Thermal print head
    1.
    发明授权

    公开(公告)号:US11633959B2

    公开(公告)日:2023-04-25

    申请号:US17470957

    申请日:2021-09-09

    Applicant: ROHM CO., LTD.

    Abstract: The present disclosure provides a thermal print head for achieving fine printing. A thermal print head of the disclosure includes: a substrate, having a substrate main surface and a substrate back surface facing opposite sides in a z direction; a resistor layer, disposed on a side of the substrate main surface and including a plurality of heat generating portions arranged in a main scan direction to generate heat by energization; a wiring layer, disposed on the side of the substrate main surface and including a conduction path for electrically conducting the plurality of heat generating portions; a metal layer, interposed between the substrate and the wiring layer with the resistor layer; and an insulating layer, interposed between the metal layer and the wiring layer with the resistor layer. The conduction path includes the metal layer. The metal layer includes tantalum (Ta).

    Capacitive pressure sensor, manufacturing method thereof, and pressure sensor package
    2.
    发明授权
    Capacitive pressure sensor, manufacturing method thereof, and pressure sensor package 有权
    电容式压力传感器及其制造方法以及压力传感器封装

    公开(公告)号:US08991262B2

    公开(公告)日:2015-03-31

    申请号:US13912434

    申请日:2013-06-07

    Applicant: Rohm Co., Ltd.

    Inventor: Goro Nakatani

    CPC classification number: G01L9/12 G01L9/0073

    Abstract: A capacitive pressure sensor includes a semiconductor substrate, a first insulating portion configured to define a sensor region, a reference pressure chamber configured to divide a lower portion of the sensor region in a direction, a second insulating portion configured to divide a surface portion of the sensor region above the reference pressure chamber in the direction, and a trench configured to divide the sensor region in the direction. The sensor region is divided into at least three semiconductor parts by the reference pressure chamber, the second insulating portion, and the trench.

    Abstract translation: 电容式压力传感器包括半导体衬底,被配置为限定传感器区域的第一绝缘部分,被配置为在传感器区域的一个方向上分隔下部的基准压力室,构造成将传感器区域的表面部分分割成的第二绝缘部分 传感器区域在所述方向上在所述参考压力室上方,以及沟槽,被配置为沿所述方向划分所述传感器区域。 传感器区域被参考压力室,第二绝缘部分和沟槽分成至少三个半导体部件。

    Capacitive pressure sensor and method of manufacturing the same
    3.
    发明授权
    Capacitive pressure sensor and method of manufacturing the same 有权
    电容式压力传感器及其制造方法

    公开(公告)号:US08975714B2

    公开(公告)日:2015-03-10

    申请号:US13757701

    申请日:2013-02-01

    Applicant: Rohm Co., Ltd.

    Inventor: Goro Nakatani

    Abstract: A capacitive pressure sensor includes: a semiconductor substrate having a reference pressure chamber formed therein; a diaphragm which is formed in a front surface of the semiconductor substrate and has a ring-like peripheral through hole penetrating between the front surface of the semiconductor substrate and the reference pressure chamber and defining an upper electrode and a plurality of central through holes; a peripheral insulating layer which fills the peripheral through hole and electrically isolates the upper electrode from other portions of the semiconductor substrate; and a central insulating layer which fills the central through holes.

    Abstract translation: 电容式压力传感器包括:在其中形成有基准压力室的半导体衬底; 隔膜,其形成在所述半导体衬底的前表面中,并且具有穿过所述半导体衬底的前表面和所述参考压力室之间并且限定上电极和多个中心通孔的环状周边通孔; 外周绝缘层,其填充周边通孔并将上电极与半导体衬底的其它部分电隔离; 以及填充中心通孔的中心绝缘层。

    Thermal print head and manufacturing method thereof

    公开(公告)号:US11850870B2

    公开(公告)日:2023-12-26

    申请号:US17845912

    申请日:2022-06-21

    Applicant: ROHM CO., LTD.

    Inventor: Goro Nakatani

    Abstract: The present disclosure provides a thermal print head. The thermal print head includes a substrate having a main surface and a convex portion and including a semiconductor material; a resistor layer including a plurality of heat generating portions located on the convex portion; and a wiring layer conducted to the plurality of heat generating portions and formed to contact the resistor layer. The convex portion has a top surface, a first inclined surface and a second inclined surface. The first inclined surface and the second inclined surface are disposed between the main surface and the top surface, separated from each other in a sub-scanning direction, and tilted with respect to the main surface. A first tilted angle of the first inclined surface with respect to the main surface and a second tilted angle of the second inclined surface with respect to the main surface are greater than 55 degrees.

    Manufacturing method of thermal print head

    公开(公告)号:US11642894B2

    公开(公告)日:2023-05-09

    申请号:US17470953

    申请日:2021-09-09

    Applicant: ROHM CO., LTD.

