SEMICONDUCTOR FUSE STRUCTURE AND METHOD OF MANUFACTURING A SEMICONDUCTOR FUSE STRUCTURE

    公开(公告)号:US20210104460A1

    公开(公告)日:2021-04-08

    申请号:US16674739

    申请日:2019-11-05

    Abstract: A semiconductor device having a fuse structure includes a region of semiconductor material having a major surface. A dielectric region is over the major surface. A first fuse terminal is over a first part of the dielectric region, a second fuse terminal is over a second part of the dielectric region and spaced apart from the first fuse terminal to provide a gap region, and a fuse body over a third part of the dielectric region interposed between and connected to the first fuse terminal and the second fuse terminal. A dummy structure is over the dielectric region in the gap region on a first side of the fuse body, the dummy structure spaced apart and electrically isolated from the fuse body, the first fuse terminal, and the second fuse terminal. The dummy structure is configured to reduce the presence of or reduce the effects of defects, such as cracks or voids that can emanate from the fuse structure.

    FIN TRANSISTORS WITH SEMICONDUCTOR SPACERS

    公开(公告)号:US20220181462A1

    公开(公告)日:2022-06-09

    申请号:US17247212

    申请日:2020-12-03

    Abstract: In a general aspect, a transistor can include a fin having a proximal end and a distal end. The fin can include a dielectric portion longitudinally extending between the proximal end and the distal end, and a semiconductor layer disposed on the dielectric portion. The semiconductor layer can longitudinally extend between the proximal end and the distal end. The transistor can further include a source region disposed at the proximal end of the fin, and a drain region disposed at the distal end of the fin. The transistor can also include a gate dielectric layer disposed on a channel region of the semiconductor layer. The channel region can be disposed between the gate dielectric layer and the dielectric portion. The channel region can be longitudinally disposed between the source region and the drain region. The transistor can further include a conductive gate electrode disposed on the gate dielectric layer.

    SEMICONDUCTOR STRUCTURE HAVING LAMINATE DIELECTRIC FILMS AND METHOD OF MANUFACTURING A SEMICONDUCTOR STRUCTURE

    公开(公告)号:US20210143248A1

    公开(公告)日:2021-05-13

    申请号:US16682717

    申请日:2019-11-13

    Abstract: A semiconductor structure includes a region of semiconductor material having a major surface and a first a first insulating structure over the major surface. A first conductive electrode is over the first insulating structure and a laminate film structure is over the first conductive electrode. The laminate film structure includes a first film comprising rutile phase ruthenium dioxide adjacent to the first conductive electrode, and a second film over the first film, wherein the second film comprises a high dielectric constant dielectric material. A second conductive electrode is over the laminate film structure. In some examples, the first film is provided using atomic layer deposition. In some examples, the second film comprises rutile phase titanium dioxide formed using atomic layer deposition. In some examples, the laminate film structure can be used as part of a MIM capacitor.

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