摘要:
A method of manufacturing a semiconductor device includes forming a lower structure including a plurality of transistors, forming a conductive layer on the lower structure, forming first preliminary pad mask patterns and wiring mask patterns on the conductive layer, forming pad mask patterns by patterning the first preliminary pad mask patterns while protecting the wiring mask patterns, and etching the conductive layer using the pad mask patterns and the wiring mask patterns as an etching mask to form pad patterns and wiring patterns.
摘要:
Provided is an organometallic compound represented by Formula 1, an organic light-emitting device including the same, and an electronic apparatus including the organic light-emitting device.
M(L1)n1(L2)n2
M, L1, L2, n1, and n2 in Formula 1 are the same as described in the present specification.
摘要:
An organic light-emitting device comprising: a first electrode; a second electrode facing the first electrode; and an organic layer disposed between the first electrode and the second electrode, wherein the organic layer comprises an emission layer, the emission layer comprises a first host and a dopant, the dopant is an organometallic compound including platinum, the organic light-emitting device satisfies a condition of: HOMO(D)−HOMO(Host 1)≥0.2 electron volts, HOMO(D) is a highest occupied molecular orbital (HOMO) energy level of the dopant in electron volts, HOMO(Host 1) is a HOMO) energy level of the first host in electron volts, and HOMO(D) and HOMO(Host 1) are each measured using a photoelectron spectrometer in an ambient atmosphere.
摘要:
A method of forming a low-k layer includes forming a layer by providing a silicon source, a carbon source, an oxygen source, and a nitrogen source onto a substrate. The forming of the layer includes a plurality of main cycles, and each of the main cycles includes providing the silicon source, providing the carbon source, providing the oxygen source, and providing the nitrogen source, each of which is performed at least one time. Each of the main cycles includes sub-cycles in which the providing of the carbon source and the providing of the oxygen source are alternately performed.
摘要:
An organometallic compound represented by Formula 1: wherein in Formula 1, CY1, M, L, R1, R2, R3, R4, a1, a2, n1, and n2 are described in the specification.