    Inventor: Goro Nakatani

    Abstract: The present disclosure provides a method for manufacturing a thermal print head. The method includes: forming an electrode layer on a substrate; and forming a resistor layer including a plurality of heat generating portions connected to the electrode layer. The electrode layer includes a plurality of individual electrodes including a plurality of first striped portions extending in a secondary scan direction and spaced apart in a main scan direction, and a common electrode including a plurality of second striped portions extending in the secondary scan direction. The forming of the resistor layer includes: a coating process of applying a resistor paste in a stripe that overlaps the first striped portions and the second striped portions; a firing process of firing the resistor paste to form a resistor film; and a removal process of removing a removal region in the resistor paste or the resistor film.

    Thermal print head, manufacturing method of thermal print head, and thermal printer

    公开(公告)号:US11458739B2

    公开(公告)日:2022-10-04

    申请号:US17239260

    申请日:2021-04-23

    Applicant: ROHM Co., Ltd.

    Inventor: Goro Nakatani

    Abstract: The present disclosure provides a thermal print head and a method manufacturing thereof and a thermal printer including the thermal print head, which are capable of suppressing low manufacturing efficiency and enhancing wear-resistance against a recording medium. The thermal print head includes: a substrate, having a main surface facing a thickness direction; a resistance layer, including multiple heating portions arranged in a main scan direction and formed on the main surface; a wiring layer, formed on the resistance layer and connected to the heating portions; and a protection layer, covering a part of the main surface, the heating portions and the wiring layer.

    Thermal print head, thermal printer and methods fabricating thereof

    公开(公告)号:US12036801B2

    公开(公告)日:2024-07-16

    申请号:US17818282

    申请日:2022-08-08

    Applicant: ROHM CO., LTD.

    CPC classification number: B41J2/3359 B41J2/3351 B41J2/33515

    Abstract: The present disclosure provides a thermal print head. The thermal print head includes a substrate, having a main surface facing one side in a thickness direction; a resistor layer, including a plurality of heat generating portions arranged in a main scanning direction and supported by the substrate; and a wiring layer, forming a power path to the plurality of heat generating portions and supported by the substrate. The substrate includes a convex portion protruding from the main surface and extending along the main scanning direction. The convex portion includes: a flat first surface on which each of the plurality of heat generating portions is disposed; and a first curved convex surface connected to the first surface.

    Thermal print head and method of manufacturing the same

    公开(公告)号:US11279145B2

    公开(公告)日:2022-03-22

    申请号:US16908143

    申请日:2020-06-22

    Applicant: Rohm Co., Ltd.

    Inventor: Goro Nakatani

    Abstract: A thermal print head includes a substrate; a protrusion formed on an obverse surface of the substrate and extending in a main scanning direction; heat generating parts disposed on a top surface of the protrusion and arranged along the main scanning direction; and columnar heat storage members embedded in the protrusion and disposed in a given area having a width in a sub-scanning direction and being elongated in the main scanning direction. Each of the columnar heat storage members is elongated in a thickness direction of the substrate and has an upper end and a lower end, with the upper end being disposed at the same level of the top surface of the protrusion.

    Method for manufacturing a MEMS sensor
    10.
    发明授权
    Method for manufacturing a MEMS sensor 有权
    MEMS传感器的制造方法

    公开(公告)号:US08975090B2

    公开(公告)日:2015-03-10

    申请号:US14331182

    申请日:2014-07-14

    Applicant: Rohm Co., Ltd.

    Abstract: A capacitance type gyro sensor includes a semiconductor substrate, a first electrode integrally including a first base portion and first comb tooth portions and a second electrode integrally including a second base portion and second comb tooth portions, formed by processing the surface portion of the semiconductor substrate. The first electrode has first drive portions that extend from opposed portions opposed to the respective second comb tooth portions on the first base portion toward the respective second comb tooth portions. The second electrode has second drive portions formed on the tip end portions of the respective second comb tooth portions opposed to the respective first drive portions. The first drive portions and the second drive portions engage with each other at an interval like comb teeth.

    Abstract translation: 电容式陀螺传感器包括半导体基板,一体地包括第一基座部分和第一梳齿部分的第一电极和通过处理半导体基板的表面部分而形成的包括第二基底部分和第二梳齿部分的第二电极 。 第一电极具有第一驱动部分,其从在第一基部上的相应的第二梳齿部分相对的部分朝向相应的第二梳齿部分延伸。 第二电极具有形成在与第一驱动部分相对的各个第二梳齿部分的末端部分上的第二驱动部分。 第一驱动部分和第二驱动部分以梳齿的间隔彼此接合。

Patent Agency Ranking