公开(公告)号：US20130078807A1

公开(公告)日：2013-03-28

申请号：US13680668

申请日：2012-11-19

Applicant: SK HYNIX INC.

Inventor： Chang Jun PARK ,  Kwon Whan HAN ,  Seong Cheol KIM ,  Sung Min KIM ,  Hyeong Seok CHOI ,  Ha Na LEE ,  Tac Keun OH ,  Sang Joon LIM

IPC: H01L21/48

CPC classification number: H01L21/486 ,  H01L21/561 ,  H01L23/3114 ,  H01L23/367 ,  H01L23/552 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/94 ,  H01L24/96 ,  H01L24/97 ,  H01L2224/02379 ,  H01L2224/0401 ,  H01L2224/12105 ,  H01L2224/16 ,  H01L2224/94 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01059 ,  H01L2924/01078 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/3025 ,  H01L2224/11 ,  H01L2224/03 ,  H01L2924/00

Abstract: A wafer level chip scale package having an enhanced heat exchange efficiency with an EMF shield is presented. The wafer level chip scale package includes a semiconductor chip, an insulation layer, and a metal plate. The semiconductor chip has a plurality of bonding pads on an upper face thereof. The insulation layer is disposed over the upper face of the semiconductor chip and has openings that expose some portions of the bonding pads. The metal plate covers an upper face of the insulation layer and side faces of the semiconductor chip in which the metal plate is electrically insulated from the bonding pads.