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公开(公告)号：US20150236196A1
公开(公告)日：2015-08-20
申请号：US14703767
申请日：2015-05-04
Applicant: Soraa Laser Diode, Inc.
Inventor： Nicholas J. Pfister , James W. Raring , Mathew Schmidt
CPC classification number: H01L33/0095 , H01L29/20 , H01L33/0075 , H01L33/32 , H01L2933/0066 , H01S5/0014 , H01S5/0202 , H01S5/0203 , H01S5/0421 , H01S5/2013 , H01S5/3013 , H01S5/3202 , H01S5/32341
Abstract: A method for forming optical devices. The method includes providing a gallium nitride substrate member having a crystalline surface region and a backside region. The method also includes subjecting the backside region to a laser scribing process to form a plurality of scribe regions on the backside region and forming a metallization material overlying the backside region including the plurality of scribe regions. The method removes at least one optical device using at least one of the scribe regions.
Abstract translation: 一种形成光学器件的方法。 该方法包括提供具有结晶表面区域和背面区域的氮化镓衬底构件。 该方法还包括使背面区域进行激光划线工艺以在背面区域上形成多个划线区域，并形成覆盖包括多个划线区域的背面区域的金属化材料。 该方法使用至少一个划线区域去除至少一个光学装置。
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Patent Agency Ranking
公开(公告)号：US09071039B2
公开(公告)日：2015-06-30
申请号：US14134244
申请日：2013-12-19
Applicant: Soraa Laser Diode, Inc.
Inventor： James W. Raring , Daniel F. Feezell , Nicholas J. Pfister , Rajat Sharma , Mathew C. Schmidt , Christiane Poblenz Elsass , Yu-Chia Chang
IPC: H01S5/00 , H01S5/22 , H01S5/02 , H01S5/343 , B82Y20/00 , H01L21/02 , H01S5/028 , H01S5/20 , H01S5/32
CPC classification number: H01S5/2201 , B82Y20/00 , H01L21/02389 , H01L21/02433 , H01L21/0254 , H01S5/0202 , H01S5/028 , H01S5/0287 , H01S5/2009 , H01S5/3202 , H01S5/34333
Abstract: An optical device includes a gallium nitride substrate member having an m-plane nonpolar crystalline surface region characterized by an orientation of about −1 degree towards (000-1) and less than about +/−0.3 degrees towards (11-20). The device also has a laser stripe region formed overlying a portion of the m-plane nonpolar crystalline orientation surface region. In a preferred embodiment, the laser stripe region is characterized by a cavity orientation that is substantially parallel to the c-direction, the laser stripe region having a first end and a second end. The device includes a first cleaved c-face facet, which is coated, provided on the first end of the laser stripe region. The device also has a second cleaved c-face facet, which is exposed, provided on the second end of the laser stripe region.
Abstract translation: 光学器件包括具有m面非极性晶体表面区域的氮化镓衬底构件，其特征在于朝向（000-1）约为-1度且朝向（11-20）小于约+/- 0.3度。 该器件还具有覆盖在m面非极性晶体取向表面区域的一部分上的激光条纹区域。 在优选实施例中，激光条纹区域的特征在于基本上平行于c方向的空腔取向，激光条纹区域具有第一端和第二端。 该装置包括被设置在激光条区域的第一端上的第一切割的c面小面。 该装置还具有暴露于激光条区域的第二端上的第二切割的c面刻面。
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公开(公告)号：US09786810B2
公开(公告)日：2017-10-10
申请号：US14703767
申请日：2015-05-04
Applicant: Soraa Laser Diode, Inc.
Inventor： Nicholas J. Pfister , James W. Raring , Mathew Schmidt
CPC classification number: H01L33/0095 , H01L29/20 , H01L33/0075 , H01L33/32 , H01L2933/0066 , H01S5/0014 , H01S5/0202 , H01S5/0203 , H01S5/0421 , H01S5/2013 , H01S5/3013 , H01S5/3202 , H01S5/32341
Abstract: A method for forming optical devices. The method includes providing a gallium nitride substrate member having a crystalline surface region and a backside region. The method also includes subjecting the backside region to a laser scribing process to form a plurality of scribe regions on the backside region and forming a metallization material overlying the backside region including the plurality of scribe regions. The method removes at least one optical device using at least one of the scribe regions.
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公开(公告)号：US20140295595A1
公开(公告)日：2014-10-02
申请号：US14134244
申请日：2013-12-19
Applicant: Soraa Laser Diode, Inc.
