe

IPC: H01L21/46 ,  H01L21/78 ,  H01L21/301

CPC classification number: B81C1/00142 ,  B81B2201/0271 ,  B81C2201/0109 ,  Y10S438/933

Abstract: In fabricating a microelectromechanical structure (MEMS), a method of forming a narrow gap in the MEMS includes a) depositing a layer of sacrificial material on the surface of a supporting substrate, b) photoresist masking and at least partially etching the sacrificial material to form at least one blade of sacrificial material, c) depositing a structural layer over the sacrificial layer, and d) removing the sacrificial layer including the blade of the sacrificial material with a narrow gap remaining in the structural layer where the blade of sacrificial material was removed.

Abstract translation: 在制造微机电结构（MEMS）中，在MEMS中形成窄间隙的方法包括：a）在支撑衬底的表面上沉积牺牲材料层，b）光致抗蚀剂掩模并且至少部分蚀刻牺牲材料以形成 至少一个牺牲材料刀片，c）在所述牺牲层上沉积结构层，以及d）去除包括所述牺牲材料刀片的所述牺牲层，其中所述牺牲材料刀片被去除的所述结构层中残留有窄间隙 。

公开(公告)号：US20100327874A1

公开(公告)日：2010-12-30

申请号：US12822971

申请日：2010-06-24

Applicant: Yang Liu ,  Robert W. Dutton ,  Roger T. Howe

Inventor： Yang Liu ,  Robert W. Dutton ,  Roger T. Howe

IPC: G01N27/62

CPC classification number: G01N33/48721 ,  C12Q1/68 ,  G01N27/04 ,  G01N27/4145 ,  G01N27/44791 ,  G01N33/68

Abstract: According to one aspect, the disclosure is directed to an example embodiment in which a circuit-based arrangement includes a circuit-based substrate securing a channel, with an effective width that is not limited by the Debye screening length, along a surface of the substrate. A pair of reservoirs are included in or on the substrate and configured for containing and presenting a sample having bio-molecules for delivery in the channel. A pair of electrodes electrically couple a charge in the sample to enhance ionic current flow therein (e.g., to overcome the electrolyte screening), and a sense electrode is located along the channel for sensing a characteristic of the biological sample by using the electrostatic interaction between the enhanced ionic current flow of the sample and the sense electrode. Actual detection occurs by using a charge-signal processing circuit to process the sensed charge signal and, therefrom, provide an output indicative of a signature for the bio-molecules delivered in the channel.

Abstract translation: 根据一个方面，本发明涉及一个示例性实施例，其中基于电路的布置包括基于电路的基板，其沿着基板的表面固定具有不受德拜屏蔽长度限制的有效宽度的通道 。 一对储存器包含在基底中或基底上，并且被配置为容纳和呈现具有用于在通道中递送的生物分子的样品。 一对电极将样品中的电荷电耦合以增强其中的离子电流（例如，以克服电解质屏蔽），并且感测电极沿着通道定位，以通过使用 样品和感应电极的增强的离子电流流动。 通过使用电荷信号处理电路来处理所感测的电荷信号，从而提供指示在通道中递送的生物分子的签名的输出，发生实际检测。

公开(公告)号：US6114044A

公开(公告)日：2000-09-05

申请号：US866833

申请日：1997-05-30

Applicant: Michael R. Houston ,  Roger T. Howe ,  Roya Maboudian ,  Uthara Srinivasan

Inventor： Michael R. Houston ,  Roger T. Howe ,  Roya Maboudian ,  Uthara Srinivasan

IPC: B81B3/00 ,  B32B9/04

CPC classification number: B81B3/0005 ,  B81C1/00928 ,  B81C2201/112 ,  B82Y30/00

Abstract: A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.

