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1.发明申请Magnetic material for non-reactive process of granular perpendicular recording application 审中-公开磁性材料用于非反应过程的粒状垂直记录应用公开(公告)号：US20060051623A1
公开(公告)日：2006-03-09
申请号：US11247251
申请日：2005-10-12
申请人： Stella Wu , Thomas Nolan , Samuel Harkness , Rajiv Ranjan
发明人： Stella Wu , Thomas Nolan , Samuel Harkness , Rajiv Ranjan
CPC分类号： G11B5/65 , G11B5/656 , G11B5/66 , G11B5/851 , Y10T428/259
摘要： A magnetic recording medium having a substrate and a SiO2-containing magnetic layer comprising grains is disclosed. The magnetic layer has substantial SiO2 between the grains. This condition is achieved by sputter depositing the magnetic layer in a chamber containing a gas under vacuum. The gas contains substantially no oxygen. Such a gas is one into which no oxygen is intentionally introduced to create an oxygen-containing gas mixture but may contain a trace amount of oxygen molecules in an amount that are present in air under a similar vacuum as that of the gas in the chamber.
摘要翻译： 公开了一种具有基片和包含晶粒的含SiO 2磁性层的磁记录介质。 磁性层在晶粒之间具有相当大的SiO 2。 该条件通过在包含真空气体的室中溅射沉积磁性层来实现。 气体基本上不含氧气。 这种气体是没有有意地引入氧以产生含氧气体混合物的气体，但是可能含有微量氧气分子的量在与空气中的气体类似的真空下存在于空气中。
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2.发明申请Magnetic material for non-reactive process of granular perpendicular recording application 审中-公开磁性材料用于非反应过程的粒状垂直记录应用公开(公告)号：US20050095421A1
公开(公告)日：2005-05-05
申请号：US10698385
申请日：2003-11-03
申请人： Zhong Wu , Thomas Nolan , Samuel Harkness , Rajiv Ranjan
发明人： Zhong Wu , Thomas Nolan , Samuel Harkness , Rajiv Ranjan
CPC分类号： G11B5/65 , G11B5/656 , G11B5/66 , G11B5/851 , Y10T428/259
摘要： A magnetic recording medium having a substrate and a SiO2-containing magnetic layer comprising grains is disclosed. The magnetic layer has substantial SiO2 between the grains. This condition is achieved by sputter depositing the magnetic layer in a chamber containing a gas under vacuum. The gas contains substantially no oxygen. Such a gas is one into which no oxygen is intentionally introduced to create an oxygen-containing gas mixture but may contain a trace amount of oxygen molecules in an amount that are present in air under a similar vacuum as that of the gas in the chamber.
摘要翻译： 公开了一种具有基片和包含晶粒的含SiO 2磁性层的磁记录介质。 磁性层在晶粒之间具有相当大的SiO 2。 该条件通过在包含真空气体的室中溅射沉积磁性层来实现。 气体基本上不含氧气。 这种气体是没有有意地引入氧以产生含氧气体混合物的气体，但是可能含有微量氧气分子的量在与空气中的气体类似的真空下存在于空气中。
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3.发明申请Perpendicular magnetic recording media without soft magnetic underlayer and method of fabricating same 审中-公开无软磁性底层的垂直磁记录介质及其制造方法公开(公告)号：US20070237986A1
公开(公告)日：2007-10-11
申请号：US11399507
申请日：2006-04-07
申请人： Zhong (Stella) Wu , Samuel Harkness , Erol Girt , Qixu Chen , Thomas Nolan
发明人： Zhong (Stella) Wu , Samuel Harkness , Erol Girt , Qixu Chen , Thomas Nolan
IPC分类号： G11B5/66
CPC分类号： G11B5/7325 , G11B5/64 , G11B5/656
摘要： A perpendicular magnetic recording medium comprises a non-magnetic substrate having a planar surface and a stack of thin film layers overlying the substrate surface and including at least one perpendicular magnetic recording layer with a magnetic easy axis perpendicular to the plane of the layer stack, wherein a magnetically soft underlayer (“SUL”) is not present in the layer stack. The layer stack includes a first, amorphous and smooth-surfaced underlayer proximal the substrate surface, a second underlayer having a first crystallographic orientation overlying the first underlayer, a third underlayer having a second crystallographic orientation overlying the second underlayer, and at least one perpendicular magnetic recording layer having a crystallographic orientation similar to the second crystallographic orientation overlying the third underlayer.
