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公开(公告)号：US10923377B2
公开(公告)日：2021-02-16
申请号：US16592677
申请日：2019-10-03
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshimitsu Morihana
IPC: H01L21/677 , H01L21/67
Abstract: There is provided a load port provided to a loading/unloading port of a semiconductor-processing apparatus to transfer a semiconductor wafer, including: a FOUP support configured to support a FOUP that includes a FOUP lid and move the FOUP in a front-rear direction with respect to the loading/unloading port; a lid configured to open and close the loading/unloading port; a FOUP lid sensor provided to perform a detection operation between a position of the lid in a closed state and a position of the FOUP lid when unloading is normally completed by retreating the FOUP by a predetermined distance with respect to the loading/unloading port; and an observer configured to observe that the FOUP lid sensor has performed the detection operation after the unloading is completed.
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Patent Agency Ranking
公开(公告)号：US11139188B2
公开(公告)日：2021-10-05
申请号：US15961395
申请日：2018-04-24
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Yasushi Taniyama , Toshimitsu Morihana
IPC: H01L21/673 , H01L21/677
Abstract: A purging nozzle unit of a gas supply device according to the present invention including: a housing that is capable of passing a predetermined gas so as to replace the internal atmosphere of a FOUP with the predetermined gas; a nozzle coming into intimate contact with the proximity of a port that is provided on one face of the FOUP, the nozzle being pressed to thereby open the port; an operation adjustment space configured to increase or decrease so as to operate the nozzle between a use posture in which the predetermined gas can be supplied into the target container via the port and a standby posture in which the predetermined gas cannot be supplied into the target container via the port; and a gas introducing part configured to export or import compression air relative to the operation adjustment space to thereby control an operation of the nozzle.
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公开(公告)号：US09916997B2
公开(公告)日：2018-03-13
申请号：US15072823
申请日：2016-03-17
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Toshimitsu Morihana , Yuki Matsumoto , Mitsuo Natsume
IPC: H01L21/67 , H01L21/673
CPC classification number: H01L21/67393
Abstract: There is provided an end structure of a nozzle (11) including a gas-flow passage (13) communicable with an opening (104) provided through a bottom of a container (100) configured to contain an object, the nozzle (11) configured so that gas is injected into or discharged from the container (100) through the gas-flow passage (13) and the opening (104). The end structure includes a contact portion (19) provided at an upper end portion of the nozzle (11) and around the gas-flow passage (13), and the contact portion (19) is configured to be brought into contact with a contacted portion (103) provided around the opening (104). The contact portion (19) includes a flat portion (19b) and protruding portions (19a and 19c) each protruding upward relative to the flat portion (19b), and the flat portion (19b) is made of material softer than that of the protruding portions (19a and 19c).
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公开(公告)号：US20150308812A1
公开(公告)日：2015-10-29
申请号：US14689551
申请日：2015-04-17
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Mitsuo NATSUME , Masahiro Osawa , Toshimitsu Morihana , Mitsutoshi Ochiai
IPC: G01B11/00
CPC classification number: G01B11/002 , G01B11/14 , G01B11/22 , G01B11/24 , G01N21/64 , G01N35/1016 , G01N2035/1025 , H01L21/67265
Abstract: The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.
Abstract translation: 在具有沿左右水平方向延伸的光轴L1的映射传感器5的光投射部分5a和光接收部分5b之间的左右跨度布置成比开口的前开口的跨度窄 盒式录像带12是不同尺寸的容器中较小的一个传送到负载端口的盒式磁带12，并且映射传感器附接到映射装置4.附接有沿左右水平方向延伸的光轴L2的第一突出传感器6 到映射装置4，以在映射传感器5的移动方向上与映射传感器5分离。此外，提供具有在映射传感器5的上下移动方向上延伸的光轴的第二突起传感器7。
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5.发明申请公开(公告)号：US20180315632A1
公开(公告)日：2018-11-01
申请号：US15961395
申请日：2018-04-24
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Yasushi Taniyama , Toshimitsu Morihana
IPC: H01L21/673 , H01L21/677
Abstract: A purging nozzle unit of a gas supply device according to the present invention including: a housing that is capable of passing a predetermined gas so as to replace the internal atmosphere of a FOUP with the predetermined gas; a nozzle coming into intimate contact with the proximity of a port that is provided on one face of the FOUP, the nozzle being pressed to thereby open the port; an operation adjustment space configured to increase or decrease so as to operate the nozzle between a use posture in which the predetermined gas can be supplied into the target container via the port and a standby posture in which the predetermined gas cannot be supplied into the target container via the port; and a gas introducing part configured to export or import compression air relative to the operation adjustment space to thereby control an operation of the nozzle.
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公开(公告)号：US09239228B2
公开(公告)日：2016-01-19
申请号：US14689551
申请日：2015-04-17
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Mitsuo Natsume , Masahiro Osawa , Toshimitsu Morihana , Mitsutoshi Ochiai
CPC classification number: G01B11/002 , G01B11/14 , G01B11/22 , G01B11/24 , G01N21/64 , G01N35/1016 , G01N2035/1025 , H01L21/67265
Abstract: The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.
Abstract translation: 在具有沿左右水平方向延伸的光轴L1的映射传感器5的光投射部分5a和光接收部分5b之间的左右跨度布置成比开口的前开口的跨度窄 盒式录像带12是不同尺寸的容器中较小的一个传送到负载端口的盒式磁带12，并且映射传感器附接到映射装置4.附接有沿左右水平方向延伸的光轴L2的第一突出传感器6 到映射装置4，以在映射传感器5的移动方向上与映射传感器5分离。此外，提供具有在映射传感器5的上下移动方向上延伸的光轴的第二突起传感器7。
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