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公开(公告)号：US20180157030A1
公开(公告)日：2018-06-07
申请号：US15887557
申请日：2018-02-02
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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公开(公告)号：US09753279B2
公开(公告)日：2017-09-05
申请号：US14564237
申请日：2014-12-09
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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公开(公告)号：US09921405B2
公开(公告)日：2018-03-20
申请号：US15401681
申请日：2017-01-09
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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公开(公告)号：US20170123202A1
公开(公告)日：2017-05-04
申请号：US15401681
申请日：2017-01-09
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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5.发明申请公开(公告)号：US20150168715A1
公开(公告)日：2015-06-18
申请号：US14564237
申请日：2014-12-09
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
摘要翻译： 静电驱动的振荡结构包括第一定子子区域，第二定子子区域，第一转子子区域和第二转子子区域。 安装到第一和第二转子子区域上的扭转弹性元件限定了旋转轴线。 移动元件联接到扭转弹性元件。 定子子区域静电耦合到移动元件上的各个致动区域。 定子子区域呈现结构不对称的元件，使得第一定子子区域和第一致动区域之间的静电耦合表面与第二定子子区域和第二致动区域之间的静电耦合表面不同。
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公开(公告)号：US10746982B2
公开(公告)日：2020-08-18
申请号：US15887557
申请日：2018-02-02
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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7.发明授权Micromechanical detection structure for a MEMS acoustic transducer and corresponding manufacturing process 有权MEMS声学传感器的微机械检测结构及相应的制造工艺公开(公告)号：US09332354B2
公开(公告)日：2016-05-03
申请号：US14254511
申请日：2014-04-16
发明人： Sebastiano Conti , Marco Salina , Luca Lamagna , Matteo Perletti
CPC分类号： H04R23/00 , H04R19/005 , H04R19/04 , H04R31/00 , Y10T29/49005
摘要： A micromechanical structure for a MEMS capacitive acoustic transducer, has: a substrate made of semiconductor material, having a front surface lying in a horizontal plane; a membrane, coupled to the substrate and designed to undergo deformation in the presence of incident acoustic-pressure waves; a fixed electrode, which is rigid with respect to the acoustic-pressure waves and is coupled to the substrate by means of an anchorage structure, in a suspended position facing the membrane to form a detection capacitor. The anchorage structure has at least one pillar element, which is at least in part distinct from the fixed electrode and supports the fixed electrode in a position parallel to the horizontal plane.
摘要翻译： 一种用于MEMS电容式声换能器的微机械结构，具有：由半导体材料制成的基板，其前表面位于水平面; 膜，其耦合到基底并设计成在存在入射声压波的情况下经历变形; 固定电极，其相对于声压波是刚性的，并且通过锚定结构耦合到衬底，处于面向膜的悬挂位置以形成检测电容器。 锚固结构具有至少一个柱元件，其至少部分地不同于固定电极，并且将固定电极支撑在平行于水平面的位置。
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8.发明授权公开(公告)号：US12068362B2
公开(公告)日：2024-08-20
申请号：US17494475
申请日：2021-10-05
发明人： Fabrizio Cerini , Silvia Adorno , Dario Paci , Marco Salina
IPC分类号： H01L23/522 , H01L23/528 , H01L23/538 , H01L49/02
CPC分类号： H01L28/86 , H01L23/5223
摘要： An electrode structure includes a pad of conductive material, and a conductive strip having a first end physically and electrically coupled to the pad. The pad includes an annular element internally defining a through opening. The first end of the conductive strip is physically and electrically coupled to the annular element by a transition region so that, when the conductive strip undergoes expansion by the thermal effect, a stress spreads from the conductive strip to the annular element by the transition region.
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9.发明申请MICROFLUIDIC DEVICE WITH HYDROPHOBIC SURFACE MODIFICATION LAYER AND MANUFACTURING METHOD THEREOF 审中-公开具有疏水表面改性层的微流体装置及其制造方法公开(公告)号：US20150044110A1
公开(公告)日：2015-02-12
申请号：US14451805
申请日：2014-08-05
发明人： Lorenzo Colombo , Marco Salina , Daria Doria
CPC分类号： B01L3/5027 , B01J19/0093 , B01J2219/0084 , B01L3/5088 , B01L2200/12 , B01L2300/0819 , B01L2300/089 , B01L2300/0893 , B01L2300/12 , B01L2300/165 , B05D1/005 , B05D3/06 , B05D3/107 , B32B37/18 , B32B37/24 , B32B38/00 , B32B2037/243 , B32B2038/0076 , B32B2255/00 , B32B2307/728 , B32B2310/0806 , B81B2201/0214 , B81B2201/051 , B81C1/00206 , G03F7/20
摘要： A microfluidic device includes a support body having a first surface and a second surface opposite to one another. The first surface is hydrophilic. A surface modification layer extends over the first surface of the support body. At least one opening is formed to extend through the surface modification layer and expose a portion of the first surface. The surface modification layer is hydrophobic. In particular, the surface modification layer is made of a photodefinible material chosen from among: an epoxy resin, a polyamide, and a photocurable siloxane-based polymer. The openings are functionalized using probe molecules designed to bind with specific target molecules to be detected.
摘要翻译： 微流体装置包括具有第一表面和彼此相对的第二表面的支撑体。 第一个表面是亲水的。 表面改性层在支撑体的第一表面上延伸。 形成至少一个开口以延伸穿过表面改性层并暴露第一表面的一部分。 表面改性层是疏水性的。 特别地，表面改性层由选自以下的光可固化材料制成：环氧树脂，聚酰胺和光固化性硅氧烷基聚合物。 使用设计成与要检测的特异性靶分子结合的探针分子来使开口功能化。
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