摘要翻译： 垂直磁记录介质包括具有平坦表面的非磁性衬底和覆盖在衬底表面上的薄膜层堆叠，并且包括具有垂直于层堆叠平面的易磁化轴的至少一个垂直磁记录层，其中 层叠层中不存在磁软底层（“SUL”）。 所述层堆叠包括靠近所述衬底表面的第一非晶体和平滑表面的底层，具有覆盖所述第一底层的第一晶体取向的第二底层，具有覆盖所述第二底层的第二晶体取向的第三底层和至少一个垂直磁 记录层具有类似于覆盖第三底层的第二结晶取向的晶体取向。
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4.发明申请Method & apparatus for multi-stage sputter deposition of uniform thickness layers 有权用于均匀厚度层的多级溅射沉积的方法和装置公开(公告)号：US20050178651A1
公开(公告)日：2005-08-18
申请号：US10776203
申请日：2004-02-12
申请人： Rajiv Ranjan , Jeffrey Reiter , Thomas Nolan
发明人： Rajiv Ranjan , Jeffrey Reiter , Thomas Nolan
CPC分类号： G11B5/851 , C23C14/165 , C23C14/185 , C23C14/205 , C23C14/352 , C23C14/568
摘要： A method of forming a uniform thickness layer of a selected material on a surface of a substrate comprises steps of: (a) providing a multi-stage cathode sputtering apparatus comprising a group of spaced-apart cathode/target assemblies and a means for transporting at least one substrate/workpiece past each cathode/target assembly, each cathode/target assembly comprising a sputtering surface oriented substantially parallel to the first surface of the substrate during transport past the group of cathode/target assemblies, the group of cathode/target assemblies adapted for providing different angular sputtered film thickness profiles; and (b) transporting the substrate past each cathode/target assembly while providing different sputtered film thickness profiles from at least some of the cathode/target assemblies, such that a plurality of sub-layers is deposited on the surface of the substrate/workpiece which collectively form a uniform thickness layer of the selected material.
摘要翻译： 在衬底的表面上形成选定材料的均匀厚度层的方法包括以下步骤：（a）提供多级阴极溅射装置，其包括一组间隔开的阴极/靶组件和用于在 每个阴极/目标组件包括溅射表面，每个阴极/靶组件包括溅射表面，该溅射表面在输送通过阴极/靶组件组之前基本上平行于衬底的第一表面定向，该阴极/靶组件适于 用于提供不同的角溅射膜厚度轮廓; 并且（b）将衬底传送通过每个阴极/靶组件，同时从至少一些阴极/靶组件提供不同的溅射膜厚度分布，使得多个子层沉积在衬底/工件的表面上， 共同形成所选材料的均匀厚度层。
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5.发明申请公开(公告)号：US20050100764A1
公开(公告)日：2005-05-12
申请号：US10701418
申请日：2003-11-06
申请人： Rajiv Ranjan , Thomas Nolan
发明人： Rajiv Ranjan , Thomas Nolan
IPC分类号： B32B9/04 , B32B9/06 , B32B15/04 , C23C14/00 , C23C14/34 , C23C14/46 , C23C14/56 , G11B5/64 , G11B5/851
CPC分类号： G11B5/851 , C23C14/0036 , C23C14/0078 , C23C14/3464 , C23C14/56 , G11B5/656
摘要： A granular perpendicular magnetic recording medium, comprising: (a) a non-magnetic substrate having a surface; and (b) a layer stack on the substrate surface, the layer stack including a granular perpendicular magnetic recording layer formed by: (1) reactively sputtering a target comprised of a magnetic alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element; and (2) oxidizing an exposed upper surface of the granular perpendicular magnetic recording layer by generating a plasma containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element and treating the exposed upper surface of the granular perpendicular magnetic recording layer with the plasma.
