公开(公告)号：US20130341630A1

公开(公告)日：2013-12-26

申请号：US13975586

申请日：2013-08-26

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Osamu NAKAMURA ,  Gen FUJII ,  Fuminori TATEISHI

IPC: H01L27/15

CPC classification number: H01L51/0022 ,  H01L27/12 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/156 ,  H01L27/3262 ,  H01L27/3279 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78669 ,  H01L29/78696 ,  H01L51/56 ,  H01L2227/323

Abstract: The present invention provides a display device and a manufacturing method thereof that can simplify manufacturing steps and enhance efficiency in the use of materials, and further, a manufacturing method that can enhance adhesiveness of a pattern. One feature of the invention is that at least one or more patterns needed for manufacturing a display panel, such as a conductive layer forming a wiring or an electrode or a mask for forming a desired pattern is/are formed by a method capable of selectively forming a pattern, thereby manufacturing a display panel.

Abstract translation: 本发明提供一种能够简化制造工序，提高材料使用效率的显示装置及其制造方法，进一步提高能够提高图案的粘合性的制造方法。 本发明的一个特征是，通过能够选择性地形成的方法来形成用于制造显示面板所需的至少一个或多个图案，例如形成布线的导电层或用于形成所需图案的电极或掩模 从而制造显示面板。

公开(公告)号：US20170182853A1

公开(公告)日：2017-06-29

申请号：US15460293

申请日：2017-03-16

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Mayumi YAMAGUCHI ,  Konami IZUMI ,  Fuminori TATEISHI

IPC: B60C23/04 ,  B81C1/00 ,  H01L41/313 ,  H01L27/20 ,  H01L41/311 ,  B60C23/20 ,  H01L41/25

CPC classification number: B60C23/0493 ,  A61B5/02444 ,  A61B5/681 ,  B60C23/04 ,  B60C23/0408 ,  B60C23/0411 ,  B60C23/0413 ,  B60C23/20 ,  B81C1/0023 ,  G01L1/16 ,  G01L17/00 ,  H01L21/02118 ,  H01L21/02175 ,  H01L21/02183 ,  H01L21/02186 ,  H01L21/02189 ,  H01L21/54 ,  H01L24/93 ,  H01L27/20 ,  H01L35/34 ,  H01L41/25 ,  H01L41/311 ,  H01L41/313 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15788 ,  Y10T29/42 ,  H01L2924/00

Abstract: The present invention provides a MEMS and a sensor having the MEMS which can be formed without a process of etching a sacrifice layer. The MEMS and the sensor having the MEMS are formed by forming an interspace using a spacer layer. In the MEMS in which an interspace is formed using a spacer layer, a process for forming a sacrifice layer and an etching process of the sacrifice layer are not required. As a result, there is no restriction on the etching time, and thus the yield can be improved.

公开(公告)号：US20170018713A1

公开(公告)日：2017-01-19

申请号：US15280497

申请日：2016-09-29

Applicant: Semiconductor Energy Laboratory Co., LTD.

Inventor： Osamu NAKAMURA ,  Gen FUJII ,  Fuminori TATEISHI

IPC: H01L51/00 ,  H01L51/56 ,  H01L27/32

CPC classification number: H01L51/0022 ,  H01L27/12 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/156 ,  H01L27/3262 ,  H01L27/3279 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78669 ,  H01L29/78696 ,  H01L51/56 ,  H01L2227/323

Abstract: The present invention provides a display device and a manufacturing method thereof that can simplify manufacturing steps and enhance efficiency in the use of materials, and further, a manufacturing method that can enhance adhesiveness of a pattern. One feature of the invention is that at least one or more patterns needed for manufacturing a display panel, such as a conductive layer forming a wiring or an electrode or a mask for forming a desired pattern is/are formed by a method capable of selectively forming a pattern, thereby manufacturing a display panel.

Abstract translation: 本发明提供一种能够简化制造工序，提高材料使用效率的显示装置及其制造方法，进一步提高能够提高图案的粘合性的制造方法。 本发明的一个特征是，通过能够选择性地形成的方法来形成用于制造显示面板所需的至少一个或多个图案，例如形成布线的导电层或用于形成所需图案的电极或掩模 从而制造显示面板。

公开(公告)号：US20190027688A1

公开(公告)日：2019-01-24

申请号：US16127811

申请日：2018-09-11

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Osamu NAKAMURA ,  Gen FUJII ,  Fuminori TATEISHI

IPC: H01L51/00 ,  H01L27/12 ,  H01L27/32 ,  H01L29/786 ,  H01L27/15 ,  H01L29/66 ,  H01L29/423 ,  H01L51/56

Abstract: The present invention provides a display device and a manufacturing method thereof that can simplify manufacturing steps and enhance efficiency in the use of materials, and further, a manufacturing method that can enhance adhesives of a pattern. One feature of the invention is that at least one or more patterns needed for manufacturing a display panel, such as a conductive layer forming a wiring or an electrode or a mask for forming a desired pattern is/are formed by a method capable of selectively forming a pattern, thereby manufacturing a display panel.

公开(公告)号：US20180053895A1

公开(公告)日：2018-02-22

申请号：US15783096

申请日：2017-10-13

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Osamu NAKAMURA ,  Gen FUJII ,  Fuminori TATEISHI

IPC: H01L51/00 ,  H01L51/56 ,  H01L27/12 ,  H01L29/786 ,  H01L29/66 ,  H01L29/423 ,  H01L27/32 ,  H01L27/15

CPC classification number: H01L51/0022 ,  H01L27/12 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/156 ,  H01L27/3262 ,  H01L27/3279 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78669 ,  H01L29/78696 ,  H01L51/56 ,  H01L2227/323

Abstract: The present invention provides a display device and a manufacturing method thereof that can simplify manufacturing steps and enhance efficiency in the use of materials, and further, a manufacturing method that can enhance adhesiveness of a pattern. One feature of the invention is that at least one or more patterns needed for manufacturing a display panel, such as a conductive layer forming a wiring or an electrode or a mask for forming a desired pattern is/are formed by a method capable of selectively forming a pattern, thereby manufacturing a display panel.