专利检索 ap:("Satayadev R. Patel" OR "Andrew G. Huibers" OR "Steve Chiang" OR "Robert M. Duboc" OR "Thomas J. Grobelny" OR "Hung Nan Chen" OR "Dietrich Dehlinger" OR "Peter W. Richards" OR "Hongqin Shi" OR "Anthony Sun") AND inv:"Steve Chiang" 第 1 页

1.

发明授权
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 有权
标题翻译：在晶片衬底上沉积，释放和封装微机电器件的方法

公开(公告)号：US07307775B2

公开(公告)日：2007-12-11

申请号：US10167361

申请日：2002-06-11

申请人： Satayadev R. Patel , Andrew G. Huibers , Steve Chiang , Robert M. Duboc , Thomas J. Grobelny , Hung Nan Chen , Dietrich Dehlinger , Peter W. Richards , Hongqin Shi , Anthony Sun

发明人： Satayadev R. Patel , Andrew G. Huibers , Steve Chiang , Robert M. Duboc , Thomas J. Grobelny , Hung Nan Chen , Dietrich Dehlinger , Peter W. Richards , Hongqin Shi , Anthony Sun

IPC分类号： G02B26/00

CPC分类号： B81B7/0077 , B81B2201/042 , B81C1/00269 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , G02B26/0841 , H01L24/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01072 , H01L2924/01074 , H01L2924/01076 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/1461 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00

摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。在一个或两个晶片上沉积吸气材料和固体或液体润滑剂之后，两个基底可以在晶片级结合。如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。

2.

发明申请
Methods for Depositing, Releasing and Packaging Micro-Electromechanical Devices on Wafer Substrates 审中-公开
标题翻译：微晶基片上微机电器件的沉积，释放和封装方法

公开(公告)号：US20080096313A1

公开(公告)日：2008-04-24

申请号：US11954076

申请日：2007-12-11

申请人： Satayadev Patel , Andrew Huibers , Steve Chiang , Robert Duboc , Thomas Grobelny , Hung Nan Chen , Dietrich Dehlinger , Peter Richards , Hongqin Shi , Anthony Sun

发明人： Satayadev Patel , Andrew Huibers , Steve Chiang , Robert Duboc , Thomas Grobelny , Hung Nan Chen , Dietrich Dehlinger , Peter Richards , Hongqin Shi , Anthony Sun

IPC分类号： H01L21/48

CPC分类号： B81B7/0077 , B81B2201/042 , B81C1/00269 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , G02B26/0841 , H01L24/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01072 , H01L2924/01074 , H01L2924/01076 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/1461 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00

摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。在一个或两个晶片上沉积吸气剂材料和/或固体或液体润滑剂之后，两个基底可以在晶片级粘结。如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。

3.

发明申请
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 有权
标题翻译：在晶片衬底上沉积，释放和封装微机电器件的方法

公开(公告)号：US20050074919A1

公开(公告)日：2005-04-07

申请号：US10167361

申请日：2002-06-11

申请人： Satayadev Patel , Andrew Huibers , Steve Chiang , Robert Duboc , Thomas Grobelny , Hung Chen , Dietrich Dehlinger , Peter Richards , Hongqin Shi , Anthony Sun

发明人： Satayadev Patel , Andrew Huibers , Steve Chiang , Robert Duboc , Thomas Grobelny , Hung Chen , Dietrich Dehlinger , Peter Richards , Hongqin Shi , Anthony Sun

IPC分类号： B81B3/00 , B81B7/00 , B81C1/00 , B81C3/00 , B81C99/00 , G02B26/08 , H01L21/301 , H01L21/60 , H01L23/02 , H01L23/22 , H01L23/24 , H01L21/44

CPC分类号： B81B7/0077 , B81B2201/042 , B81C1/00269 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , G02B26/0841 , H01L24/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01072 , H01L2924/01074 , H01L2924/01076 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/1461 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00

摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。在一个或两个晶片上沉积吸气材料和固体或液体润滑剂之后，两个基底可以在晶片级结合。如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。

4.

