摘要:
In a method for forming a contact plug of a semiconductor device, epitaxial silicon is formed as contact material using a solid-phase epitaxy method. The method can obtain reduced contact resistance and improved refresh characteristics, compared with prior arts using polysilicon as contact material. Also, the method uses an SPE method, not a conventional SEG method, to form epitaxial silicon so that it can substantially reduce thermal budget through low-temperature processes. The method can also use conventional polysilicon deposition process without modification to form epitaxial silicon with ease and productivity.
摘要:
Disclosed is a method of manufacturing a semiconductor device. The method comprises the steps of: preparing a silicon substrate having a predetermined lower structure including a gate and a bonding area; forming an interlayer dielectric film on the top side of the substrate; forming a photosensitive film pattern, which exposes an area for providing contact, on the interlayer dielectric film; forming a contact hole exposing a bonding area of the substrate by etching the exposed part of the interlayer dielectric film; removing the photosensitive film pattern; performing a dry cleaning on the exposed bonding area of the substrate so that CF based polymer formed in the etching step is removed; and performing a nitrogen-hydrogen plasma processing on the surface of the exposed bonding area of the substrate so that oxygen polymer and remaining CF-based polymer are removed. Therefore, since hydrogen plasma processing is performed after contact etching, ohmic contact characteristics can be secured. In addition, since the hydrogen plasma processing is performed using a conventional photosensitive film strip apparatus, cost required to install and maintain an additional apparatus is not generated.
摘要:
In embodiments of the present invention, systems and methods of remotely monitoring a plurality of individuals may include providing a plurality of monitoring objects, wherein each monitoring object is associated with the environment of one of the plurality of individuals. A sensor may be integrated into each monitoring object, wherein the sensor collects activity data for the individual associated with the monitoring object. The sensor data may be processed at each monitoring object to obtain monitoring information for the activity of the individual associated with the monitoring object. The monitoring information obtained with each monitoring object may be transmitted over a network to a receiving object, wherein the receiving object may display a picture associated with the particular individual being monitored at the time that it displays information about that individual.
摘要:
A shaking sensing unit includes a sensor sensing a rotation about at least one axis, a high pass filter passing only a signal having a frequency not less than a cutoff frequency of the high pass filter, among electrical signals output from the sensor, and a low pass filter passing only a signal having a frequency not greater than a cutoff frequency of the low pass filter and higher than the cutoff frequency of the high pass filter, among the electrical signals output from the sensor. The cutoff frequency of the high pass filter and the cutoff frequency of the low pass filter are variably determined according to a shaking frequency.
摘要:
A battery powered, low voltage faucet flow timer, water usage calculator, and energy consumption awareness meter is simple to install and calibrate and may enable a user to understand the water usage associated with showering, bathing or other open faucet water use activity. The device may provide a simple method for calculating the flow characteristics for a shower, bath or other faucet and entering this flow rate into the timing device so that the timer provides an accurate calculation of water usage indicating both the time spent with the water running and approximate total water usage.
摘要:
Provided are a photographing control method and apparatus according to motion of a digital photographing apparatus. The photographing control method may prevent inconvenience when a subject is photographed while changing a viewing angle by using an additional zoom button, by sensing predetermined motion via a motion sensor comprised in the digital photographing apparatus and calculating a first motion value; comparing the calculated first motion value to predetermined threshold values; and controlling a zoom lens to be driven in a predetermined direction according to a result of the comparing.
摘要:
A wheeled transport device includes a body having a compartment configured to contain goods. Wheels are rotatably attached to a lower portion of the body, and a handle is attached to an upper portion of the body. The handle is configured to retract within a cavity defined by the body. An electronic device is mounted to the handle.
摘要:
In one embodiment, the invention relates to an apparatus and method for recording/reproducing at least one text subtitle stream. The method includes receiving at least one text subtitle stream from an external source, each text subtitle stream including a style segment defining at least one region style and at least one presentation segment, each presentation segment containing at least one region of text and being linked to at least one region style, wherein the style segment including a player style flag which indicates whether a player is permitted to generate its own player style. Thereafter, the method calls for decoding the text subtitle stream using the style segment defining at least one region style and a player style flag.
摘要:
In one embodiment, a first play list is generated if a first additional data stream is provided, and a second play list is generated if a second additional data stream is provided. The first play list links the main video data stream with the first additional data stream such that the main video data stream is reproduced with the first additional data stream if the first play list is reproduced. The second play list links the main video data stream with the second additional data stream such that the main video data stream is reproduced with the second additional data stream if the second play list is reproduced.
摘要:
In one embodiment, the data structure includes original management data managing reproduction of stream data. The original management data includes at least one stream information file managing at least one stream file, which includes the stream data; at least one playlist file, which manages the stream information; and at least one general management file, which manages the playlist file. The data structure further includes back-up management data duplicating the original management data. The original management data is recorded at an inner radius portion of the recording medium, and the back-up management data is recorded at an outer radius portion of the recording medium.