公开(公告)号：US20240184201A1

公开(公告)日：2024-06-06

申请号：US17985439

申请日：2022-11-11

Applicant: Rohm and Haas Electronic Materials LLC

Inventor： Conner A. Hoelzel ,  Li Cui ,  Jong Keun Park ,  Emad Aqad ,  James F. Cameron

IPC: G03F7/039 ,  C08F212/14 ,  C08F220/18 ,  G03F7/038

CPC classification number: G03F7/039 ,  C08F212/22 ,  C08F220/1807 ,  C08F220/1809 ,  G03F7/038

Abstract: A polymer including a first repeating unit derived from a first monomer represented by formula (1); and a second repeating unit comprising an acid labile group, a hydroxyaryl group, a sulfonamide group, a fluoroalcohol group, or a combination thereof,




wherein, in formula (1), P is a polymerizable group comprising an ethylenically unsaturated carbon-carbon double bond; L1 is a single bond or a linking group; Ar is a substituted or unsubstituted C6-30 aromatic group or a substituted or unsubstituted C4-30 heteroaromatic group; X is O or S; A is a group selected from —O—, —S—, —S(O)—, —S(O)2—, —C(O)—, —C(S)—, or —N(Ra)—; Ra is hydrogen or a non-hydrogen substituent; and R1 and R2 are each as defined herein, wherein the first repeating unit and the second repeating unit are structurally different.

公开(公告)号：US20240019779A1

公开(公告)日：2024-01-18

申请号：US17749880

申请日：2022-05-20

Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC

Inventor： Li Cui ,  Emad Aqad ,  Yinjie Cen ,  Conner A. Hoelzel ,  James F. Cameron ,  Jong Keun Park ,  Suzanne M. Coley ,  Choong-Bong Lee

IPC: G03F7/004 ,  C07C317/22 ,  C07C69/78

CPC classification number: G03F7/0045 ,  C07C317/22 ,  C07C2601/16 ,  C07C2601/08 ,  C07C69/78

Abstract: A compound represented by Formula (1):




wherein X is a group having a valency of r; each R1 is independently an organic group comprising an acid-labile group; m is an integer greater than or equal to 1; k is an integer from 1 to 5; and r is an integer from 2 to 10, wherein the compound is non-polymeric, and wherein Ar1, L1, L2, R2, and R3 are as defined herein.