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公开(公告)号:US10569317B2
公开(公告)日:2020-02-25
申请号:US15753241
申请日:2016-10-14
摘要: A single-crystal diamond includes a pair of main surfaces facing each other, an impurity concentration being changed along a first direction in each of the main surfaces.
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公开(公告)号:USD977540S1
公开(公告)日:2023-02-07
申请号:US29796251
申请日:2021-06-23
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3.
公开(公告)号:US20190031515A1
公开(公告)日:2019-01-31
申请号:US16071564
申请日:2017-01-18
发明人: Takuya Nohara , Natsuo Tatsumi , Yoshiki Nishibayashi , Hitoshi Sumiya , Yutaka Kobayashi , Akihiko Ueda
IPC分类号: C01B32/26 , C30B29/04 , C30B25/08 , C30B25/20 , C23C16/01 , C23C16/27 , C30B25/18 , C23C16/458
摘要: Provided is a method for manufacturing a single-crystal diamond, the method including the steps of: forming a protective film on at least a part of a surface of an auxiliary plate; preparing a diamond seed crystal substrate; disposing an auxiliary plate with a protective film that has the protective film formed on the auxiliary plate, and a diamond seed crystal substrate in a chamber; and growing a single-crystal diamond on a principal surface of the diamond seed crystal substrate by a chemical vapor deposition method while introducing a carbon-containing gas into the chamber.
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4.
公开(公告)号:US20180236515A1
公开(公告)日:2018-08-23
申请号:US15753241
申请日:2016-10-14
摘要: A single-crystal diamond includes a pair of main surfaces facing each other, an impurity concentration being changed along a first direction in each of the main surfaces.
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公开(公告)号:US10737943B2
公开(公告)日:2020-08-11
申请号:US16071564
申请日:2017-01-18
发明人: Takuya Nohara , Natsuo Tatsumi , Yoshiki Nishibayashi , Hitoshi Sumiya , Yutaka Kobayashi , Akihiko Ueda
IPC分类号: C01B32/26 , C23C16/01 , C30B25/08 , C30B25/20 , C30B29/04 , H01L21/205 , A44C27/00 , C30B25/12 , C23C16/02 , C23C16/27 , C23C16/458 , C30B25/18
摘要: Provided is a method for manufacturing a single-crystal diamond, the method including the steps of: forming a protective film on at least a part of a surface of an auxiliary plate; preparing a diamond seed crystal substrate; disposing an auxiliary plate with a protective film that has the protective film formed on the auxiliary plate, and a diamond seed crystal substrate in a chamber; and growing a single-crystal diamond on a principal surface of the diamond seed crystal substrate by a chemical vapor deposition method while introducing a carbon-containing gas into the chamber.
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