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    COMPACT NANOFABRICATION APPARATUS
    1.
    发明申请
    COMPACT NANOFABRICATION APPARATUS 审中-公开
    紧凑的纳米装置

    公开(公告)号：US20110195850A1

    公开(公告)日：2011-08-11

    申请号：US13088284

    申请日：2011-04-15

    申请人： Sergey V. ROZHOK ,  Michael Nelson ,  Nabil A. Amro ,  Joseph S. Fragala ,  Raymond Roger Shile ,  John Edward Bussan ,  Dirk N. vanMerkestyn

    发明人： Sergey V. ROZHOK ,  Michael Nelson ,  Nabil A. Amro ,  Joseph S. Fragala ,  Raymond Roger Shile ,  John Edward Bussan ,  Dirk N. vanMerkestyn

    IPC分类号： C40B30/00 ,  C40B50/14

    CPC分类号： G03F7/0002 ,  G01Q80/00 ,  G03F7/70383 ,  G03F9/00

    摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.

    摘要翻译： 一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑，并在实验台或台式机上使用。 一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件，至少一个观察组件，至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。

    COMPACT NANOFABRICATION APPARATUS
    2.
    发明申请
    COMPACT NANOFABRICATION APPARATUS 审中-公开
    紧凑的纳米装置

    公开(公告)号：US20090023607A1

    公开(公告)日：2009-01-22

    申请号：US12116908

    申请日：2008-05-07

    申请人： Sergey V. Rozhok ,  Michael Nelson ,  Nabil A. Amro ,  Joseph S. Fragala ,  Raymond Roger Shile ,  John Edward Bussan ,  Dirk N. vanMerkestyn

    发明人： Sergey V. Rozhok ,  Michael Nelson ,  Nabil A. Amro ,  Joseph S. Fragala ,  Raymond Roger Shile ,  John Edward Bussan ,  Dirk N. vanMerkestyn

    IPC分类号： C40B50/14 ,  C40B60/14

    CPC分类号： G03F7/0002 ,  G01Q80/00 ,  G03F7/70383 ,  G03F9/00

    摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.

    摘要翻译： 一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑，并在实验台或台式机上使用。 一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件，至少一个观察组件，至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。

    Active pen nanolithography
    8.
    发明授权
    Active pen nanolithography 失效
    活性笔纳米光刻

    公开(公告)号：US08261662B1

    公开(公告)日：2012-09-11

    申请号：US11268740

    申请日：2005-11-08

    申请人： Raymond Roger Shile ,  Terrisa Duenas ,  John Edward Bussan ,  Gregory J. Athas ,  Joseph S. Fragala ,  Jason R. Haaheim ,  Sylvain Cruchon-Dupeyrat ,  Jeffrey R. Rendlen

    发明人： Raymond Roger Shile ,  Terrisa Duenas ,  John Edward Bussan ,  Gregory J. Athas ,  Joseph S. Fragala ,  Jason R. Haaheim ,  Sylvain Cruchon-Dupeyrat ,  Jeffrey R. Rendlen

    IPC分类号： H01L21/02

    CPC分类号： G02B21/0008 ,  G02B21/002

    摘要： Improved actuated probes suitable for scanning probe lithography or microscopy, and especially direct-write nanolithography and method of fabrication thereof. In one embodiment, thermomechanically actuated cantilevers with oxide-sharpened microcast tips are inexpensively fabricated by a process that comprises low-temperature wafer bonding, such as (gold) thermocompressive bonding, eutectic or adhesive bonding. Also provided is a flexcircuit that electrically interconnects the actuated probes to external circuitry and mechanically couples them to the instrument actuator. An improved scanning probe lithography instrument, hardware and software, can be built around the actuated cantilevers and the flexcircuit. Finally, provided is an improved microfluidic circuit to deliver chemical compounds to the tips of (actuated) probes and a fabrication method for tall, high-aspect-ratio tips.

    摘要翻译： 改进的适用于扫描探针光刻或显微镜的致动探针，特别是直写式纳米光刻及其制造方法。 在一个实施例中，通过包括低温晶片接合（例如（金））热压接合，共晶或粘合粘合的方法廉价地制造具有氧化物锐化的微型天线的热机械致动悬臂。 还提供了将致动的探针电连接到外部电路并将它们机械耦合到仪器致动器的挠性电路。 可以围绕致动的悬臂和柔性电路构建改进的扫描探针光刻仪器，硬件和软件。 最后，提供了一种改进的微流体电路，用于将化学化合物递送到（致动的）探针的尖端，以及用于高，高纵横比尖端的制造方法。

    Cantilevers for deposition
    9.
    发明申请
    Cantilevers for deposition 审中-公开
    用于沉积的悬臂

    公开(公告)号：US20110274839A1

    公开(公告)日：2011-11-10

    申请号：US13064766

    申请日：2011-04-13

    申请人： Joseph S. Fragala ,  R. Roger Shile ,  Sergey V. Rozhok

    发明人： Joseph S. Fragala ,  R. Roger Shile ,  Sergey V. Rozhok

    IPC分类号： B05C5/00 ,  B05D1/36 ,  C23F1/00 ,  B05D5/00

    CPC分类号： G03F7/0002 ,  B81B2203/0118 ,  B81C1/00031 ,  B81C99/0025 ,  B82B3/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/2049

    摘要： Cantilever design for patterning from a cantilever tip can be improved with, for example, a recessed area surrounding the cantilever tip. A device for printing nanoscopic and microscopic patterns includes at least one cantilever having a front surface, a first side edge, a second side edge, and a first end which is a free end and a second end which is a non-free end. The front surface includes at least one first sidewall disposed at the first cantilever side edge and at least one second sidewall disposed at the second cantilever side edge opposing the first cantilever side edge, at least one channel, adapted to hold a fluid, disposed between the first and second sidewalls, wherein the channel, the first sidewall, and the second sidewall extend toward the cantilever free end but do not reach the free end, and a base region having a boundary defined by the first edge, the second edge, and the cantilever free end and also the first sidewall, second sidewall, and the channel, wherein the base region comprises a tip extending away from the cantilever front surface. Improved deposition can result. Fluidic inks comprising biomolecules can be patterned successfully.

    摘要翻译： 例如可以通过围绕悬臂尖端的凹陷区域来改善从悬臂尖端进行图案化的悬臂设计。 用于印刷纳米尺度和微观图案的装置包括至少一个具有前表面，第一侧边缘，第二侧边缘以及作为自由端的第一端和作为非自由端的第二端的悬臂。 前表面包括设置在第一悬臂侧边缘处的至少一个第一侧壁和设置在与第一悬臂侧边缘相对的第二悬臂侧边缘处的至少一个第二侧壁，至少一个适于保持流体的通道， 第一和第二侧壁，其中，所述通道，所述第一侧壁和所述第二侧壁朝向所述悬臂自由端延伸，但是不到达所述自由端，并且具有由所述第一边缘，所述第二边缘和所述第二边缘限定的边界的基底区域 悬臂自由端以及第一侧壁，第二侧壁和通道，其中基部区域包括远离悬臂前表面延伸的尖端。 可以改善沉积。 可以成功地构图包含生物分子的流体油墨。