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    Ball Screw
    3.
    发明申请
    Ball Screw 审中-公开
    滚珠丝杠

    公开(公告)号：US20130220047A1

    公开(公告)日：2013-08-29

    申请号：US13879752

    申请日：2011-03-31

    申请人： Shouji Yokoyama ,  Koji Hashimoto ,  Toru Harada ,  Shingo Saitou

    发明人： Shouji Yokoyama ,  Koji Hashimoto ,  Toru Harada ,  Shingo Saitou

    IPC分类号： F16H25/22

    CPC分类号： F16H25/2214 ,  F16H25/2223 ,  Y10T74/19772

    摘要： A ball screw having a groove-shaped ball return passage has improved durability, ball circulation performance, and working performance. The ball screw is provided with: a threaded shaft having a spiral groove at its outer circumferential surface; a nut having a spiral groove which faces the spiral groove at its inner circumferential surface; a plurality of balls rotatably loaded in a spiral raceway constituted by the two spiral grooves; and a ball circulation groove which returns and circulates the balls from an end point to a start point of the raceway. Further, the edge portions constituted by the two side surfaces of the ball circulation groove and the surfaces which continue from the side surfaces and extend in the axial direction are formed to be rounded.

    摘要翻译： 具有槽形球返回通道的滚珠丝杠具有改进的耐久性，球循环性能和工作性能。 滚珠丝杠设有：螺纹轴，其外圆周表面具有螺旋槽; 螺母，其具有在其内周面处面对螺旋槽的螺旋槽; 可旋转地装载在由两个螺旋槽构成的螺旋滚道中的多个滚珠; 以及球循环槽，其使球从端点返回到滚道的起始点。 此外，由球循环槽的两个侧面构成的边缘部分和从侧面延伸并在轴向方向上延伸的表面形成为圆形。

    Method of Production of Nut for Ball Screw Use and Ball Screw
    4.
    发明申请
    Method of Production of Nut for Ball Screw Use and Ball Screw 审中-公开
    滚珠丝杠用螺母和滚珠丝杠的生产方法

    公开(公告)号：US20130139628A1

    公开(公告)日：2013-06-06

    申请号：US13643494

    申请日：2011-08-04

    申请人： Shouji Yokoyama ,  Shingo Saitou ,  Atsushi Watanabe ,  Koji Hashimoto

    发明人： Shouji Yokoyama ,  Shingo Saitou ,  Atsushi Watanabe ,  Koji Hashimoto

    IPC分类号： B23G1/48 ,  F16H25/22

    CPC分类号： B23G1/48 ,  B21J5/12 ,  B21J13/025 ,  B21K3/00 ,  B23G1/32 ,  B23P15/003 ,  F16H25/2214 ,  F16H25/2223 ,  F16H25/24 ,  Y10T29/49689 ,  Y10T74/19767

    摘要： A method forms ball recirculation and rolling grooves at an inner circumferential surface of a nut for ball screw use in a state free of deviation in axial, circumferential, and radial nut directions. A flange end face is formed with a concave part, then an inner circumferential surface of a blank and an end face and outer circumferential surface of the flange are continuously ground. Due to this, the coaxiality of the blank inner circumferential surface and the flange outer circumferential surface, and the perpendicularity of the flange end face to the blank inner circumferential surface, are made smaller. The blank is plastically worked to form the ball recirculation groove and is cut to form the ball rolling groove while using the concave part as a phase reference, the end face as an axial direction reference, and the outer circumferential surface as a radial direction reference.

    摘要翻译： 一种方法在用于滚珠丝杠使用的螺母的内圆周表面上形成滚珠再循环和滚动槽，该轴向，圆周和径向螺母方向上没有偏差。 凸缘端面形成有凹部，然后坯料的内周面和凸缘的端面和外周面连续接地。 由此，使坯件内周面和凸缘外周面的同轴度以及凸缘端面与坯料内周面的垂直度变小。 在将凹部作为相位基准，将端面作为轴向参考，将外周面作为径向基准的情况下，对坯料进行塑性加工以形成球再循环槽并切割以形成滚珠滚动槽。