Abstract translation: 制造微机械的方法包括在微机械上构造低表面能膜的步骤。 然后用相对于低表面能膜的表面能高的漂洗液冲洗微机械，在低表面能膜和冲洗液之间产生大于90°的接触角。 当微冲洗液从冲洗液中移出时，这种相对大的接触角使微机械上的任何漂洗液体从微机械移位。 换句话说，微机器通过从基于液体的方法去除而被干燥。 因此，不需要单独的蒸发干燥步骤，因为微机器在干燥状态下从基于液体的方法中去除。 相对较大的接触角也用于防止微机械部件之间的有吸引力的毛细作用力，从而防止相邻微结构表面之间的接触和粘附。 低表面能膜可以由氟化的自组装单层膜构成。 本发明的加工避免使用对环境有害的健康危害的化学品。

公开(公告)号：US5858809A

公开(公告)日：1999-01-12

申请号：US820316

申请日：1997-03-18

Applicant: Kevin Hin-Leung Chau ,  Roger T. Howe ,  Richard S. Payne ,  Yang Zhao ,  Theresa A. Core ,  Steven J. Sherman

Inventor： Kevin Hin-Leung Chau ,  Roger T. Howe ,  Richard S. Payne ,  Yang Zhao ,  Theresa A. Core ,  Steven J. Sherman

IPC: G01P15/08 ,  G01P15/125 ,  H01L21/465

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A method and apparatus for providing a conductive plane beneath a suspended microstructure. A conductive region is diffused into a substrate. A dielectric layer is added, covering the substrate, and then removed from a portion of the conductive region. A spacer layer is deposited over the dielectric and exposed conductive region. A polysilicon layer is deposited over the spacer layer, and formed into the shape of the suspended microstructure. After removal of the spacer layer, the suspended microstructure is left free to move above an exposed conductive plane. The conductive plane is driven to the same potential as the microstructure.

Abstract translation: 一种用于在悬浮微结构下方提供导电平面的方法和装置。 导电区域扩散到衬底中。 添加介电层，覆盖基板，然后从导电区域的一部分去除。 间隔层沉积在电介质和暴露的导电区域上。 多晶硅层沉积在间隔层上，并形成悬浮微结构的形状。 在去除间隔层之后，使悬浮的微结构自由地在暴露的导电平面上移动。 导电平面被驱动到与微结构相同的电位。

公开(公告)号：US5542295A

公开(公告)日：1996-08-06

申请号：US348377

申请日：1994-12-01

Applicant: Roger T. Howe ,  H. Jerome Barber ,  Michael Judy

Inventor： Roger T. Howe ,  H. Jerome Barber ,  Michael Judy

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: B81B3/0008 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  Y10S73/01

Abstract: An electro-mechanical micromachined structure uses bumpers to prevent contact between structures at different potentials. A beam is connected to one or more anchors by flexible suspensions, which permit the beam to move along a predetermined axis relative to one or more plates. The suspension includes at least one bumper positioned so that the bumper will contact another part of the suspension before the beam contacts the plates. The bumper is made from the same material as the suspension, during the same processing step. The bumper is positioned to take advantage of shrinkage or expansion of the beam during processing which forces the bumper closer to its contact point then would otherwise be possible.

Abstract translation: 机电微加工结构使用缓冲器来防止在不同电位下的结构之间的接触。 梁通过柔性悬架连接到一个或多个锚固件，这允许梁相对于一个或多个板沿预定轴线移动。 悬架包括至少一个保险杠，其被定位成使得保险杠在梁接触板之前将接触悬架的另一部分。 在相同的加工步骤中，保险杠由与悬架相同的材料制成。 保险杠被定位成利用在加工过程中梁的收缩或膨胀，这迫使保险杠更靠近其接触点，否则将是可能的。

公开(公告)号：US4943750A

公开(公告)日：1990-07-24

申请号：US376208

申请日：1989-07-03

Applicant: Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

Inventor： Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

IPC: H02N1/00

CPC classification number: H02N1/004

Abstract: An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.

