公开(公告)号：US20180128716A1

公开(公告)日：2018-05-10

申请号：US15808377

申请日：2017-11-09

Applicant: Shimadzu Corporation

Inventor： Hiroshi Seki ,  Yoshihiro Ueno ,  Hiroshi Okuda ,  Hiromu Sakurai

IPC: G01N1/22 ,  B08B15/00

CPC classification number: G01N1/2208 ,  B08B15/00 ,  G01N1/2247 ,  G01N1/40 ,  G01N2001/2223 ,  G01N2001/4038

Abstract: Minute particles in a gas generated in a particle generating unit are charged by a charging unit. A concentrating unit concentrates charged particles in an introduced gas, and a collecting unit absorbs and collects the concentrated charged particles on a sample plate by an electrostatic force. In the concentrating unit, the charged particles are concentrated by decreasing a flow rate of a gas (carrier gas) in which particles are dispersed while maintaining the number of introduced charged particles. When the flow rate of the gas decreases, and spatial density of the particles increases, it is possible to efficiently collect charged particles on the small sample plate in the collecting unit, and to shorten a collection time.

公开(公告)号：US09875873B2

公开(公告)日：2018-01-23

申请号：US15501935

申请日：2014-08-08

Applicant: SHIMADZU CORPORATION

Inventor： Yoshihiro Ueno ,  Hiroshi Seki ,  Hiroshi Okuda

IPC: H01J27/02 ,  H01J49/12 ,  G01N27/62 ,  H01J37/32

CPC classification number: H01J27/024 ,  B03C7/02 ,  G01N15/0266 ,  G01N27/62 ,  G01N27/622 ,  G01N2015/0038 ,  H01J37/32009 ,  H01J37/32082 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32532 ,  H01J49/10 ,  H01J49/12

Abstract: A particle charger is provided with: a filter (28) partitioning the inside of a housing (20) into a first space (29) and second space (30); a particle introducer (22) for introducing a particle into the first space; a gas ion supplier (10) for supplying the first space with a gas ion; a potential gradient creator (26, 27, 31) for creating a potential difference within the housing so as to make the gas ion and a charged particle resulting from a contact of the aforementioned particle with the gas ion move toward the second space; an AC voltage supplier (32, 33) for applying AC voltages having a phase difference to the neighboring electrodes (28a, b) included in the filter; a controller (35) for performing a control for applying, to the plurality of electrodes, predetermined voltages so as to allow the charged particle to pass through a gap between the electrodes while trapping the gas ion by the electrodes; and a charged particle extractor (23, 25, 34) for extracting the charged particle admitted to the second space to the outside of the housing. By this configuration, the occurrence frequency of the multi-charging is suppressed.

公开(公告)号：US09606072B2

公开(公告)日：2017-03-28

申请号：US14735112

申请日：2015-06-09

Applicant: SHIMADZU CORPORATION

Inventor： Yusuke Tagawa ,  Hiroshi Oohara ,  Yoshihiro Ueno

IPC: G01N23/04 ,  G01T7/08

CPC classification number: G01N23/046 ,  G01T7/08

Abstract: In an X-ray inspecting apparatus, a rotational fluctuation amount of a stage is calculated around a power transmission part of the stage and a stage drive unit as a base point, i.e., the X-axis and Y-axis sliding parts, in accordance with detected positional information from a position detecting sensor. Then, a stage shift amount is calculated in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage. Here, the stage shift amount corresponds to a positional deviation of the stage at the imaging position caused by an attitude variation of the stage in a yawing direction, and thus is an error in repeated positioning. Accordingly, a tomographic image with high resolution can be generated in consideration of the error in repeated positioning.

公开(公告)号：US10707066B2

公开(公告)日：2020-07-07

申请号：US15780932

申请日：2015-12-02

Applicant: SHIMADZU CORPORATION

Inventor： Shinji Miyauchi ,  Hiroko Ueda ,  Yoshihiro Ueno

IPC: H01J49/00 ,  H01J49/42 ,  H01J49/06 ,  H01J49/40

Abstract: Four main rod electrodes included in a main electrode section are disposed in a rotationally symmetric manner around an ion optical axis. Among four pre-rod electrodes included in a pre-electrode section disposed in front of the main electrode section, two are in contact with a circle of a radius r0, whereas the other two are disposed to be in contact with a circle of a radius R0 larger than r0, resulting in rotational asymmetry around the ion optical axis. Accordingly, a shape of acceptance on an x-y plane regarding positions of ions in the pre-electrode section becomes elliptical. This allows the shape of the acceptance to become gradually flat as the ions travel along the ion optical axis, reducing a mismatch between emittance of incoming ions and the acceptance on a receiving side, and relieving ion loss during ion introduction.

公开(公告)号：US12154778B2

公开(公告)日：2024-11-26

申请号：US17632293

申请日：2020-08-11

Applicant: SHIMADZU CORPORATION

Inventor： Yoshihiro Ueno ,  Ryugo Maeda ,  Yusuke Tateishi ,  Hiroyuki Miura

IPC: H01J49/40 ,  H01J49/06 ,  H01J49/42

Abstract: An MT-TOFMS which is one mode of the present invention includes: a linear ion trap (2) configured to temporarily hold ions to be analyzed, and to eject the ions through an ion ejection opening (211) having a shape elongated in one direction; a loop flight section (3) configured to form a loop path (P) capable of making ions repeatedly fly; and a slit part (5) located on an ion path in which the ions ejected from the linear ion trap (2) travel until the ions are introduced into the loop path, the slit part configured to block a portion of the ions in a longitudinal direction of the ion ejection opening (211).

公开(公告)号：US11581172B2

公开(公告)日：2023-02-14

申请号：US17474617

申请日：2021-09-14

Applicant: SHIMADZU CORPORATION

Inventor： Yoshihiro Ueno

IPC: H01J49/00 ,  H01J49/16 ,  G01N33/00 ,  G01N27/64

Abstract: In order to suppress a charge-up in an ion source configured to ionize a component contained in a sample gas, a mass spectrometer according to the present invention is provided with an ion source (3) including: an ionization chamber (30) having an ion ejection opening (301) and internally having a space substantially separated from an outside area; a repeller electrode (31), located within the ionization chamber, for creating an expelling electric field which acts on an ion generated within the ionization chamber to expel the ion through the ion ejection opening to the outside area; and a voltage generator (7) configured to selectively apply, to the repeller electrode, a first voltage for creating the expelling electric field and a second voltage for creating a charge-up-removing electric field, where the second voltage is a positive voltage having a larger absolute value than the first voltage.