-
公开(公告)号：US06887339B1
公开(公告)日：2005-05-03
申请号：US09960227
申请日：2001-09-20
CPC分类号： H01J37/32183 , H01J37/32082 , H01J37/32174 , H03F1/565 , H03F2200/378 , H03F2200/387 , H03F2200/391 , H03H7/40
摘要： The invention features an RF plasma generator. The RF plasma generator includes a variable frequency RF generator, comprising an H-bridge and an RF output. The RF generator generates electromagnetic radiation having a power. The RF plasma generator further includes a matching network that includes at least one variable impedance component. The matching network also includes a first port that is electromagnetically coupled to the output of the RF generator and a second port. The RF plasma generator also includes a load that is electromagnetically coupled to the second port of the matching network, and a plasma chamber for containing a plasma having a power. The plasma chamber is electromagnetically coupled to the load and receives electromagnetic radiation having a power from the load. Adjusting at least one of the frequency of the RF generator and the variable impedance component in the matching network changes the power in the plasma.
摘要翻译： 本发明的特征在于RF等离子体发生器。 RF等离子体发生器包括可变频率RF发生器，其包括H桥和RF输出。 RF发生器产生具有电力的电磁辐射。 RF等离子体发生器还包括包括至少一个可变阻抗分量的匹配网络。 匹配网络还包括电磁耦合到RF发生器的输出端和第二端口的第一端口。 RF等离子体发生器还包括电磁耦合到匹配网络的第二端口的负载和用于容纳具有电力的等离子体的等离子体室。 等离子体室电磁耦合到负载并接收具有来自负载的电力的电磁辐射。 调整射频发生器的频率和匹配网络中的可变阻抗分量中的至少一个会改变等离子体的功率。
-
公开(公告)号：US07166816B1
公开(公告)日：2007-01-23
申请号：US10837912
申请日：2004-05-03
申请人： Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
发明人： Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
IPC分类号： B23K10/00
CPC分类号： H05H1/46 , H05H2001/4667 , H05H2001/4682
摘要： Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
摘要翻译： 用于解离气体的装置包括包含气体的等离子体室。 具有第一磁芯的第一变压器包围等离子体室的第一部分并且具有第一初级绕组。 具有第二磁芯的第二变压器包围等离子体室的第二部分并且具有第二初级绕组。 包括一个或多个切换半导体器件的第一固态AC开关电源耦合到第一电压源并且具有耦合到第一初级绕组的第一输出。 包括一个或多个开关半导体器件的第二固态AC开关电源耦合到第二电压源，并且具有耦合到第二初级绕组的第二输出。 第一固态交流开关电源驱动第一初级绕组中的第一交流电流。 第二固态交流开关电源驱动第二初级绕组中的第二交流电流。 第一AC电流和第二AC电流引起等离子体室内的组合AC电位，其直接形成环形等离子体，其完成变压器的次级电路并且解离气体。
-
公开(公告)号：US06815633B1
公开(公告)日：2004-11-09
申请号：US09804650
申请日：2001-03-12
申请人： Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
发明人： Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
IPC分类号： B23K1000
CPC分类号： H01J37/32009 , H01J27/16 , H01J37/321 , H01J37/32357 , H01J37/32862
摘要： Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
-
公开(公告)号：US08173986B2
公开(公告)日：2012-05-08
申请号：US12847468
申请日：2010-07-30
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译： 描述了用于产生红外辐射的红外光源和方法。 红外光源包括激光辐射源，靶和外壳。 目标位于激光辐射源的输出区域的路径中。 目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。 外壳定义了包含目标的空腔。 外壳包括在限定空腔的一侧的红外反射膜。
-
公开(公告)号：US20110127450A1
公开(公告)日：2011-06-02
申请号：US12847468
申请日：2010-07-30
IPC分类号： G01J3/10
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译： 描述了用于产生红外辐射的红外光源和方法。 红外光源包括激光辐射源，靶和外壳。 目标位于激光辐射源的输出区域的路径中。 目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。 外壳定义了包含目标的空腔。 外壳包括在限定空腔的一侧的红外反射膜。
-
公开(公告)号：US07238266B2
公开(公告)日：2007-07-03
申请号：US10313516
申请日：2002-12-06
CPC分类号： B01J19/088 , B01J2219/00164 , B01J2219/0894 , C01B7/20
摘要： The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.
摘要翻译： 本发明涉及氟的生成和再循环的设备和方法。 申请人认识到，单独使用或与等离子体发生器组合使用的氟分离器可以在其用于薄膜处理的点处产生足够量的氟。 氟分离器可以是冷凝器，膜分离装置，包含固体电解质的氟离子导体或其组合的形式。 在一些实施方案中，包含氟的反应产物通过氟分离器。 在其它实施方案中，分离的氟单独地或与另外的含氟原料结合使用到等离子体发生器。 氟分离器允许氟被再循环并且废物从系统中消除。
-
公开(公告)号：US20100231296A1
公开(公告)日：2010-09-16
申请号：US12786763
申请日：2010-05-25
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, JR. , Daniel Goodman , William M. Holber , John A. Smith
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, JR. , Daniel Goodman , William M. Holber , John A. Smith
IPC分类号： H03F1/08
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译： 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器 ，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。
-
公开(公告)号：US08633782B2
公开(公告)日：2014-01-21
申请号：US12786763
申请日：2010-05-25
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith
IPC分类号： H03H7/38
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译： 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器 ，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。
-
公开(公告)号：US07764140B2
公开(公告)日：2010-07-27
申请号：US11554979
申请日：2006-10-31
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith , Ilya Bystryak
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith , Ilya Bystryak
IPC分类号： H03H7/38
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译： 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器 ，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。
-
10.发明授权公开(公告)号：US08334505B2
公开(公告)日：2012-12-18
申请号：US12026799
申请日：2008-02-06
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/26
CPC分类号： G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
摘要： A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
摘要翻译： 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。
-
-
-
-
-
-
-
-
-
搜索结果
46 条记录 (耗时 0.028 秒)
