摘要:
A data retrieval system capable of carrying out the retrieval using the secondary information of the primary data to be retrieved such as environmental information or structural information as the retrieval key. In the system, the primary data which are filing target to be stored and retrieved are stored in a first memory while secondary information associated with the primary data, which are not directly related with data content of the primary data, are stored in a second memory in correspondence to the primary data stored in the first memory. Then, when a retrieval key specifying a desired retrieval of the primary data from the first memory is entered, the secondary information is selected from the second memory in accordance with the retrieval key, and the primary data corresponding to the secondary information selected in accordance with the retrieval key is retrieved and outputted as a retrieval result.
摘要:
The present invention provides a polishing solution distribution apparatus capable of reducing distribution deviation of polishing solution even when leveling for installation is insufficient or inclination of an installation location varies and a polishing apparatus having the same. The polishing solution distribution apparatus includes a cone-shaped branch body in which a solution pan to store supplied polishing solution is formed and in which plural flow passages radially connected to a side face of the solution pan respectively and having a delivery port to supply polishing solution to a position lower than the connected position are formed, a support portion to support the branch body, and a universal joint mechanism to support the branch body via the support portion at a position being higher than the gravity center of the branch body.
摘要:
The present invention provides a projector apparatus capable of ensuring stable operation, which is configured to efficiently cool an optical device by circulating air cooled by a cooling part of a refrigeration unit, and further to prevent moisture resulting from evaporation of dew adhered to the cooling part from adversely affecting the optical device when stopping the operation of the refrigeration unit. The optical chamber and the cooling chamber are enclosed respectively by adiabatic walls, the cooling chamber and the optical chamber are connected to each other through a cold air inlet port and a cold air outlet port, and the cold air inlet port and the cold air outlet port are provided with opening and closing mechanisms. In a cooling operation mode, the optical device is cooled with cold air by opening the opening and closing mechanisms, and upon stoppage of the cooling operation, the opening and closing mechanisms are closed to prevent the inflow of the moisture in the cooling chamber to the optical chamber.
摘要:
In order to manufacture an epitaxial wafer having satisfactory flatness over its entire surface, epitaxial layers are experimentally grown upon actual wafer samples under various different layer formation conditions, the thickness profiles are measured over the entire surfaces of these wafers before and after growth of the layers, and, from the differences thereof, layer thickness profiles over the entire areas of the epitaxial layers under the various different layer formation conditions are ascertained and stored. Thereafter, the thickness profile of a substrate wafer is measured over its entire area, this is added to each of the layer thickness profiles under the various different layer formation conditions which have been stored, and the planarities of the manufactured wafers which would be manufactured under these various different layer formation conditions are predicted. And one set of processing conditions is selected which is predicted to satisfy a required flatness specification, and an epitaxial layer is actually grown upon the substrate wafer under these processing conditions.
摘要:
In order to manufacture an epitaxial wafer having satisfactory flatness over its entire surface, epitaxial layers are experimentally grown upon actual wafer samples under various different layer formation conditions, the thickness profiles are measured over the entire surfaces of these wafers before and after growth of the layers, and, from the differences thereof, layer thickness profiles over the entire areas of the epitaxial layers under the various different layer formation conditions are ascertained and stored. Thereafter, the thickness profile of a substrate wafer is measured over its entire area, this is added to each of the layer thickness profiles under the various different layer formation conditions which have been stored, and the planarities of the manufactured wafers which would be manufactured under these various different layer formation conditions are predicted. And one set of processing conditions is selected which is predicted to satisfy a required flatness specification, and an epitaxial layer is actually grown upon the substrate wafer under these processing conditions.
摘要:
A pattern recognition system capable of handling the non-Gaussian feature vector distribution in the feature vector space such that the recognition rate can be improved while using the pattern matching based on the assumption of the Gaussian feature vector distribution. In the system, a nonlinear transformation for each recognizable category is applied to the feature vector extracted from the input pattern to be recognized, to obtain a transformed feature data for the input pattern, where the nonlinear transformation maps linearly inseparable distributions in a vector space containing the feature vector onto linearly separable distributions. Then, the transformed feature data for the input pattern is compared with reference feature model for each recognizable category indicating a feature vector distribution for each category, to find a category of the input pattern as that of the reference feature model closest to the transformed feature data for the input pattern.
摘要:
Gas displacement volumes of a high temperature chamber and a middle temperature chamber in a high temperature portion of a hot gas machine are different. Alternatively, a gas displacement volume of a low temperature chamber and a middle temperature chamber in a low temperature portion are different.
摘要:
Disclosure relates to a fixed abrasive-grain processing device and a method of fixed abrasive-grain processing used for producing a semiconductor wafer, and a method for producing a semiconductor wafer which make the surface of the semiconductor wafer possible to have preferable flatness and which can prevent the number of steps and the installation area of facilities from increasing. The producing of semiconductor wafers uses a fixed abrasive-grain processing device including a lower fixed abrasive-grain layer that is adjacent to the top surface of the lower surface-plate and that grinds the top surfaces of the plurality of semiconductor wafers; an upper fixed abrasive-grain layer that is adjacent to the bottom surface of the upper surface-plate and that grinds the bottom surfaces of the plurality of semiconductor wafers; a carrier plate that is horizontally interposed between the lower surface-plate and the upper surface-plate and that includes a plurality of holes each accommodating one of the plurality of semiconductor wafers; and a carrier rotating device that circularly moves the carrier plate, wherein the lower fixed abrasive-grain layer and the upper fixed abrasive-grain layer include fixed abrasive grain having a diameter of 4 μm or less and being dispersed and fixed in elastic members.
摘要:
All treatments performed in machining processes other than a polishing process are performed while pure water free from free abrasive grains is supplied. Thus, an amount of abrasive grains included in a used processing liquid discharged in each process is reduced and semiconductor scraps are collected from the used slurry for recycling.
摘要:
Occurrence of noise and invasion of grit or dust are prevented and occurrence of condensed water is suppressed.A battery device having a battery which is mounted in a battery case to accumulate power to be demanded and supplied to a motor for driving a vehicle is characterized in that the battery case is designed in a hermetically-sealed structure, a heat exchanger for cooling ambient atmosphere in the battery case and an air blower for blowing cold air of the heat exchanger to the battery are provided in the battery case, and inert gas or dried air is hermetically filled in the battery case under a state that the battery case is hermetically sealed.