公开(公告)号：US20240069443A1

公开(公告)日：2024-02-29

申请号：US18144622

申请日：2023-05-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Donghyeong Kim ,  Eunhee Jeang ,  Teun Boeren ,  Yoonsang Lee ,  Jeonggil Kim ,  Kyungbin Park

IPC: G03F7/20 ,  G01J1/42

CPC classification number: G03F7/70266 ,  G01J1/4257 ,  G03F7/70308 ,  G03F7/70516 ,  G03F7/706 ,  H01L21/0274

Abstract: An illumination correction apparatus for correcting a radiation beam incident on a reticle from an exposure apparatus includes a plurality of fingers each having a surface facing an incident direction of the radiation beam, the plurality of fingers being arranged in a first direction to be adjacent to a path of the radiation beam, and configured to adjust an amount of the incident radiation beam by moving in a second direction, intersecting the first direction, a controller connected to the plurality of fingers and configured to control movement of the plurality of fingers such that an intensity of the radiation beam has uniformity in the first direction, at least one optical sensor on the surface of at least one finger of the plurality of fingers, and a measurement unit configured to measure, based on an output of the at least one optical sensor, the intensity of the radiation beam.

公开(公告)号：US11828952B2

公开(公告)日：2023-11-28

申请号：US17218891

申请日：2021-03-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dohyung Kim ,  Seongchul Hong ,  Kyungsik Kang ,  Kyungbin Park ,  Motoshi Sakai ,  Seungkoo Lee ,  Jungchul Lee

IPC: G02B27/10 ,  H05G2/00 ,  G02B27/14 ,  H01S3/00 ,  H01S3/23 ,  G03F7/00 ,  H01S3/223

CPC classification number: G02B27/1073 ,  G02B27/106 ,  G02B27/108 ,  G02B27/141 ,  G03F7/70191 ,  H01S3/0071 ,  H01S3/2308 ,  H01S3/2383 ,  H05G2/008 ,  H01S3/2232

Abstract: A light source capable of operating third and fourth reflection mirrors included in a beam splitting device in conjunction with movements of first and second reflection mirrors included in a beam transfer device and an optical assembly, respectively. The third and fourth reflection mirrors are disposed on optical paths of a pre-pulse and a main pulse emitted from first and second pulse generators, respectively. The light source operates the third and fourth reflection mirrors to offset an excessive compensation of the main pulse caused in a process of compensating for an optical path error of the pre-pulse. The light source may be included in an extreme ultraviolet light source system.

公开(公告)号：US20220066225A1

公开(公告)日：2022-03-03

申请号：US17218891

申请日：2021-03-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dohyung Kim ,  Seongchul Hong ,  Kyungsik Kang ,  Kyungbin Park ,  Motoshi Sakai ,  Seungkoo Lee ,  Jungchul Lee

IPC: G02B27/10 ,  H05G2/00 ,  G02B27/14 ,  H01S3/00 ,  H01S3/23 ,  G03F7/20

Abstract: A light source capable of operating third and fourth reflection mirrors included in a beam splitting device in conjunction with movements of first and second reflection mirrors included in a beam transfer device and an optical assembly, respectively. The third and fourth reflection mirrors are disposed on optical paths of a pre-pulse and a main pulse emitted from first and second pulse generators, respectively. The light source operates the third and fourth reflection mirrors to offset an excessive compensation of the main pulse caused in a process of compensating for an optical path error of the pre-pulse. The light source may be included in an extreme ultraviolet light source system.

公开(公告)号：US20170173796A1

公开(公告)日：2017-06-22

申请号：US15278402

申请日：2016-09-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwang-Jun Kim ,  Doojin Kim ,  Kongwoo Lee ,  Joohyung Kim ,  Kyungbin Park ,  Nam-Su Yuk

IPC: B25J9/16 ,  B65G47/90 ,  G05D1/02

CPC classification number: B25J9/1697 ,  B25J9/1612 ,  B25J9/162 ,  B25J9/1679 ,  B65G47/905 ,  G05B2219/40053 ,  G05B2219/40538 ,  G05B2219/40613 ,  G05D1/0225 ,  G05D1/0234 ,  G05D1/0246 ,  G05D2201/0216 ,  Y10S901/01

Abstract: The present disclosure relates to a transfer robot and a method for controlling the same. The transfer robot includes a robot main body and a driving unit configured to move the robot main body toward a stage. The robot main body includes a distance sensor unit configured to obtain distance information between the robot main body and the stage, a first image acquisition unit configured to receive an image of a first mark of the stage and obtain a first image information, a manipulation unit configured to pick up a target object disposed on the stage, and a control unit configured to control the driving unit using the distance information and the first image information and thereby to causing the robot main body to be placed at a desired position spaced apart from the stage.