    Ball screw apparatus
    5.
    发明申请
    Ball screw apparatus 有权
    滚珠丝杠装置

    公开(公告)号：US20070137344A1

    公开(公告)日：2007-06-21

    申请号：US11257101

    申请日：2005-10-25

    申请人： Shingo Saitou ,  Koji Hashimoto

    发明人： Shingo Saitou ,  Koji Hashimoto

    IPC分类号： F16H1/24

    CPC分类号： F16H25/2228 ,  F16H25/24 ,  F16H2025/2481 ,  Y10T74/19702 ,  Y10T74/19721 ,  Y10T74/19763

    摘要： A ball screw apparatus of a screw shaft circulating-type includes a nut having a first groove formed in an inner peripheral surface thereof, a screw shaft having a second groove formed in an outer peripheral surface thereof, and a plurality of rolling elements provided between the first and second grooves. A circulating groove is formed in the screw shaft so as to interconnect opposite ends in a spiral direction of the second groove of the screw shaft to form a closed-loop ball endless circulating passageway. Processing relief portions for preventing a processing tool of a rotary drive-type from interfering with the circulating groove when processing the second groove of the screw shaft by the processing tool are provided respectively at the opposite end portions in the spiral direction of the second groove of the screw shaft.

    摘要翻译： 螺旋轴循环式的滚珠丝杠装置包括：螺母，其具有形成在其内周面中的第一槽;螺旋轴，具有形成在其外周面中的第二槽;以及多个滚动元件， 第一和第二凹槽。 在螺杆轴上形成有循环槽，以使螺旋轴的第二槽的螺旋方向的相对端部相互连接，形成闭环球状的循环通路。 在第二槽的螺旋方向的相对端部分别设置用于防止旋转驱动型的加工工具与处理工具对螺杆轴的第二槽进行加工时的旋转驱动型的加工工具的冲击加工部 螺杆轴。

    Ball screw apparatus
    6.
    发明授权
    Ball screw apparatus 有权
    滚珠丝杠装置

    公开(公告)号：US07530282B2

    公开(公告)日：2009-05-12

    申请号：US11257101

    申请日：2005-10-25

    申请人： Shingo Saitou ,  Koji Hashimoto

    发明人： Shingo Saitou ,  Koji Hashimoto

    IPC分类号： F16H1/18

    CPC分类号： F16H25/2228 ,  F16H25/24 ,  F16H2025/2481 ,  Y10T74/19702 ,  Y10T74/19721 ,  Y10T74/19763

    摘要： A ball screw apparatus of a screw shaft circulating-type includes a nut having a first groove formed in an inner peripheral surface thereof, a screw shaft having a second groove formed in an outer peripheral surface thereof, and a plurality of rolling elements provided between the first and second grooves. A circulating groove is formed in the screw shaft so as to interconnect opposite ends in a spiral direction of the second groove of the screw shaft to form a closed-loop ball endless circulating passageway. Processing relief portions for preventing a processing tool of a rotary drive-type from interfering with the circulating groove when processing the second groove of the screw shaft by the processing tool are provided respectively at the opposite end portions in the spiral direction of the second groove of the screw shaft.

    摘要翻译： 螺旋轴循环式的滚珠丝杠装置包括：螺母，其具有形成在其内周面中的第一槽;螺母轴，具有形成在其外周面中的第二槽;以及多个滚动元件， 第一和第二凹槽。 在螺杆轴上形成有循环槽，以使螺旋轴的第二槽的螺旋方向的相对端部相互连接，形成闭环球状的循环通路。 在第二槽的螺旋方向的相对端部分别设置用于防止旋转驱动型的加工工具与处理工具对螺杆轴的第二槽进行加工时的旋转驱动型的加工工具的冲击加工部 螺杆轴。

    Ball Screw and Manufacturing Method of Nut for Ball Screw
    7.
    发明申请
    Ball Screw and Manufacturing Method of Nut for Ball Screw 审中-公开
    滚珠丝杠螺母和螺母的制造方法

    公开(公告)号：US20120325036A1

    公开(公告)日：2012-12-27

    申请号：US13581210

    申请日：2011-03-16

    申请人： Toru Harada ,  Koji Hashimoto ,  Tsuyoshi Ito ,  Tomofumi Yamashita ,  Naoya Aoki

    发明人： Toru Harada ,  Koji Hashimoto ,  Tsuyoshi Ito ,  Tomofumi Yamashita ,  Naoya Aoki

