公开(公告)号：US20220252397A1

公开(公告)日：2022-08-11

申请号：US17728635

申请日：2022-04-25

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca GUERINONI ,  Luca Giuseppe FALORNI ,  Matteo Fabio BRUNETTO

IPC: G01C19/5712 ,  B81B3/00 ,  G01C19/5755 ,  G01C19/574

Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

公开(公告)号：US20230358540A1

公开(公告)日：2023-11-09

申请号：US18353692

申请日：2023-07-17

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca GUERINONI ,  Luca Giuseppe FALORNI

IPC: G01C19/5712 ,  G01C25/00

CPC classification number: G01C19/5712 ,  G01C25/005

Abstract: A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.

公开(公告)号：US20230322548A1

公开(公告)日：2023-10-12

申请号：US18185189

申请日：2023-03-16

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca Giuseppe FALORNI ,  Paola CARULLI ,  Patrick FEDELI ,  Luca GUERINONI

IPC: B81B7/02

CPC classification number: B81B7/02 ,  B81B2201/0228 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/0307 ,  B81B2203/04

Abstract: A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.

公开(公告)号：US20240142235A1

公开(公告)日：2024-05-02

申请号：US18490392

申请日：2023-10-19

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Paola CARULLI ,  Luca Giuseppe FALORNI ,  Patrick FEDELI ,  Luca GUERINONI

IPC: G01C19/5762

CPC classification number: G01C19/5762

Abstract: A microelectromechanical gyroscope with detection along a vertical axis is provided with a detection structure having a movable structure, suspended above a substrate so as to perform, as a function of an angular velocity around the vertical axis a sense movement along a first horizontal axis. The movable structure has at least one drive mass internally defining a window, elastically coupled to a rotor anchor, at an anchoring region, through elastic anchoring elements; at least one bridge element, rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes, carried integrally by the bridge element with extension along a second horizontal axis. The detection structure also has stator electrodes, arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element, which extends longitudinally above the same stator electrodes and the movable electrodes.

公开(公告)号：US20230280189A1

公开(公告)日：2023-09-07

申请号：US18314650

申请日：2023-05-09

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca GUERINONI ,  Gabriele GATTERE

IPC: G01C25/00 ,  G01C19/72

CPC classification number: G01C25/005 ,  G01C19/726

Abstract: A gyroscopic sensor unit detects a phase drift between a demodulated output signal and demodulation signal during output of a quadrature test signal. A delay calculator detects the phase drift based on changes in the demodulated output signal during application of the quadrature test signal. A delay compensation circuit compensates for the phase drift by delaying the demodulation signal by the phase drift value.

公开(公告)号：US20230036566A1

公开(公告)日：2023-02-02

申请号：US17868479

申请日：2022-07-19

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Daniele PRATI ,  Luca Giuseppe FALORNI ,  Luca GUERINONI

IPC: G01C19/5712

Abstract: The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.

公开(公告)号：US20220380202A1

公开(公告)日：2022-12-01

申请号：US17744310

申请日：2022-05-13

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca GUERINONI ,  Patrick FEDELI ,  Luca Giuseppe FALORNI

IPC: B81B7/02 ,  B81B3/00

Abstract: A microelectromechanical device includes a substrate, a first structural layer, and a second structural layer of semiconductor material. A sensing mass extends in the first structural layer and is coupled to the substrate by first elastic connections to enable oscillation of the sensing mass in a sensing direction perpendicular to the substrate by a maximum amount relative to a resting position of the sensing mass. An out-of-plane stopper structure includes an anchorage fixed to the substrate and a mechanical end-of-travel structure, which extends in the second structural layer, faces the sensing mass, and is separated therefrom by a gap having a width smaller than the maximum displacement distance of the sensing mass. The mechanical end-of-travel structure is coupled to the anchorage by second elastic connections that enable movement of the mechanical end-of-travel structure in the sensing direction in response to an impact of the sensing mass.

公开(公告)号：US20230168488A1

公开(公告)日：2023-06-01

申请号：US18058152

申请日：2022-11-22

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Federico VERCESI ,  Fabrizio CERINI ,  Luca GUERINONI ,  Nicolo' BONI

IPC: G02B26/04

CPC classification number: G02B26/04

Abstract: A MEMS shutter including: a substrate of semiconductor material traversed by a main aperture, and a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures; a plurality of actuators; and a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first semiconductor layer and the second semiconductor layer, the shielding structures being arranged angularly around the underlying main aperture so as to provide shielding of the main aperture, each shielding structure being further coupled to the supporting structure via a corresponding deformable structure. Each actuator may be controlled so as to cause a rotation of a corresponding shielding structure between a respective first position and a respective second position, thus varying shielding of the main aperture. The first and second positions of the shielding structures are such that, in at least one operating condition of the MEMS shutter, pairs of adjacent shielding structures at least partially overlap one another.

公开(公告)号：US20230168415A1

公开(公告)日：2023-06-01

申请号：US18058147

申请日：2022-11-22

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Federico VERCESI ,  Nicolo' BONI ,  Fabrizio CERINI ,  Luca GUERINONI

IPC: G02B5/00 ,  H02N1/00 ,  H02N2/02

CPC classification number: G02B5/005 ,  H02N1/006 ,  H02N2/028

Abstract: A MEMS shutter including: a semiconductor substrate traversed by an aperture; a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers; a plurality of actuators; a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers, the shielding structures being arranged angularly around the underlying aperture so as to provide shielding of the aperture, each shielding structure being further coupled to the supporting structure via a deformable structure. Each actuator may be controlled so as to translate a corresponding shielding structure between a first position and a second position, thus varying shielding of the aperture; the first and second positions of the shielding structures are such that, in at least one operating condition, pairs of adjacent shielding structures at least partially overlap one another.

公开(公告)号：US20240175682A1

公开(公告)日：2024-05-30

申请号：US18515075

申请日：2023-11-20

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca GUERINONI ,  Patrick FEDELI ,  Luca Giuseppe FALORNI

IPC: G01C19/5712 ,  G01C25/00

CPC classification number: G01C19/5712 ,  G01C25/00

Abstract: A microelectromechanical device includes: a support body; at least one movable mass of semiconductor material, elastically constrained to the support body so as to be able to oscillate; fixed detection electrodes rigidly connected to the support body and capacitively coupled to the at least one movable mass; and at least one test structure of semiconductor material, rigidly connected to the support body and distinct from the fixed detection electrodes. The test structure is capacitively coupled to the at least one movable mass and is configured to apply electrostatic forces to the at least one movable mass in response to a voltage between the test structure and the at least one movable mass.