摘要:
A system and method for wafer level global bitmap characterization include determining chip level defect data bitmaps from a semiconductor wafer, and consolidating the chip level defect data bitmaps into a global wafer level bitmap that characterizes substantially the entire wafer failure configuration. The global wafer level bitmap is then analyzed and compared with other global wafer level bitmaps to develop correlations thereamong and develop global wafer level bitmap definitions for conducting at least one of wafer-to-wafer, boat-to-boat, and lot-to-lot process analysis based upon the global wafer level bitmap definitions.
摘要:
A tester information tester information processing system provides test equipment for generating test data. A markup language encoder connected to the test equipment encodes the test data for storage in an object-oriented database management system connected to the markup language encoder, and a user interface is operatively connected to the object-oriented database management system for retrieval of the test data.
摘要:
A method and system for fault isolation in semiconductor with devices thereon includes determining test data from a plurality of semiconductor devices and creating a failure bitmap of locations of the plurality of semiconductor devices and test data in a vector graphic CAD format. The vector graphic CAD format allows storage of test data on multiple layers.
摘要:
Methods are described for characterizing floating body delay effects in SOI wafers comprising providing a pulse edge to a floating body and a tied body chain in the wafer, storing tied body chain data according to one or more of the floating body devices, and characterizing the floating body delay effects according to the stored tied body chain data. Test apparatus are also described comprising a floating body chain including a plurality of series connected floating body inverters or NAND gates fabricated in the wafer and a tied body chain comprising a plurality of series connected tied body devices to in the wafer. Storage devices are coupled with the tied body devices and with one or more of the floating body devices and operate to store tied body chain data from the tied body devices according to one or more signals from floating body chain.