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公开(公告)号：US08599531B2
公开(公告)日：2013-12-03
申请号：US12684733
申请日：2010-01-08
申请人： Satish Sundar , Jeffrey C. Hudgens , Prudhvi R. Chintalapati , William Nixon Taylor, Jr. , William P. Laceky , Jeffrey A. Brodine , Dean C. Hruzek , Mario Dave Silvetti
发明人： Satish Sundar , Jeffrey C. Hudgens , Prudhvi R. Chintalapati , William Nixon Taylor, Jr. , William P. Laceky , Jeffrey A. Brodine , Dean C. Hruzek , Mario Dave Silvetti
IPC分类号： H01L21/683 , H01L21/67 , H01L21/673 , H01L21/677
CPC分类号： H01L21/6833 , H01L21/67 , H01L21/673 , H01L21/677 , H01L21/683 , H01L21/6831 , H01L21/68707 , Y10S414/141 , Y10S901/30 , Y10S901/40
摘要： Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.
摘要翻译： 提供了用于在电子设备制造系统的系统部件之间传送基板的系统，设备和方法。 该系统和装置包括具有基座的静电末端执行器，基座上的电极对和用于将基板与电极对间隔开的隔离构件，以在电极对和基板之间提供间隙。 提供了本发明的方法以及许多其它方面。
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公开(公告)号：US20100178139A1
公开(公告)日：2010-07-15
申请号：US12684733
申请日：2010-01-08
申请人： Satish Sundar , Jeffrey C. Hudgens , Prudhvi R. Chintalapati , William Nixon Taylor, JR. , William P. Laceky , Jeffrey A. Brodine , Dean C. Hruzek , Mario Dave Silvetti
发明人： Satish Sundar , Jeffrey C. Hudgens , Prudhvi R. Chintalapati , William Nixon Taylor, JR. , William P. Laceky , Jeffrey A. Brodine , Dean C. Hruzek , Mario Dave Silvetti
IPC分类号： H01L21/68 , H01L21/677 , H01L21/683
CPC分类号： H01L21/6833 , H01L21/67 , H01L21/673 , H01L21/677 , H01L21/683 , H01L21/6831 , H01L21/68707 , Y10S414/141 , Y10S901/30 , Y10S901/40
摘要： Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.
摘要翻译： 提供了用于在电子设备制造系统的系统部件之间传送基板的系统，设备和方法。 该系统和装置包括具有基座的静电末端执行器，基座上的电极对和用于将基板与电极对间隔开的隔离构件，以在电极对和基板之间提供间隙。 提供了本发明的方法以及许多其它方面。
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3.发明授权Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing 有权适用于在电子设备制造中传送基板的机器人系统，装置和方法公开(公告)号：US09076829B2
公开(公告)日：2015-07-07
申请号：US13205116
申请日：2011-08-08
IPC分类号： B25J9/04 , H01L21/677
CPC分类号： H01L21/67742 , B25J9/04 , B25J9/041 , B25J9/042 , H01L21/67766
摘要： Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided.
摘要翻译： 描述了基底输送系统，装置和方法。 这些系统适于通过将动臂连杆机构旋转到与目的地相邻的位置而有效地放置或拾取目的地的基板，然后独立地致动上臂连杆壳体和一个或多个腕部构件以将一个或多个基板放置在 目的地，其中手腕构件相对于前臂连杆壳体独立地致动，并且前臂连杆构件的运动与上臂连杆壳体的运动相关联。 提供了许多其他方面。
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4.发明申请公开(公告)号：US20080298945A1
公开(公告)日：2008-12-04
申请号：US12129346
申请日：2008-05-29
申请人： Damon Keith Cox , Marvin L. Freeman , Jason M. Schaller , Jeffrey C. Hudgens , Jeffrey A. Brodine
发明人： Damon Keith Cox , Marvin L. Freeman , Jason M. Schaller , Jeffrey C. Hudgens , Jeffrey A. Brodine
IPC分类号： B66C23/18
CPC分类号： H01L21/68707 , H01L21/67742 , Y10T74/20305
摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.
摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。
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5.发明申请ROBOT SYSTEMS, APPARATUS, AND METHODS ADAPTED TO TRANSPORT SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING 有权机器人系统，装置和适用于电子设备制造中运输基板的方法公开(公告)号：US20130039726A1
公开(公告)日：2013-02-14
申请号：US13205116
申请日：2011-08-08
CPC分类号： H01L21/67742 , B25J9/04 , B25J9/041 , B25J9/042 , H01L21/67766
摘要： Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided.
