摘要:
A rotary electric machine comprising a stator and a rotor arranged opposedly of the stator. A magnet is provided on the stator or a frame for holding the stator at a position so as to be constantly opposed during rotation to a portion of the magnetic body of the rotor. The magnet is disposed at a position other than at a portion at which the magnetic action for rotation of the rotor occurs. The rotor is therefore constantly biased so that rotor play is minimized and non-repeatable deflections of the spindle are eliminated.
摘要:
A driving motor comprises a rotor having a rotatably supported shaft, a rotor case rotating together with the shaft, a hub seat attached to the rotor case for mounting a disk hub and a chucking magnet for magnetically attracting the disk hub and a thrust ball bearing having a washer, a plurality s of balls and a retainer for holding the balls and supporting the load in the thrust direction of the rotor. The motor also includes a flatness control section which passes through the rotor case to contact the washer of the thrust ball bearing and controls the flatness of the washer and a position control section which passes through the rotor case to contact an inner circle surface of the washer of the thrust ball bearing and controls the washer in the thrust direction. The chucking magnet, flatness control section and position control section are integrally molded of resin.
摘要:
An annealing apparatus includes heating sources provided to face a wafer W, the heating sources having LEDs emitting lights to the wafer; light-transmitting members for transmitting the lights emitted from the LEDs; and cooling members made of aluminum and provided to directly contact with the heating sources, respectively. The heating sources include a plurality of LED arrays having supporters made of AlN, each having one surface on which the LEDs are adhered by using a silver paste; and other surface on which thermal diffusion members made of copper are adhered by using a solder. The LED arrays are fixed to the cooling member by using screws via a silicone grease.
摘要:
A failure prediction system for performing failure prediction to a monitoring target device by detecting a state, comprising: a state detection unit for detecting state signals of no smaller than two different kinds, and outputting a detection signal corresponding to each of the state signals; a phase processing part for synchronizing a plurality of the detection signals; a signal analysis part for calculating a feature value indicating a feature of the state for each of the detection signals from the phase processing part; and a failure prediction part for performing failure prediction of the monitoring target device for each of the feature values by comparing the feature value in question and a reference value set in advance.
摘要:
A structure for attaching a vibration sensor to a storage device having a recording or reproducing head that records on or reproduces from a recording medium, includes: a first vibration sensor which is provided on a first outer surface of a base of the storage device, and detects vibration in a direction perpendicular to a surface of the recording medium; a second vibration sensor which is provided on a second outer surface of the base, the second surface orthogonal to the first outer surface, and detects vibration in an in-plane direction of the recording medium; an urging section which has a first end portion in contact with an upper surface of the first vibration sensor and a second end portion in contact with an upper surface of the second vibration sensor, and has a substantially L-shape; and a damping member affixed to the urging section.
摘要:
Acceleration sensor comprises vibrating element including piezoelectric body, circuit board amplifying output charge of the piezoelectric body that is generated due to bending vibration of the vibrating element, and sensor housing composed of highly conductive material, the sensor housing loading the vibrating element and the circuit board. The circuit board includes one or two extending region(s) formed so as to protrude from one side of the circuit board, the extending region(s) connecting mechanically and electrically the circuit board to the vibrating element. The sensor housing includes supporting base supporting the vibrating element, and recess portion is formed on the supporting base. The supporting base is configured such that the extending region(s) of the circuit board cover(s) the recess portion, and the vibrating element is fixed and supported by insulating adhesive agent with which space that is formed from the recess portion and the extending region(s) is filled.
摘要:
A tuner for matching impedance includes: a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path; an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and a drive mechanism for moving the slug and including a drive part for applying a driving force; a drive transmission part for transmitting the driving force to the slug; a drive guide part for guiding movement of the slug; and a holding part for holding the slug at the drive transmission part, and wherein the drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor.
摘要:
A structure for attaching a vibration sensor to a storage device having a recording or reproducing head that records on or reproduces from a recording medium, includes: a first vibration sensor which is provided on a first outer surface of a base of the storage device, and detects vibration in a direction perpendicular to a surface of the recording medium; a second vibration sensor which is provided on a second outer surface of the base, the second surface orthogonal to the first outer surface, and detects vibration in an in-plane direction of the recording medium; an urging section which has a first end portion in contact with an upper surface of the first vibration sensor and a second end portion in contact with an upper surface of the second vibration sensor, and has a substantially L-shape; and a damping member affixed to the urging section.
摘要:
A heating apparatus for heating a target object W is provided with a plurality of heating light sources, including LED elements for applying heating light having a wavelength within a range from 360 to 520 nm to the object. Thus, a temperature of only the shallow surface of the object, such as a semiconductor wafer, is increased/reduced at a high speed in uniform temperature distribution, irrespective of the film type.
摘要:
Disclosed herein is a processing system that can supply a material gas produced inside a material reservoir tank into a processing apparatus while generating almost no pressure loss. The processing system has a processing apparatus including a gas injection injector for injecting a specific material gas into a processing vessel in order to provide specific processing to an object to be processed W, the material gas being produced from a metallic compound material M with low vapor pressure; and a gas supply system for supplying the specific material gas to the gas injector, the gas injector is a shower head portion and the gas supply system provides: a gas passage extending upwardly from the showerhead portion; a material reservoir tank attached to the upper-end portion of the gas passage for containing the metallic compound material therein; and an open/close valve for opening/closing the gas passage.