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公开(公告)号：US20180065371A1
公开(公告)日：2018-03-08
申请号：US15812960
申请日：2017-11-14
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
CPC classification number: B41J2/1626 , B41J2/01 , B41J2/135 , B41J2/16 , B41J2/1607 , B41J2/161 , B41J2/162 , B41J2/1621 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
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公开(公告)号：US10245834B2
公开(公告)日：2019-04-02
申请号：US15812960
申请日：2017-11-14
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
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Patent Agency Ranking
公开(公告)号：US20170151784A1
公开(公告)日：2017-06-01
申请号：US15191154
申请日：2016-06-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Lorenzo Colombo , Carlo Luigi Prelini , Mauro Cattaneo
CPC classification number: B41J2/14201 , B41J2/14233 , B41J2/1607 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2002/14241 , B41J2002/14411 , B41J2202/12
Abstract: A fluid ejection device, comprising: a first semiconductor body including an actuator, which is operatively coupled to a chamber for containing the fluid and is configured to cause ejection of the fluid; and a channel for inlet of the fluid, which extends in a first direction and has a section having a first dimension; and a second semiconductor body, which is coupled to the first semiconductor body and has an ejection nozzle configured to expel the fluid. The second semiconductor body further comprises a first restriction channel, which is fluidically coupled to the inlet channel, extends in a second direction orthogonal to the first direction and has a respective section with a second dimension smaller than the first dimension so as to form a restriction between the inlet channel and the chamber.
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公开(公告)号：US09849674B2
公开(公告)日：2017-12-26
申请号：US15179096
申请日：2016-06-10
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
CPC classification number: B41J2/1626 , B41J2/01 , B41J2/135 , B41J2/16 , B41J2/1607 , B41J2/161 , B41J2/162 , B41J2/1621 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
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公开(公告)号：US09744765B2
公开(公告)日：2017-08-29
申请号：US15191154
申请日：2016-06-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Lorenzo Colombo , Carlo Luigi Prelini , Mauro Cattaneo
CPC classification number: B41J2/14201 , B41J2/14233 , B41J2/1607 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2002/14241 , B41J2002/14411 , B41J2202/12
Abstract: A fluid ejection device, comprising: a first semiconductor body including an actuator, which is operatively coupled to a chamber for containing the fluid and is configured to cause ejection of the fluid; and a channel for inlet of the fluid, which extends in a first direction and has a section having a first dimension; and a second semiconductor body, which is coupled to the first semiconductor body and has an ejection nozzle configured to expel the fluid. The second semiconductor body further comprises a first restriction channel, which is fluidically coupled to the inlet channel, extends in a second direction orthogonal to the first direction and has a respective section with a second dimension smaller than the first dimension so as to form a restriction between the inlet channel and the chamber.
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公开(公告)号：US20170182778A1
公开(公告)日：2017-06-29
申请号：US15179096
申请日：2016-06-10
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
IPC: B41J2/16
CPC classification number: B41J2/1626 , B41J2/01 , B41J2/135 , B41J2/16 , B41J2/1607 , B41J2/161 , B41J2/162 , B41J2/1621 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
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7.发明申请MICROFLUIDIC DEVICE WITH HYDROPHOBIC SURFACE MODIFICATION LAYER AND MANUFACTURING METHOD THEREOF 审中-公开具有疏水表面改性层的微流体装置及其制造方法公开(公告)号：US20150044110A1
公开(公告)日：2015-02-12
申请号：US14451805
申请日：2014-08-05
Applicant: STMicroelectronics S.r.l.
Inventor： Lorenzo Colombo , Marco Salina , Daria Doria
CPC classification number: B01L3/5027 , B01J19/0093 , B01J2219/0084 , B01L3/5088 , B01L2200/12 , B01L2300/0819 , B01L2300/089 , B01L2300/0893 , B01L2300/12 , B01L2300/165 , B05D1/005 , B05D3/06 , B05D3/107 , B32B37/18 , B32B37/24 , B32B38/00 , B32B2037/243 , B32B2038/0076 , B32B2255/00 , B32B2307/728 , B32B2310/0806 , B81B2201/0214 , B81B2201/051 , B81C1/00206 , G03F7/20
Abstract: A microfluidic device includes a support body having a first surface and a second surface opposite to one another. The first surface is hydrophilic. A surface modification layer extends over the first surface of the support body. At least one opening is formed to extend through the surface modification layer and expose a portion of the first surface. The surface modification layer is hydrophobic. In particular, the surface modification layer is made of a photodefinible material chosen from among: an epoxy resin, a polyamide, and a photocurable siloxane-based polymer. The openings are functionalized using probe molecules designed to bind with specific target molecules to be detected.
Abstract translation: 微流体装置包括具有第一表面和彼此相对的第二表面的支撑体。 第一个表面是亲水的。 表面改性层在支撑体的第一表面上延伸。 形成至少一个开口以延伸穿过表面改性层并暴露第一表面的一部分。 表面改性层是疏水性的。 特别地，表面改性层由选自以下的光可固化材料制成：环氧树脂，聚酰胺和光固化性硅氧烷基聚合物。 使用设计成与要检测的特异性靶分子结合的探针分子来使开口功能化。
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