    IPC分类号： F16H25/22 ,  B21K1/70

    CPC分类号： B21K1/70 ,  B21J5/025 ,  B21J5/12 ,  B21J13/025 ,  B21K1/04 ,  B21K21/12 ,  B21K21/16 ,  B21K23/00 ,  F16H25/2223 ,  Y10T74/19767

    摘要： A ball screw is provided in which an outer circumferential formation is formed at a portion facing a ball circulating passage out of outer circumferential surface of a nut. The ball screw includes: a screw shaft having on its outer circumferential surface a screw groove; a nut having on its inner circumferential surface a screw groove facing the screw groove; a plurality of balls rollably loaded in a spiral ball rolling passage formed by both screw grooves; and a ball circulating passage to return the balls from a start point to an end point of the ball rolling passage for recirculation. The ball circulating passage is a concaved groove formed by concaving a groove on a part of the cylindrical inner circumferential surface of the nut by plastic working. Then, a flange is integrally provided at a portion facing the ball circulating passage and the screw groove.

    摘要翻译： 提供一种滚珠丝杠，其中在与螺母的外周面相对的面向球循环通道的部分处形成有外周部结构。 滚珠丝杠包括：螺杆轴，其外周面上具有螺纹槽; 螺母在其内周面上具有面向螺纹槽的螺纹槽; 可滚动地装载在由两个螺纹槽形成的螺旋滚珠滚动通道中的多个滚珠; 以及球循环通道，用于将球从起始点返回到球滚动通道的终点以用于再循环。 球循环通道是通过塑性加工在螺母的圆柱形内圆周表面的一部分上凹入凹槽而形成的凹槽。 然后，在面对球循环通道和螺纹槽的部分上一体地设有凸缘。

    Substrate processing device and substrate processing method
    9.
    发明授权
    Substrate processing device and substrate processing method 有权

    公开(公告)号：US09601357B2

    公开(公告)日：2017-03-21

    申请号：US14383817

    申请日：2012-09-07

    申请人： Koji Hashimoto ,  Masahiro Miyagi ,  Mitsukazu Takahashi

    发明人： Koji Hashimoto ,  Masahiro Miyagi ,  Mitsukazu Takahashi

    IPC分类号： C03C15/00 ,  H01L21/67 ,  H01L21/677

    CPC分类号： H01L21/6704 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/67751

    摘要： A substrate processing apparatus and method includes, a plate that has a size equal to or larger than a principal face of the substrate, and has a horizontal and flat liquid holding face opposing the principal face of the substrate from below. A processing liquid supply unit supplies a processing liquid to the liquid holding face. A control unit controls the processing liquid supply unit and a movement unit to supply the processing liquid to the liquid holding face to form a processing liquid film, a contact step of bringing the principal face of the substrate and the liquid holding face close to each other to bring the principal face of the substrate into contact with the processing liquid film, and a liquid contact maintenance step of maintaining the processing liquid in contact with the principal face of the substrate.

    Casing and assembling method of casing
    10.
    发明授权
    Casing and assembling method of casing 有权
    套管套管组装方法

    公开(公告)号：US09101066B2

    公开(公告)日：2015-08-04

    申请号：US13788855

    申请日：2013-03-07

    申请人： Isao Azumi ,  Koji Hashimoto

    发明人： Isao Azumi ,  Koji Hashimoto

    IPC分类号： H05K7/00 ,  H05K5/06 ,  H05K5/00

    CPC分类号： H05K5/069 ,  H05K5/0052 ,  H05K5/062 ,  Y10T29/49213

    摘要： An outer circumferential groove filled with a seal material and an opposing surface portion are provided to a fit portion of a case. A tray portion opposing the opposing surface portion and an outer circumferential protruding portion entering the outer circumferential groove are provided to the fit portion of a cover. Master dimensions are set so that an outer clearance A0 between the outer circumferential groove and the outer circumferential protruding portion is always larger than an inner clearance C0 between the former and the latter when center positions of the cover and the case coincide with each other.

    摘要翻译： 填充有密封材料的外周槽和相对的表面部分设置在壳体的配合部分。 在盖的配合部分设置有与相对表面部分相对的托盘部分和进入外周槽的外周突出部分。 设定主尺寸，使得当外壳和外周突出部之间的外部间隙A0总是大于前者与后者之间的内部间隙C0时，盖和壳体的中心位置彼此重合。