摘要:
A sputtering apparatus includes: a film forming chamber that houses a substrate hold so as to be capable of being carried in a horizontal direction; a sputtered particle ejecting section that includes an upper target and a lower target that are disposed so as to face each other and oblique to the substrate, and an opening, and in which sputtered particles are generated from a pair of the targets by plasma, and the sputtered particles are ejected from the opening to the substrate carried from a side adjacent to the upper target to another side adjacent to the lower target; and a slit member that has a slit through which the sputtered particles are selectively passed, and is disposed between the substrate and the sputtered particle ejecting section. The slit member is disposed so that a slit open end of the slit is positioned within 50 mm from an upstream open end of the opening of the sputtered particle ejecting section, and the slit open end is positioned at an upstream side in a carrying direction of the substrate.
摘要:
A method for manufacturing a liquid crystal device that includes forming an inorganic alignment layer by emitting an alignment film material that is made of an inorganic material in an oblique direction onto a substrate, and forming an organic alignment layer that is a monomolecular film made of an organic material chemically bonded with the inorganic alignment layer on a surface of the inorganic alignment layer by treating the surface of the inorganic alignment layer with a silane coupling agent that has an alkyl group, wherein a pretilt angle of a liquid crystal molecule is set to a desired angle by selecting the silane coupling agent by the number of carbon atoms.
摘要:
An execution sequence decision device is capable of efficiently and appropriately determining the execution sequence of processing modules even in a case where those have a closed circuit in the input/output dependencies. A dependence evaluation sub-unit and an anti dependence evaluation sub-unit evaluate the dependence and anti dependence of each processing module in a processing module group. A priority evaluation sub-unit determines the priority of each processing module in the processing module group based on the dependence and anti dependence. An execution order allocation sub-unit allocates the top of execution sequence to one processing module that has the highest priority obtained by the priority evaluation sub-unit. An execution sequence allocation unit causes the respective sub-units to repeatedly execute the above-mentioned process every time the order of execution sequence of one processing module is determined, and then sequentially allocates the orders of execution sequence to the respective processing modules.
摘要:
A power line carrier communication system includes a power line, a first communication device, a second communication device, the first and second communication devices being arranged on the power line and performing a communication via the power line, a storage section that stores information on a physical position of a first communication device, a detecting section that detects a communication state between the first and second communication devices, a relative position calculating section that calculates a relative position between the first and second communication devices based on the communication state, and an arithmetic operation section that calculates a physical position of the second communication device from the relative position and the information on the physical position of the first communication device stored in the storage section, and stores information on the calculated physical position of the second communication device into the storage section.
摘要:
A manufacturing apparatus for a liquid crystal device having a pair of substrates facing each other, an oriented film formed on an facing surface of at least one substrate in the pair of the substrates, and a liquid crystal held between the pair of substrates, includes: a film formation chamber; an evaporating section having an evaporation source, evaporating an inorganic material on the substrate in the film formation chamber by a physical vapor deposition, and forming an oriented film and a base film arranged under the oriented film; a base film formation area forming the base film and located substantially above the evaporation source in the film formation chamber; and an oriented film formation area located obliquely above the evaporation source in the film formation chamber, forming the oriented film and having a shielding plate having an elongated opening for selectively evaporating an inorganic material.
摘要:
A check-valved pouch has a main pouch body, and a check valve attached to the main pouch body. The main pouch body is formed of plastic film and defines an opening for receiving a substance. The check valve is formed of plastic film also, and includes a flat valve body defining an upper opening, with opposte sides and a lower end closed, and an inner passage for discharging gases toward the upper opening. A check piece formed of plastic film is disposed in an upper half of the valve body. The check valve further includes a porous filtering film disposed on one surface in a lower half of the valve body. The filtering film includes a filter surface, and a releasing film formed on the filter surface. The check valve is attached to the main pouch body, with the filtering film inserted into the main pouch body and the upper opening exposed to ambient air, whereby an interior of the main pouch body is communicable with an exterior through the filter surface, inner passage and upper opening.
摘要:
An execution sequence decision device is capable of efficiently and appropriately determining the execution sequence of processing modules even in a case where those have a closed circuit in the input/output dependencies. A dependence evaluation sub-unit and an anti dependence evaluation sub-unit evaluate the dependence and anti dependence of each processing module in a processing module group. A priority evaluation sub-unit determines the priority of each processing module in the processing module group based on the dependence and anti dependence. An execution order allocation sub-unit allocates the top of execution sequence to one processing module that has the highest priority obtained by the priority evaluation sub-unit. An execution sequence allocation unit causes the respective sub-units to repeatedly execute the above-mentioned process every time the order of execution sequence of one processing module is determined, and then sequentially allocates the orders of execution sequence to the respective processing modules.
摘要:
A manufacturing apparatus for a liquid crystal device having a pair of substrates facing each other, an oriented film formed on an facing surface of at least one substrate in the pair of the substrates, and a liquid crystal held between the pair of substrates, includes: a film formation chamber; an evaporating section having an evaporation source, evaporating an inorganic material on the substrate in the film formation chamber by a physical vapor deposition, and forming an oriented film and a base film arranged under the oriented film; a base film formation area forming the base film and located substantially above the evaporation source in the film formation chamber; and an oriented film formation area located obliquely above the evaporation source in the film formation chamber, forming the oriented film and having a shielding plate having an elongated opening for selectively evaporating an inorganic material.
摘要:
A power line carrier communication system includes a power line, a first communication device, a second communication device, the first and second communication devices being arranged on the power line and performing a communication via the power line, a storage section that stores information on a physical position of a first communication device, a detecting section that detects a communication state between the first and second communication devices, a relative position calculating section that calculates a relative position between the first and second communication devices based on the communication state, and an arithmetic operation section that calculates a physical position of the second communication device from the relative position and the information on the physical position of the first communication device stored in the storage section, and stores information on the calculated physical position of the second communication device into the storage section.
摘要:
A manufacturing apparatus for manufacturing an oriented film, comprising: a film formation chamber; an evaporation section having an evaporation source, evaporating an oriented film material on the substrate by a physical vapor deposition, and forming the oriented film in the film formation chamber; a shielding plate arranged between the evaporation section and the substrate, having an elongated opening for selectively evaporating the oriented film material, and covering an area of the substrate on which the oriented film is not formed; a transfer chamber connected to the film formation chamber via a gate valve; a storing chamber connected to the transfer chamber and storing an unused shielding plate; and a substituting device arranged in the transfer chamber and substituting the shielding plate arranged in the film formation chamber to the unused shielding plate stored in the storing chamber.