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公开(公告)号:US20210249474A1
公开(公告)日:2021-08-12
申请号:US16973272
申请日:2019-06-11
Applicant: SONY CORPORATION , SONY SEMICONDUCTOR SOLUTIONS CORPORATION
Inventor: Hideaki TOGASHI , Iwao YAGI , Masahiro JOEI , Fumihiko KOGA , Kenichi MURATA , Shintarou HIRATA , Yosuke SAITO , Akira FURUKAWA
IPC: H01L27/30
Abstract: There is provided a solid-state image sensor, a solid-state imaging device, an electronic apparatus, and a method of manufacturing a solid-state image sensor capable of improving characteristics. There is provided a solid-state image sensor including a stacked structure that includes a semiconductor substrate, a first photoelectric converter provided above the semiconductor substrate and converting light into charges, and a second photoelectric converter provided above the first photoelectric converter and converting light into charges, where the first photoelectric converter and the second photoelectric converter include a photoelectric conversion stacked structure in which a common electrode, a photoelectric conversion film, and a readout electrode are stacked so that the first photoelectric converter and the second photoelectric converter are in a line-symmetrical relationship with each other with a vertical plane perpendicular to a stacking direction of the stacked structure as an axis of symmetry.
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公开(公告)号:US20210082993A1
公开(公告)日:2021-03-18
申请号:US17108910
申请日:2020-12-01
Applicant: SONY CORPORATION
Inventor: Keisuke HATANO , Hideaki TOGASHI
IPC: H01L27/148 , H01L27/146 , H04N5/374 , H04N5/378
Abstract: The present disclosure relates to a solid-state image pickup device, a manufacturing method, and an electronic apparatus, which can obtain high charge transfer efficiency from a photoelectric conversion unit to a floating diffusion layer. The floating diffusion layer is arranged in a rectangular shape so as to surround a gate electrode of a vertical transistor whose groove portion is rectangular. A reset drain is formed so as to be adjacent to the floating diffusion layer through a reset gate. A potential of the floating diffusion layer is reset to the same potential as that of the reset drain by applying a predetermined voltage to the reset gate. It is possible to apply the present disclosure to, for example, a CMOS solid-state image pickup device used in an image pickup device such as a camera.
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公开(公告)号:US20210313381A1
公开(公告)日:2021-10-07
申请号:US17261221
申请日:2019-07-25
Applicant: SONY CORPORATION , SONY SEMICONDUCTOR SOLUTIONS CORPORATION
Inventor: Kenichi MURATA , Masahiro JOEI , Fumihiko KOGA , Iwao YAGI , Shintarou HIRATA , Hideaki TOGASHI , Yosuke SAITO , Shingo TAKAHASHI
IPC: H01L27/146 , H04N5/374
Abstract: Provided is a solid-state image capturing element including a semiconductor substrate and first and second photoelectric conversion parts configured to convert light into electric charge. The first and the second photoelectric conversion parts each have a laminated structure including an upper electrode, a lower electrode, a photoelectric conversion film sandwiched between the upper electrode and the lower electrode, and an accumulation electrode facing the upper electrode through the photoelectric conversion film and an insulating film. The lower electrode of each of the first and the second photoelectric conversion parts is electrically connected with a common electric charge accumulation part through a common penetration electrode provided in common to the first and the second photoelectric conversion parts and penetrating through the semiconductor substrate, the common electric charge accumulation part being provided in common to the first and the second photoelectric conversion parts in the semiconductor substrate.
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公开(公告)号:US20210233948A1
公开(公告)日:2021-07-29
申请号:US17053216
申请日:2019-04-19
Applicant: SONY CORPORATION
Inventor: Masahiro JOEI , Kenichi MURATA , Fumihiko KOGA , Iwao YAGI , Shintarou HIRATA , Hideaki TOGASHI , Yosuke SAITO
IPC: H01L27/146 , H01L27/30 , H01L29/41 , H04N5/3745
Abstract: A solid-state imaging element with pixel transistors and wires capable of efficiently outputting and transferring a pixel signal from a stacked photoelectric conversion film while suppressing an increase in manufacturing cost, and a manufacturing method thereof are provided. There is provided a solid-state imaging element which includes a semiconductor substrate; a first photoelectric conversion unit provided on the semiconductor substrate; and a control unit provided stacked with the first photoelectric conversion unit and including a plurality of pixel transistors, in which the first photoelectric conversion unit includes a second electrode, a first photoelectric conversion film provided above the second electrode and converting light into charges, and a first electrode provided on the first photoelectric conversion film, the plurality of pixel transistors include an amplification transistor that amplifies and outputs the charges as a pixel signal, and a channel formation region of the amplification transistor made of an oxide semiconductor layer.
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5.
公开(公告)号:US20180175102A1
公开(公告)日:2018-06-21
申请号:US15553653
申请日:2017-02-28
Applicant: SONY CORPORATION
Inventor: Hideaki TOGASHI , Fumihiko KOGA , Tetsuji YAMAGUCHI , Shintarou HIRATA , Taiichiro WATANABE , Yoshihiro ANDO , Toyotaka KATAOKA , Satoshi KEINO , Yukio KANEDA
IPC: H01L27/148 , H01L27/146 , H04N5/378
Abstract: An imaging device is provided. The imaging device may include a substrate having a first photoelectric conversion unit and a second photoelectric conversion unit at a light-incident side of the substrate. The second photoelectric conversion unit may include a photoelectric conversion layer, a first electrode, a second electrode above the photoelectric conversion layer, a third electrode, and an insulating material between the third electrode and the photoelectric conversion layer, wherein a portion of the insulating material is between the first electrode and the third electrode.
