Manufacturing method of compound semiconductor device
    1.
    发明申请
    Manufacturing method of compound semiconductor device 审中-公开
    化合物半导体器件的制造方法

    公开(公告)号:US20030013240A1

    公开(公告)日:2003-01-16

    申请号:US10189734

    申请日:2002-07-08

    CPC分类号: H01L29/045 H01L21/3043

    摘要: In a method of manufacturing a compound semiconductor device, individual chip patterns are projected onto a (1 0 0) surface of a GaAs wafer so that the columns and rows of the chip patterns are aligned in a direction slanting by 45 degrees with respect to a null0 1 1null direction of the GaAs wafer. The wafer is diced along this slanting direction and chipping along the edges of the individual separated chips is greatly reduced.

    摘要翻译: 在制造化合物半导体器件的方法中,将单个芯片图案投影到GaAs晶片的(110)表面上,使得芯片图案的列和行相对于一个或多个的方向倾斜45度 GaAs晶片的[0 1 1]方向。 沿着该倾斜方向切割晶片,并且沿着各个分离的芯片的边缘的切屑大大减少。

    Compound semiconductor device and manufacturing method thereof
    2.
    发明申请
    Compound semiconductor device and manufacturing method thereof 有权
    化合物半导体器件及其制造方法

    公开(公告)号:US20030017644A1

    公开(公告)日:2003-01-23

    申请号:US10189775

    申请日:2002-07-08

    IPC分类号: H01L021/301 H01L021/44

    CPC分类号: H01L21/3043 H01L29/045

    摘要: In a method of manufacturing a compound semiconductor device, individual chip patterns are projected onto a (1 0 0) surface of a GaAs wafer so that the columns and rows of the chip patterns are aligned in a direction slanting by 45 degrees with respect to a nullO 1 1null direction of the GaAs wafer. The wafer is diced along this slanting direction and chipping along the edges of the individual separated chips is greatly reduced.

    摘要翻译: 在制造化合物半导体器件的方法中,将单个芯片图案投影到GaAs晶片的(110)表面上,使得芯片图案的列和行相对于一个或多个的方向倾斜45度 [O11] GaAs晶片方向。 沿着该倾斜方向切割晶片,并且沿着各个分离的芯片的边缘的切屑大大减少。

    Compound semiconductor device
    4.
    发明申请
    Compound semiconductor device 审中-公开
    复合半导体器件

    公开(公告)号:US20030129788A1

    公开(公告)日:2003-07-10

    申请号:US10328022

    申请日:2002-12-26

    IPC分类号: H01L021/44 H01L021/301

    CPC分类号: H01L21/3043 H01L29/045

    摘要: In a method of manufacturing a compound semiconductor device, individual chip patterns are projected onto a (100) surface of a GaAs wafer so that the columns and rows of the chip patterns are aligned in a direction slanting by 45 degrees with respect to a nullO11null direction of the GaAs wafer. The wafer is diced along this slanting direction and chipping along the edges of the individual separated chips is greatly reduced.

    摘要翻译: 在制造化合物半导体器件的方法中,将各个芯片图案投影到GaAs晶片的(100)表面上,使得芯片图案的列和行相对于[O11]倾斜45度的方向 ]方向。 沿着该倾斜方向切割晶片,并且沿着各个分离的芯片的边缘的切屑大大减少。