公开(公告)号：US20130176548A1

公开(公告)日：2013-07-11

申请号：US13784402

申请日：2013-03-04

申请人： Salam Harb ,  Kent Douglas ,  Marek Zywno ,  James Haslim ,  Jon Hamilton

发明人： Salam Harb ,  Kent Douglas ,  Marek Zywno ,  James Haslim ,  Jon Hamilton

IPC分类号： G03F7/20

CPC分类号： G03F7/70758 ,  H01L21/68 ,  H01L21/6831 ,  Y10T74/20006 ,  Y10T279/21 ,  Y10T279/23 ,  Y10T279/27

摘要： Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

摘要翻译： 公开了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿，并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者，基板支撑装置可以包括Z平台板，平台反射镜，附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘，其具有基板卡盘的六个自由度的限制。 当Z平台板在与Z方向垂直的平面中扫描时，执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部部分和从基部沿横向方向延伸的悬臂部分的力弯曲。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。

公开(公告)号：US08390789B2

公开(公告)日：2013-03-05

申请号：US12849718

申请日：2010-08-03

申请人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

发明人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

IPC分类号： G03B27/58

CPC分类号： G03F7/70758 ,  H01L21/68 ,  H01L21/6831 ,  Y10T74/20006 ,  Y10T279/21 ,  Y10T279/23 ,  Y10T279/27

摘要： Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

摘要翻译： 公开了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿，并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者，基板支撑装置可以包括Z平台板，平台反射镜，附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘，其具有基板卡盘的六个自由度的约束。 当Z平台板在与Z方向垂直的平面中扫描时，执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部的力弯曲和从基部沿横向方向延伸的悬臂部。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。

公开(公告)号：US20100295258A1

公开(公告)日：2010-11-25

申请号：US12849718

申请日：2010-08-03

申请人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

发明人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

IPC分类号： B23Q3/15 ,  B23B31/24

CPC分类号： G03F7/70758 ,  H01L21/68 ,  H01L21/6831 ,  Y10T74/20006 ,  Y10T279/21 ,  Y10T279/23 ,  Y10T279/27

摘要： Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

摘要翻译： 公开了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿，并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者，基板支撑装置可以包括Z平台板，平台反射镜，附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘，其具有基板卡盘的六个自由度的约束。 当Z平台板在与Z方向垂直的平面中扫描时，执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部部分和从基部沿横向方向延伸的悬臂部分的力弯曲。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。

公开(公告)号：US07800735B2

公开(公告)日：2010-09-21

申请号：US11420985

申请日：2006-05-30

申请人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

发明人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

IPC分类号： G03B27/58

CPC分类号： G03F7/70758 ,  H01L21/68 ,  H01L21/6831 ,  Y10T74/20006 ,  Y10T279/21 ,  Y10T279/23 ,  Y10T279/27

摘要： Substrate support apparatus and methods are described. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

摘要翻译： 描述了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿，并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者，基板支撑装置可以包括Z平台板，平台反射镜，附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘，其具有基板卡盘的六个自由度的约束。 当Z平台板在与Z方向垂直的平面中扫描时，执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部部分和从基部沿横向方向延伸的悬臂部分的力弯曲。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。

公开(公告)号：US20070247778A1

公开(公告)日：2007-10-25

申请号：US11420985

申请日：2006-05-30

申请人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

发明人： Salam Harb ,  Kent Douglas ,  Marek Zwyno ,  James Haslim ,  Jon Hamilton

IPC分类号： G03B27/58 ,  H01T23/00

CPC分类号： G03F7/70758 ,  H01L21/68 ,  H01L21/6831 ,  Y10T74/20006 ,  Y10T279/21 ,  Y10T279/23 ,  Y10T279/27

摘要： Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

摘要翻译： 公开了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿，并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者，基板支撑装置可以包括Z平台板，平台反射镜，附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘，其具有基板卡盘的六个自由度的约束。 当Z平台板在与Z方向垂直的平面中扫描时，执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部部分和从基部沿横向方向延伸的悬臂部分的力弯曲。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。