发明申请
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 审中-公开

公开(公告)号：US20050214976A1

公开(公告)日：2005-09-29

申请号：US11102108

申请日：2005-04-07

申请人： Satyadev Patel , Andrew Huibers , Steve Chiang

发明人： Satyadev Patel , Andrew Huibers , Steve Chiang

IPC分类号： B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , G02B26/08 , H01L21/48

CPC分类号： B81C1/00214 , B81B7/0077 , B81B2201/042 , B81C1/00333 , B81C1/00896 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , H01L24/97 , H01L2224/48091 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01058 , H01L2924/01072 , H01L2924/01074 , H01L2924/01077 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/09701 , H01L2924/10253 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/1433 , H01L2924/15787 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00014 , H01L2224/85 , H01L2924/00

摘要： A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

5.

发明申请
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 审中-公开

公开(公告)号：US20050179982A1

公开(公告)日：2005-08-18

申请号：US11102187

申请日：2005-04-07

申请人： Satyadev Patel , Andrew Huibers , Steve Chiang

发明人： Satyadev Patel , Andrew Huibers , Steve Chiang

IPC分类号： B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , G02B26/08 , G02B21/06 , G02B26/00 , G02F1/03 , H01L21/44 , H01L21/48

CPC分类号： B81C1/00214 , B81B7/0077 , B81B2201/042 , B81C1/00333 , B81C1/00896 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , H01L24/97 , H01L2224/48091 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01058 , H01L2924/01072 , H01L2924/01074 , H01L2924/01077 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/09701 , H01L2924/10253 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/1433 , H01L2924/15787 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00014 , H01L2224/85 , H01L2924/00

摘要： A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

6.

发明授权
Systems and methods for simulating game state changes responsive to an interrupt condition 有权
标题翻译：响应中断条件模拟游戏状态变化的系统和方法

公开(公告)号：US07351138B2

公开(公告)日：2008-04-01

申请号：US10828597

申请日：2004-04-20

申请人： Marco Busse , Steve Chiang

发明人： Marco Busse , Steve Chiang

IPC分类号： A63F13/00

CPC分类号： A63F13/493 , A63F13/10 , A63F13/12 , A63F13/57 , A63F13/65 , A63F13/803 , A63F2300/636 , A63F2300/64 , A63F2300/69 , A63F2300/8017

摘要： A simulation module simulates events that may occur during a cautionary period based on, e.g., current relative position of vehicles, vehicle and driver attributes and current game statistics for vehicles, and compiles new statistics and attributes that are used in the resumed race. A full race simulation option and a partial race simulation option are also provided. For example, in a season mode, the simulation module simulates events that may occur during a race and compiles statistics that can be used later, e.g., in a later race, for season standings, etc. A complete race may be simulated, or a partial race may be simulated, for example, if a user desires to terminate a race before it is finished, using the compiled statistics, and a new set of statistics compiled to track the simulated race events. Real world statistics are imported and used in some aspects. For example, real world standings, performance statistics and attribute information are stored in a database and are used as a basis for AI-controlled vehicle performance and AI-generated simulation results.

摘要翻译： 模拟模块基于例如车辆的当前相对位置，车辆和驾驶员属性以及车辆的当前游戏统计信息来模拟在警戒期间可能发生的事件，并且编译在恢复的比赛中使用的新的统计数据和属性。还提供了全赛跑模拟选项和部分比赛模拟选项。例如，在季节模式中，模拟模块模拟在比赛期间可能发生的事件，并且编译可以稍后使用的统计数据，例如在稍后的比赛中，用于赛季积分等。可以模拟完整的比赛，或者可以模拟部分比赛，例如，如果用户希望在完成比赛之前终止比赛，使用编译的统计数据，以及编辑的一组新的统计信息来跟踪模拟的比赛事件。现实世界统计数据在某些方面被导入和使用。例如，现实世界的排名，性能统计和属性信息存储在数据库中，并用作AI控制的车辆性能和AI生成的仿真结果的基础。