公开(公告)号：US5441076A

公开(公告)日：1995-08-15

申请号：US222589

申请日：1994-04-04

申请人： Shuji Moriya ,  Takenobu Matsuo ,  Tsuyoshi Wakabayashi ,  Kazutoshi Miura ,  Takahiro Mori

发明人： Shuji Moriya ,  Takenobu Matsuo ,  Tsuyoshi Wakabayashi ,  Kazutoshi Miura ,  Takahiro Mori

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/87885

摘要： A vertical heat treatment apparatus includes a heat treatment unit for performing a heat treatment process to a semiconductor wafer using a gas and a gas supply unit for supplying the gas to the heat treatment unit. The gas supply unit includes a plurality of gas controlling instruments having a plurality of gas flow control devices, a gas controlling instruments-storage vessel for storing the instruments, and a plurality of electrical parts arranged outside the storage vessel and belonging to the instruments, and an electrical parts-storage vessel for storing the electrical parts, and the plurality of gas flow control devices are integrated with each other by block-like joints.

摘要翻译： 立式热处理装置包括：热处理单元，用于使用气体和用于将气体供给到热处理单元的气体供给单元对半导体晶片进行热处理处理。 气体供给单元包括具有多个气体流量控制装置的多个气体控制装置，用于存储仪器的气体控制装置 - 储存容器，以及设置在存储容器外部并属于仪器的多个电气部件，以及 用于存储电气部件的电气部件存储容器，并且多个气体流量控制装置通过块状接头彼此一体化。

公开(公告)号：US20140191731A1

公开(公告)日：2014-07-10

申请号：US13821497

申请日：2012-09-04

申请人： Kazutoshi Miura

发明人： Kazutoshi Miura

IPC分类号： H02J7/00

CPC分类号： H02J7/0052 ,  H01M4/134 ,  H01M10/44 ,  H02J7/0073 ,  H02J7/0091 ,  Y02B40/90 ,  Y02E70/40

摘要： CCCV charging is applied to a lithium ion secondary battery. During CC charging, a transition point Ta appears in temperature rise gradient when battery temperature rises along with the charging, and with the transition point Ta being a border, a temperature rise gradient in an initial T1 period is steeper than a temperature rise gradient in a T2 period following the T1 period. Based on charging time tT corresponding to timing at which the transition point Ta appears after start of the CC charging from a condition of the SOC of 0%, changeover time ts is set in a range of tT≦ts≦(tT×1.2). The CC charging is performed at a first current value until changeover time tS elapses after its start, and after the changeover time ts elapses, the CC charging is performed with a second current value larger than the first current value.

摘要翻译： 将CCCV充电应用于锂离子二次电池。 在CC充电期间，当电池温度随着充电而升高时，转变点Ta出现在温度升高梯度中，并且随着转变点Ta为边界，初始T1周期中的温度升高梯度比在 T1期后T2期。 基于从0％的SOC开始的CC充电开始之后出现转变点Ta的定时的充电时间tT，切换时间ts设定在tT＆lt; nlE; ts＆nlE;（tT×1.2）的范围内。 CC充电以第一电流值进行，直到开始后经过切换时间tS，经过转换时间ts之后，以大于第一电流值的第二电流值进行CC充电。

公开(公告)号：US5274542A

公开(公告)日：1993-12-28

申请号：US841816

申请日：1992-02-26

申请人： Shigeru Tanaka ,  Kazutoshi Miura

发明人： Shigeru Tanaka ,  Kazutoshi Miura

IPC分类号： H02M1/08 ,  H02M7/06 ,  H02M7/12 ,  H02M7/48 ,  H02M7/521

CPC分类号： H02M7/487

摘要： A power inverter control device is designed to control a neutral point clamped power inverter apparatus including first to fourth self-extinction elements sequentially connected in series between two end terminals of a power supply having an intermediate terminal, four freewheeling diodes connected in parallel with the self-extinction elements in a direction opposite thereto, a series circuit of first and second clamping diodes, connected in parallel with a series circuit of the second and third self-extinction elements in a direction opposite thereto and having a node connected to the intermediate terminal of the power supply. The control device includes a circuit for generating a first PWM control signal having a pulse width corresponding to a load current, and a PWM control circuit for converting the first PWM control signal into a second PWM control signal having a pulse width equivalent to the sum of the pulse width of the first PWM control signal and a width corresponding to one of turn-on and turn-off periods of each of the self-extinction element, and supplying the second PWM control signal to the first to fourth self-extinction elements.