Inventor： James W. Raring , Daniel F. Feezell , Nicholas J. Pfister , Rajat Sharma , Mathew C. Schmidt , Christiane Poblenz Elsass , Yu-Chia Chang
CPC classification number: H01S5/2201 , B82Y20/00 , H01L21/02389 , H01L21/02433 , H01L21/0254 , H01S5/0202 , H01S5/028 , H01S5/0287 , H01S5/2009 , H01S5/3202 , H01S5/34333
Abstract: An optical device includes a gallium nitride substrate member having an m-plane nonpolar crystalline surface region characterized by an orientation of about −1 degree towards (000-1) and less than about +/−0.3 degrees towards (11-20). The device also has a laser stripe region formed overlying a portion of the m-plane nonpolar crystalline orientation surface region. In a preferred embodiment, the laser stripe region is characterized by a cavity orientation that is substantially parallel to the c-direction, the laser stripe region having a first end and a second end. The device includes a first cleaved c-face facet, which is coated, provided on the first end of the laser stripe region. The device also has a second cleaved c-face facet, which is exposed, provided on the second end of the laser stripe region.
Abstract translation: 光学器件包括具有m面非极性晶体表面区域的氮化镓衬底构件，其特征在于朝向（000-1）约为-1度且朝向（11-20）小于约+/- 0.3度。 该器件还具有覆盖在m面非极性晶体取向表面区域的一部分上的激光条纹区域。 在优选实施例中，激光条纹区域的特征在于基本上平行于c方向的空腔取向，激光条纹区域具有第一端和第二端。 该装置包括被设置在激光条区域的第一端上的第一切割的c面小面。 该装置还具有暴露于激光条区域的第二端上的第二切割的c面刻面。
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公开(公告)号：US20160006217A1
公开(公告)日：2016-01-07
申请号：US14736939
申请日：2015-06-11
Applicant: Soraa Laser Diode, Inc.
Inventor： James W. Raring , Daniel F. Feezell , Nicholas J. Pfister , Rajat Sharma , Mathew C. Schmidt , Christiane Poblenz Elsass , Yu-Chia Chang
CPC classification number: H01S5/2201 , B82Y20/00 , H01L21/02389 , H01L21/02433 , H01L21/0254 , H01S5/0202 , H01S5/028 , H01S5/0287 , H01S5/2009 , H01S5/3202 , H01S5/34333
Abstract: An optical device includes a gallium nitride substrate member having an m-plane nonpolar crystalline surface region characterized by an orientation of about −1 degree towards (000-1) and less than about +/−0.3 degrees towards (11-20). The device also has a laser stripe region formed overlying a portion of the m-plane nonpolar crystalline orientation surface region. In a preferred embodiment, the laser stripe region is characterized by a cavity orientation that is substantially parallel to the c-direction, the laser stripe region having a first end and a second end. The device includes a first cleaved c-face facet, which is coated, provided on the first end of the laser stripe region. The device also has a second cleaved c-face facet, which is exposed, provided on the second end of the laser stripe region.
Abstract translation: 光学器件包括具有m面非极性晶体表面区域的氮化镓衬底构件，其特征在于朝向（000-1）约为-1度且朝向（11-20）小于约+/- 0.3度。 该器件还具有覆盖在m面非极性晶体取向表面区域的一部分上的激光条纹区域。 在优选实施例中，激光条纹区域的特征在于基本上平行于c方向的空腔取向，激光条纹区域具有第一端和第二端。 该装置包括被设置在激光条区域的第一端上的第一切割的c面小面。 该装置还具有暴露于激光条区域的第二端上的第二切割的c面刻面。
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公开(公告)号：US09722398B2
公开(公告)日：2017-08-01
申请号：US14736939
申请日：2015-06-11
Applicant: Soraa Laser Diode, Inc.
Inventor： James W. Raring , Daniel F. Feezell , Nicholas J. Pfister , Rajat Sharma , Mathew C. Schmidt , Christiane Poblenz Elsass , Yu-Chia Chang
IPC: H01L21/00 , H01S5/22 , H01S5/02 , H01S5/028 , H01S5/20 , H01S5/32 , H01S5/343 , B82Y20/00 , H01L21/02
CPC classification number: H01S5/2201 , B82Y20/00 , H01L21/02389 , H01L21/02433 , H01L21/0254 , H01S5/0202 , H01S5/028 , H01S5/0287 , H01S5/2009 , H01S5/3202 , H01S5/34333
Abstract: An optical device includes a gallium nitride substrate member having an m-plane nonpolar crystalline surface region characterized by an orientation of about −1 degree towards (000-1) and less than about +/−0.3 degrees towards (11-20). The device also has a laser stripe region formed overlying a portion of the m-plane nonpolar crystalline orientation surface region. In a preferred embodiment, the laser stripe region is characterized by a cavity orientation that is substantially parallel to the c-direction, the laser stripe region having a first end and a second end. The device includes a first cleaved c-face facet, which is coated, provided on the first end of the laser stripe region. The device also has a second cleaved c-face facet, which is exposed, provided on the second end of the laser stripe region.
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