Abstract translation: 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留​​下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与具有定子的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。

公开(公告)号：US4896098A

公开(公告)日：1990-01-23

申请号：US273106

申请日：1988-11-16

Applicant: Joseph H. Haritonidis ,  Roger T. Howe ,  Martin A. Schmidt ,  Stephen D. Senturia

Inventor： Joseph H. Haritonidis ,  Roger T. Howe ,  Martin A. Schmidt ,  Stephen D. Senturia

IPC: G01N13/00

CPC classification number: G01N13/00

Abstract: A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate is suspended by arms to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate. The cavity beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer. The cavity is formed by a selective etchant removing the sacrificial layer and leaving the rest of the microbridge structure suspended above the substrate. In a differential capacitance readout scheme, a conducting layer in the plate of the microbridge is capacitively coupled with conductors in the substrate. A sensed change in capacitive coupling generates an indication of plate deflection and thereby shear stress independent of vertical movement. Optic readout schemes may also be employed and are readily incorporated in the fabrication process. A mounting member presses the microbridge sensor into a holding plate which fits in a matching slot flush with the target wall.

Abstract translation: 在存在波动压力的情况下，使用微桥来精确测量时变剪切力。 通过臂悬挂微尺寸板以形成微桥。 微尺寸使得能够在板的整个表面均匀地感测到感兴趣的最小湍流尺度。 微桥下面的空腔很小，使得在空腔内的空气中产生粘性阻力并阻尼板的正常运动。 结合腔的阻尼效应的微尺寸使得传感器对压力基本上不敏感，并因此感测与法向力无关的侧向力。 微桥传感器通过表面微加工制造。 牺牲层沉积在衬底上。 沉积并图案化结构层以在牺牲层上形成板和支撑臂。 通过选择性蚀刻剂除去该牺牲层并使悬浮在衬底上方的微桥结构的其余部分形成空腔。 在差分电容读出方案中，微桥板中的导电层与衬底中的导体电容耦合。 感测到的电容耦合变化产生板偏转的指示，从而产生与垂直运动无关的剪切应力。 也可以采用光学读出方案，并且容易地结合在制造过程中。 安装构件将微桥传感器压入保持板，该保持板适合与目标壁齐平的匹配槽。

公开(公告)号：US4805456A

公开(公告)日：1989-02-21

申请号：US52026

申请日：1987-05-19

Applicant: Roger T. Howe ,  Shih-Chia Chang

Inventor： Roger T. Howe ,  Shih-Chia Chang

IPC: G01P15/097 ,  G01P15/10 ,  G01P15/18

CPC classification number: G01P15/18 ,  G01P15/097 ,  G01P2015/084 ,  Y10S73/01

Abstract: An accelerometer is provided by a sample mass suspended in a central area of a support by pairs of resonating arms. One pair of arms lies on one axis through the sample mass. Another pair of arms lies on a second axis through the sample mass perpendicular to the one axis. Acceleration of the mass and support is detected by a measured change in resonant frequency of the arms of a pair. The measured change in resonant frequency is the magnitude of the acceleration and the axis along which the pair of arms lies provides the direction of the acceleration. Orthogonal components of acceleration are simultaneously measured by the pairs of arms lying on perpendicular axes. Electrostatic force-rebalance techniques and other known techniques for measuring acceleration in a direction perpendicular to the axes of the pairs of arms are readily incorporated to provide a third direction measurement of acceleration. The accelerometer is fabricated in a monolithic process which employs micromachining techniques.

Abstract translation: 加速度计由悬挂在支撑体的中心区域中的一对样品质量块组成，由一对谐振臂提供。 一对臂位于通过样品块的一个轴上。 另一对臂位于垂直于一个轴的样品质量的第二轴上。 通过测量一对臂的谐振频率的变化来检测质量和支撑的加速度。 谐振频率的测量变化是加速度的大小，一对臂所在的轴提供加速度的方向。 通过位于垂直轴上的成对的臂同时测量加速度的正交分量。 用于测量垂直于成对的轴的方向的加速度的静电 - 重新平衡技术和其它已知的技术很容易结合，以提供加速度的第三方向测量。 加速度计采用微加工技术制成的单片工艺。