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公开(公告)号:US20180006073A1
公开(公告)日:2018-01-04
申请号:US15619077
申请日:2017-06-09
Applicant: SONY CORPORATION
Inventor: Hideaki TOGASHI
IPC: H01L27/146 , H01L23/48 , H01L21/768
CPC classification number: H01L27/14636 , H01L21/7682 , H01L21/76898 , H01L23/481 , H01L27/1464 , H01L27/14643 , H01L27/14647 , H01L2924/0002 , H04N5/3745 , H04N5/378 , H04N5/379 , H01L2924/00
Abstract: There is provided a solid-state imaging device including: one or more photoelectric conversion elements provided on side of a first surface of a semiconductor substrate; a through electrode coupled to the one or more photoelectric conversion elements, and provided between the first surface and a second surface of the semiconductor substrate; and an amplifier transistor and a floating diffusion provided on the second surface of the semiconductor substrate, in which the one or more photoelectric conversion elements are coupled to a gate of the amplifier transistor and the floating diffusion via the through electrode.
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公开(公告)号:US20170162624A1
公开(公告)日:2017-06-08
申请号:US15323818
申请日:2015-06-26
Applicant: SONY CORPORATION
Inventor: Keisuke HATANO , Hideaki TOGASHI
IPC: H01L27/148 , H04N5/374 , H04N5/378
CPC classification number: H01L27/14806 , H01L27/14603 , H01L27/14614 , H01L27/14616 , H01L27/14638 , H01L27/14641 , H01L27/14689 , H04N5/374 , H04N5/378
Abstract: The present disclosure relates to a solid-state image pickup device, a manufacturing method, and an electronic apparatus, which can obtain high charge transfer efficiency from a photoelectric conversion unit to a floating diffusion layer. The floating diffusion layer is arranged in a rectangular shape so as to surround a gate electrode of a vertical transistor whose groove portion is rectangular. A reset drain is formed so as to be adjacent to the floating diffusion layer through a reset gate. A potential of the floating diffusion layer is reset to the same potential as that of the reset drain by applying a predetermined voltage to the reset gate. It is possible to apply the present disclosure to, for example, a CMOS solid-state image pickup device used in an image pickup device such as a camera.
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公开(公告)号:US20160204156A1
公开(公告)日:2016-07-14
申请号:US14911538
申请日:2014-08-07
Applicant: SONY CORPORATION
Inventor: Hideaki TOGASHI
IPC: H01L27/146
CPC classification number: H01L27/14636 , H01L21/7682 , H01L21/76898 , H01L23/481 , H01L27/1464 , H01L27/14643 , H01L27/14647 , H01L2924/0002 , H04N5/3745 , H04N5/378 , H01L2924/00
Abstract: There is provided a solid-state imaging device including: one or more photoelectric conversion elements provided on side of a first surface of a semiconductor substrate; a through electrode coupled to the one or more photoelectric conversion elements, and provided between the first surface and a second surface of the semiconductor substrate; and an amplifier transistor and a floating diffusion provided on the second surface of the semiconductor substrate, in which the one or more photoelectric conversion elements are coupled to a gate of the amplifier transistor and the floating diffusion via the through electrode.
Abstract translation: 提供了一种固态成像装置,包括:设置在半导体基板的第一表面侧的一个或多个光电转换元件; 连接到所述一个或多个光电转换元件并且设置在所述半导体衬底的所述第一表面和第二表面之间的通孔; 以及设置在所述半导体衬底的第二表面上的放大器晶体管和浮动扩散器,其中所述一个或多个光电转换元件经由所述通孔电极耦合到所述放大器晶体管的栅极和所述浮动扩散。
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公开(公告)号:US20190273113A1
公开(公告)日:2019-09-05
申请号:US16415402
申请日:2019-05-17
Applicant: SONY CORPORATION
Inventor: Keisuke HATANO , Hideaki TOGASHI
IPC: H01L27/148 , H01L27/146 , H04N5/374 , H04N5/378
Abstract: The present disclosure relates to a solid-state image pickup device, a manufacturing method, and an electronic apparatus, which can obtain high charge transfer efficiency from a photoelectric conversion unit to a floating diffusion layer.The floating diffusion layer is arranged in a rectangular shape so as to surround a gate electrode of a vertical transistor whose groove portion is rectangular. A reset drain is formed so as to be adjacent to the floating diffusion layer through a reset gate. A potential of the floating diffusion layer is reset to the same potential as that of the reset drain by applying a predetermined voltage to the reset gate. It is possible to apply the present disclosure to, for example, a CMOS solid-state image pickup device used in an image pickup device such as a camera.
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10.
公开(公告)号:US20190057997A1
公开(公告)日:2019-02-21
申请号:US16074669
申请日:2016-11-02
Applicant: SONY CORPORATION
Inventor: Hideaki TOGASHI , Kosuke NAKANISHI
IPC: H01L27/146 , H01L29/08 , H01L29/423
Abstract: A semiconductor device of the present disclosure includes: a semiconductor element disposed on a first surface side of a semiconductor substrate; a through-electrode that is provided through the semiconductor substrate in a thickness direction of the semiconductor substrate and introduces charge obtained in the semiconductor element to a second surface side of the semiconductor substrate; and an amplifier transistor that outputs an electrical signal based on the charge introduced by the through-electrode, the amplifier transistor using the through-electrode as a gate electrode and including a source region and a drain region around the through-electrode.
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