摘要翻译： 描述了基底输送系统，装置和方法。 这些系统适于通过将动臂连杆机构旋转到与目的地相邻的位置而有效地放置或拾取目的地的基板，然后独立地致动上臂连杆壳体和一个或多个腕部构件以将一个或多个基板放置在 目的地，其中手腕构件相对于前臂连杆壳体独立地致动，并且前臂连杆构件的运动与上臂连杆壳体的运动相关联。 提供了许多其他方面。
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6.发明授权Methods and apparatus for extending the reach of a dual scara robot linkage 有权用于扩展双重scara机器人连杆的范围的方法和装置公开(公告)号：US08016542B2
公开(公告)日：2011-09-13
申请号：US12129346
申请日：2008-05-29
申请人： Damon Keith Cox , Marvin L. Freeman , Jason M. Schaller , Jeffrey C. Hudgens , Jeffrey A. Brodine
发明人： Damon Keith Cox , Marvin L. Freeman , Jason M. Schaller , Jeffrey C. Hudgens , Jeffrey A. Brodine
IPC分类号： B25J18/00
CPC分类号： H01L21/68707 , H01L21/67742 , Y10T74/20305
摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.
摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。
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公开(公告)号：US08784033B2
公开(公告)日：2014-07-22
申请号：US12684780
申请日：2010-01-08
申请人： Izya Kremerman , Jeffrey C. Hudgens
发明人： Izya Kremerman , Jeffrey C. Hudgens
IPC分类号： B66C23/00 , B25J9/06 , H01L21/677 , H01L21/683 , B25J9/04 , B25J9/10
CPC分类号： B25J9/043 , B25J9/042 , B25J9/107 , H01L21/67742 , Y10S414/139 , Y10S901/15 , Y10T74/20305
摘要： Substrate transport systems, apparatus and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating a robot assembly to put or pick the substrate at the destination. Numerous other aspects are provided.
摘要翻译： 描述了基板运输系统，装置和方法。 这些系统适于通过将动臂联动件旋转到与目的地相邻的位置，然后致动机器人组件以将目标物置于或拾取基板，来有效地将目标物放置或拾取目的地的基板。 提供了许多其他方面。
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公开(公告)号：US08322963B2
公开(公告)日：2012-12-04
申请号：US12422867
申请日：2009-04-13
IPC分类号： B65H5/00
CPC分类号： H01L21/67219 , H01L21/67259 , H01L21/67742 , Y10T74/20305
摘要： Embodiments of the present invention generally provide an apparatus and method for transferring substrates in a processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint when compared to conventional techniques.
摘要翻译： 本发明的实施例通常提供一种用于在处理系统（例如，集群工具）中传送基板的装置和方法，所述处理系统具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片） 历史），与传统技术相比，占地面积减少。
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公开(公告)号：US20120060971A1
公开(公告)日：2012-03-15
申请号：US13287534
申请日：2011-11-02
CPC分类号： H01L21/67393 , H01L21/67017 , H01L21/67353 , Y10S414/135 , Y10S414/137 , Y10T137/0318 , Y10T137/0396
摘要： In a first aspect, a loadport is provided. The loadport has a plate adapted to couple to a door of a substrate carrier to open the substrate carrier wherein the plate includes a first opening adapted to couple to a first port in the door of the substrate carrier on a first side of the plate and to couple to a gas source on a second side of the plate, and wherein the loadport is adapted to allow a flow of gas into the substrate carrier via the first opening in the plate. Methods of purging substrate carriers are provided, as are numerous other aspects.
摘要翻译： 在第一方面，提供一种加载端口。 装载端口具有适于联接到基板载体的门以打开衬底载体的板，其中板包括适于联接到板的第一侧上的衬底载体的门中的第一端口的第一开口，并且 耦合到所述板的第二侧上的气体源，并且其中所述负载端口适于允许气体经由所述板中的所述第一开口流入所述衬底载体。 提供清洗衬底载体的方法，以及许多其它方面。
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10.发明授权公开(公告)号：US08020689B2
公开(公告)日：2011-09-20
申请号：US12430032
申请日：2009-04-24
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
IPC分类号： B65G47/34
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。
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