摘要翻译： 电力逆变器控制装置被设计成控制中性点钳位功率逆变器装置，其包括顺序地串联连接在具有中间端子的电源的两个端子之间的第一至第四自消除元件，与自身并联连接的四个续流二极管 在与其相反的方向上的消光元件，第一和第二钳位二极管的串联电路，与第二和第三自消除元件的串联电路在与其相反的方向并联连接，并且具有连接到第二和第二钳位二极管的中间端子的节点 电源。 该控制装置包括用于产生具有对应于负载电流的脉冲宽度的第一PWM控制信号的电路，以及PWM控制电路，用于将第一PWM控制信号转换成具有等于 第一PWM控制信号的脉冲宽度和对应于每个自消除元件的导通和关断周期之一的宽度，并将第二PWM控制信号提供给第一至第四自消光元件。

公开(公告)号：US06863732B2

公开(公告)日：2005-03-08

申请号：US10342261

申请日：2003-01-15

申请人： Takanobu Asano ,  Katsutoshi Ishii ,  Hiroyuki Yamamoto ,  George Hoshi ,  Kazutoshi Miura

发明人： Takanobu Asano ,  Katsutoshi Ishii ,  Hiroyuki Yamamoto ,  George Hoshi ,  Kazutoshi Miura

IPC分类号： C23C16/40 ,  C23C16/44 ,  C23C16/452 ,  C23C16/455 ,  C30B33/00 ,  H01L21/00 ,  C23C16/00 ,  F27B5/00

CPC分类号： C23C16/45561 ,  C23C16/401 ,  C23C16/452 ,  C23C16/4557 ,  C30B33/005 ,  H01L21/67109

摘要： The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an object to be treated is carried in a reaction vessel, which has been pressure-reduced to a predetermined degree of vacuum and the interior of which is heated to a predetermined process temperature, and a process gas is supplied into the reaction vessel via a gas feed passage to process the object.

摘要翻译： 本发明一般涉及用于对待处理物体进行热处理的热处理系统和方法。 特别地，本发明涉及一种热处理系统，其中待处理物体被运送在反应容器中，该反应容器被减压至预定的真空度并将其内部加热到预定的工艺温度，并且 处理气体经由供气通道供给到反应容器中以处理物体。

公开(公告)号：US5633788A

公开(公告)日：1997-05-27

申请号：US648396

申请日：1996-05-15

申请人： Shigeru Tanaka ,  Kazutoshi Miura

发明人： Shigeru Tanaka ,  Kazutoshi Miura

IPC分类号： H02M7/527 ,  H02M7/538 ,  H02M1/12

CPC分类号： H02M7/53803 ,  H02M7/527

摘要： A control system for a pulse-width modulation controlled power converter composed of self-turn-off devices. The control system includes a voltage command value generator for the power converter, a carrier wave generator and a circuit for correcting at least one of the voltage command value and the frequency of the carrier wave to generate as a corrected voltage command value and a corrected carrier wave. The control system further includes a gate pulse signal generator for receiving a first signal and a second signal and for comparing the first and second signals to generate gate pulse signals to the self-turn-off devices for controlling the power converter based on a comparison result. The voltage command value is taken as e (-1.ltoreq.e.ltoreq.+1), and a level setting value is taken as E.sub.a (0

摘要翻译： 一种由自关断装置组成的脉宽调制控制电力转换器的控制系统。 控制系统包括用于功率转换器的电压指令值发生器，载波发生器和用于校正电压指令值和载波频率中的至少一个以产生作为校正电压指令值和校正载波的电路 波。 控制系统还包括门脉冲信号发生器，用于接收第一信号和第二信号，并且用于比较第一和第二信号以产生门脉冲信号至自关断装置，用于基于比较结果控制功率转换器 。 将电压指令值作为e（-1 <= e

公开(公告)号：US07978433B2

公开(公告)日：2011-07-12

申请号：US12240691

申请日：2008-09-29

申请人： Kazutoshi Miura ,  Kiyoyuki Ito

发明人： Kazutoshi Miura ,  Kiyoyuki Ito

IPC分类号： G11B23/03

CPC分类号： G11B33/123

摘要： When a medium casing is properly inserted, a first pair of projections and a second pair of projections are passed through between a first bottom surface and a second bottom surface of a chassis in the moving direction and are thus prevented from coming into contact with the first and second bottom surfaces, thereby allowing for smooth insertion of the medium casing. In contrast, when the medium casing is inserted improperly from its wrong end, one of the projections on the lower surface of the medium casing comes into abutment with the second bottom surface of the chassis near the opening. Accordingly, an improperly inserted medium casing can be prevented from being inserted any further at an early stage of the insertion process.