公开(公告)号：US20110142382A1

公开(公告)日：2011-06-16

申请号：US13034770

申请日：2011-02-25

申请人： Mohammed Tahmassebpur ,  Salam Harb ,  Liqun Han ,  Marian Mankos

发明人： Mohammed Tahmassebpur ,  Salam Harb ,  Liqun Han ,  Marian Mankos

IPC分类号： F16C29/00 ,  B23K31/02 ,  B32B15/00

CPC分类号： C22C19/051 ,  B32B15/01 ,  C22C19/00 ,  Y10T428/12625 ,  Y10T428/12931 ,  Y10T428/12937 ,  Y10T428/12944 ,  Y10T428/12951 ,  Y10T428/24025 ,  Y10T428/30

摘要： A method of forming a gate valve for use in a high vacuum environment of an electron gun by machining a core of non-magnetic nickel-chromium-molybdenum-iron-tungsten-silicon-carbon alloy that is weldable with nickel alloys and has a tensile strength of about 750 megapascals, machining a cladding of nickel-iron, welding the core to the cladding to form the gate valve, and machining the gate valve so as to remove any dimensional differences at an interface between the core and the cladding. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic alloy, good vacuum performance, and tight mechanical tolerance control. Also, because the alloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.

摘要翻译： 一种形成用于电子枪的高真空环境中的闸阀的方法，该方法是通过加工可与镍合金焊接的非磁性镍铬钼铁 - 钨 - 硅 - 碳合金芯，并且具有拉伸强度 强度为约750兆帕，加工镍铁包层，将芯焊接到包层以形成闸阀，并加工闸阀，以消除芯和包层之间的界面处的任何尺寸差异。 以这种方式，由于通过加工而不是部件组装来控制最终机械公差，因此获得极高的对准精度。 最后一部分提供了由镍合金壳提供的场屏蔽，由非磁性合金提供的低杂散场，良好的真空性能和严格的机械公差控制。 此外，由于与不锈钢和钛相比，该合金具有低氧化速度的优点，所以由于诸如电子束轰击的条件，存在较少的污染物积聚。

公开(公告)号：US08092927B2

公开(公告)日：2012-01-10

申请号：US13034770

申请日：2011-02-25

申请人： Mohammed Tahmassebpur ,  Salam Harb ,  Liqun Han ,  Marian Mankos

发明人： Mohammed Tahmassebpur ,  Salam Harb ,  Liqun Han ,  Marian Mankos

IPC分类号： B32B15/04 ,  B32B15/18 ,  F16C29/00 ,  F16C29/02

CPC分类号： C22C19/051 ,  B32B15/01 ,  C22C19/00 ,  Y10T428/12625 ,  Y10T428/12931 ,  Y10T428/12937 ,  Y10T428/12944 ,  Y10T428/12951 ,  Y10T428/24025 ,  Y10T428/30

摘要： A method of forming a gate valve for use in a high vacuum environment of an electron gun by machining a core of non-magnetic nickel-chromium-molybdenum-iron-tungsten-silicon-carbon alloy that is weldable with nickel alloys and has a tensile strength of about 750 megapascals, machining a cladding of nickel-iron, welding the core to the cladding to form the gate valve, and machining the gate valve so as to remove any dimensional differences at an interface between the core and the cladding. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic alloy, good vacuum performance, and tight mechanical tolerance control. Also, because the alloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.

摘要翻译： 一种形成用于电子枪的高真空环境中的闸阀的方法，该方法是通过加工可与镍合金焊接的非磁性镍铬钼铁 - 钨 - 硅 - 碳合金芯，并且具有拉伸强度 强度为约750兆帕，加工镍铁包层，将芯焊接到包层以形成闸阀，并加工闸阀，以消除芯和包层之间的界面处的任何尺寸差异。 以这种方式，由于通过加工而不是部件组装来控制最终机械公差，因此获得极高的对准精度。 最后一部分提供了由镍合金壳提供的场屏蔽，由非磁性合金提供的低杂散场，良好的真空性能和严格的机械公差控制。 此外，由于与不锈钢和钛相比，该合金具有低氧化速度的优点，所以由于诸如电子束轰击的条件，存在较少的污染物积聚。

