Electro-thermally actuated mechanical switching device and memory device using same

    公开(公告)号:US11721495B2

    公开(公告)日:2023-08-08

    申请号:US16942445

    申请日:2020-07-29

    Abstract: A switching device in accordance with the present invention includes a first electrode and a second electrode, and the second electrode includes a body part and a cantilever connected to the body part. In addition, one end of a the cantilever comes into contact with the first electrode by an electrostatic force generated by a voltage applied to the first electrode and the second electrode, and the one end of the cantilever is separated from the first electrode due to heat generated by a voltage applied to both ends of the body part. In addition, the second electrode may include a 2-1 electrode, a 2-2 electrode, and an engineered beam connected in between. The engineered beam comes into contact with the first electrode on the basis of thermal expansion due to heat generated by a current flowing between the body part of the 2-1 electrode and the body part of the 2-2 electrode, or is separated from the first electrode on the basis of thermal expansion due to heat generated by a current flowing through both ends of the body parts of the 2-1 electrode and the 2-2 electrode. According to the present invention, it is possible to achieve high-speed operation while having ultralow power, high reliability through exploiting nano thermal actuation method capable of high-speed thermal expansion and actuation at low operation voltage.

    Electromechanical logic-in-memory device

    公开(公告)号:US12107576B2

    公开(公告)日:2024-10-01

    申请号:US17965098

    申请日:2022-10-13

    CPC classification number: H03K19/003 H03K19/21

    Abstract: An electromechanical logic-in-memory device includes a switching unit including a first electrode having a conductive beam and second and third electrodes disposed on both sides of the conductive beam and attracting the conductive beam by electrostatic force, based on an operating voltage applied between the second and third electrodes and the conductive beam, the conductive beam, after being attracted by and adhered to the second or third electrode, maintained to be adhered even when the electrostatic force is removed and a controller determining an operation mode according to types of logic operations included in input data, setting an initial position of the conductive beam by applying the operating voltage to any one of the second and third electrodes, selecting at least one of the first to third electrodes, and applying a predetermined voltage as a true value of a logic value included in the input data.

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