摘要翻译： 当介质壳体被正确插入时，第一对突起和第二对突起在移动方向上穿过底盘的第一底表面和第二底表面之间，从而防止与第一对突起接触 和第二底面，从而允许介质壳体的平滑插入。 相反，当介质壳体从其错误的端部不正确地插入时，介质壳体的下表面上的一个突起与开口附近的底盘的第二底表面邻接。 因此，可以防止在插入过程的早期阶段进一步插入不正确插入的介质套管。

公开(公告)号：US07072578B2

公开(公告)日：2006-07-04

申请号：US11038283

申请日：2005-01-21

申请人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

发明人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

IPC分类号： H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

摘要翻译： 提供碳丝加热元件密封加热器。 其中，使用碳纤维的碳丝加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 / cm 3 或更少。

公开(公告)号：US06884295B2

公开(公告)日：2005-04-26

申请号：US09864374

申请日：2001-05-25

申请人： Katsutoshi Ishii ,  Kazutoshi Miura

发明人： Katsutoshi Ishii ,  Kazutoshi Miura

IPC分类号： H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  C23C16/00

CPC分类号： H01L21/0214 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02238 ,  H01L21/02249 ,  H01L21/02255 ,  H01L21/02271 ,  H01L21/3144 ,  H01L21/31662 ,  H01L21/3185

摘要： This invention is an oxynitride film forming method including: a reaction chamber heating step of heating a reaction chamber to a predetermined temperature, the reaction chamber containing an object to be processed; a gas heating step of heating a process gas to a temperature not lower than a reaction temperature at which an oxynitride film can be formed, the process gas consisting of dinitrogen oxide gas; and a film forming step of forming an oxynitride film on the object to be processed by supplying the heated process gas into the heated processing chamber. The temperature to which the reaction chamber is heated in the reaction chamber heating step is set at a temperature below a temperature at which the process gas undergoes a reaction.

摘要翻译： 本发明是一种氮氧化物膜形成方法，包括：将反应室加热到预定温度的反应室加热步骤，反应室包含待处理物体; 将处理气体加热到能够形成氮氧化物膜的反应温度以上的气体加热工序，由二氧化氮气体构成的工艺气体; 以及通过将加热的处理气体供给到加热处理室中而在被处理物上形成氮氧化物膜的成膜工序。 在反应室加热步骤中将反应室加热的温度设定在低于处理气体发生反应的温度的温度。

公开(公告)号：US06885814B2

公开(公告)日：2005-04-26

申请号：US10395395

申请日：2003-03-25

申请人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

发明人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

公开(公告)号：US06540509B2

公开(公告)日：2003-04-01

申请号：US09867564

申请日：2001-05-31

申请人： Takanobu Asano ,  Katsutoshi Ishii ,  Hiroyuki Yamamoto ,  George Hoshi ,  Kazutoshi Miura

发明人： Takanobu Asano ,  Katsutoshi Ishii ,  Hiroyuki Yamamoto ,  George Hoshi ,  Kazutoshi Miura

IPC分类号： F27B500

CPC分类号： C23C16/45561 ,  C23C16/401 ,  C23C16/452 ,  C23C16/4557 ,  C30B33/005 ,  H01L21/67109

摘要： The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an object to be treated is carried in a reaction vessel, which has been pressure-reduced to a predetermined degree of vacuum and the interior of which is heated to a predetermined process temperature, and a process gas is supplied into the reaction vessel via a gas feed passage to process the object.

摘要翻译： 本发明一般涉及用于对待处理物体进行热处理的热处理系统和方法。 特别地，本发明涉及一种热处理系统，其中待处理物体被运送在反应容器中，该反应容器被减压至预定的真空度并将其内部加热到预定的工艺温度，并且 处理气体经由供气通道供给到反应容器中以处理物体。