公开(公告)号：US07919193B1

公开(公告)日：2011-04-05

申请号：US11877713

申请日：2007-10-24

申请人： Mohammed Tahmassebpur ,  Salam Harb ,  Liqun Han ,  Marian Mankos

发明人： Mohammed Tahmassebpur ,  Salam Harb ,  Liqun Han ,  Marian Mankos

IPC分类号： B32B15/04 ,  B32B15/18

CPC分类号： C22C19/051 ,  B32B15/01 ,  C22C19/00 ,  Y10T428/12625 ,  Y10T428/12931 ,  Y10T428/12937 ,  Y10T428/12944 ,  Y10T428/12951 ,  Y10T428/24025 ,  Y10T428/30

摘要： A component for use in a high vacuum environment, the component including a core of non-magnetic Hastelloy with a cladding of nickel-iron covering the core at least in part. The component can be, for example, at least one of a gate valve for use in a high vacuum environment of an electron gun, a bearing, a slide way, a gate valve bearing, a rotary slide, a linear slide, an electron beam column, and electron beam chamber, and a vacuum chamber. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic Hastelloy, good vacuum performance, and tight mechanical tolerance control. Also, because Hastelloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.

摘要翻译： 一种用于高真空环境的部件，该部件包括非磁性哈氏合金的核心，其中镍铁包层至少部分地覆盖芯部。 该部件可以是例如用于电子枪的高真空环境中的闸阀中的至少一个，轴承，滑动方式，闸阀轴承，旋转滑块，线性滑块，电子束 柱和电子束室，以及真空室。 以这种方式，由于通过加工而不是部件组装来控制最终机械公差，因此获得极高的对准精度。 最后部分提供了由镍合金壳提供的场屏蔽，由非磁性哈氏合金提供的低杂散场，良好的真空性能和严格的机械公差控制。 此外，由于与不锈钢和钛相比，哈氏合金具有低氧化速度的优点，因为诸如电子束轰击的条件，污染物积聚较少。

公开(公告)号：US07566873B1

公开(公告)日：2009-07-28

申请号：US11638805

申请日：2006-12-14

申请人： David Walker ,  Salam Harb ,  Vassil Spasov ,  David Stites ,  Izzy Lewis ,  Marian Mankos

发明人： David Walker ,  Salam Harb ,  Vassil Spasov ,  David Stites ,  Izzy Lewis ,  Marian Mankos

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G02B21/0016 ,  H01J2237/2443 ,  H01J2237/24592

摘要： One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a beam separator interconnecting those subsystems. The apparatus further includes a detection system which includes a scintillating screen, a detector array, and an optical coupling apparatus positioned therebetween. The optical coupling apparatus includes both refractive and reflective elements. Other embodiments and features are also disclosed.

摘要翻译： 一个实施例涉及一种使用带电粒子检查基板的装置。 该装置包括照明子系统，客观子系统，投影子系统和互连这些子系统的分束分离器。 该装置还包括检测系统，其包括闪烁屏，检测器阵列和位于它们之间的光耦合装置。 光耦合装置包括折射和反射元件。 还公开了其它实施例和特征。

公开(公告)号：US08169768B1

公开(公告)日：2012-05-01

申请号：US12470169

申请日：2009-05-21

申请人： Mohammed Tahmassebpur ,  Salam Harb

发明人： Mohammed Tahmassebpur ,  Salam Harb

IPC分类号： H01T23/00

CPC分类号： H01L21/6833

摘要： An electrostatic chuck for retaining a substrate. The chuck has a clamping surface for receiving the substrate, where the clamping surface is formed of a hard polymeric material filled with carbon nanotubes. Electrodes are disposed beneath the clamping surface, for inducing localized electrostatic charges in the substrate and thereby retaining the substrate against the clamping surface. A base supports the clamping surface and the electrodes.

摘要翻译： 用于保持基板的静电卡盘。 卡盘具有用于接收基底的夹紧表面，其中夹紧表面由填充有碳纳米管的硬质聚合物材料形成。 电极设置在夹紧表面下方，用于在衬底中引起局部静电电荷，从而将衬底保持抵靠夹紧表面。 基座支撑夹紧表面和电极。