摘要翻译： 一种粒状垂直磁记录介质，包括：（a）具有表面的非磁性基底; （b）基板表面上的层叠体，所述层叠体包括粒状垂直磁记录层，其通过以下步骤形成：（1）在包含至少一种离子化氧的物质的气氛中反应性地溅射由磁性合金构成的靶 源气体由氧化合物和至少一种其它非金属元素构成; 和（2）通过产生等离子体来氧化粒状垂直磁记录层的暴露的上表面，所述等离子体包含至少一种源自由氧化合物和至少一种其它非金属元素组成的源气体的离子化氧， 用等离子体暴露出粒状垂直磁记录层的上表面。
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6.发明申请Erasure-resistant perpendicular magnetic recording media, systems & method of manufacturing same 审中-公开耐蚀垂直磁记录介质，制造方法及制造方法公开(公告)号：US20060146445A1
公开(公告)日：2006-07-06
申请号：US11028224
申请日：2005-01-04
申请人： Thomas Nolan , Samuel Harkness , Chunghee Chang , Jianping Chen
发明人： Thomas Nolan , Samuel Harkness , Chunghee Chang , Jianping Chen
CPC分类号： G11B5/1278 , G11B5/667 , G11B5/82 , G11B2005/0029
摘要： A perpendicular magnetic recording medium adapted for use with a single-pole magnetic transducer head comprises a non-magnetic substrate having a surface, and a layer stack formed over the substrate surface, comprising, in overlying sequence from the substrate surface: (i) a magnetically soft underlayer (SUL) having a magnetic saturation value Ms and a thickness t; (ii) at least one non-magnetic interlayer; and (iii) at least one magnetically hard perpendicular recording layer; wherein the product Mst of the SUL is selected to have a minimum value which provides a desired amount of head field channeling but is sufficiently large to provide a desired reduction of erasure of written bits.
摘要翻译： 适于与单极磁换能器头一起使用的垂直磁记录介质包括具有表面的非磁性衬底和形成在衬底表面上的层叠层，其以衬底表面的顺序包括：（i） 磁性软底层（SUL）具有磁饱和值M S和厚度t; （ii）至少一个非磁性中间层; 和（iii）至少一个磁性硬的垂直记录层; 其中SUL的乘积M t被选择为具有提供期望量的磁头场通道的最小值，但是足够大以提供写入位的擦除的期望的减少。
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公开(公告)号：US20070064345A1
公开(公告)日：2007-03-22
申请号：US11231796
申请日：2005-09-22
申请人： Thomas Nolan , Samuel Harkness
发明人： Thomas Nolan , Samuel Harkness
IPC分类号： G11B5/74
摘要： A magnetic recording medium having a substrate, a first magnetic layer and a second magnetic layer, in this order, wherein an exchange coupling in the first magnetic layer is lower than an exchange coupling in the second magnetic layer, and the first and second magnetic layers are in a film stack so that magnetic grains in the first magnetic layer are exchange coupled by a pathway through the second magnetic layer is disclosed. A method of manufacturing a magnetic recording medium by obtaining a substrate, depositing a first magnetic layer at a first sputter gas pressure and depositing a second magnetic layer at a second sputter gas pressure, in this order, wherein the first sputter gas pressure is higher than the second sputter gas pressure, and an exchange coupling in the first magnetic layer is lower than an exchange coupling in the second magnetic layer is also disclosed.
摘要翻译： 一种具有基板，第一磁性层和第二磁性层的磁记录介质，其中第一磁性层中的交换耦合低于第二磁性层中的交换耦合，第一和第二磁性层 公开了通过第二磁性层的路径将第一磁性层中的磁性颗粒交换耦合的薄膜叠层。 一种通过获得衬底制造磁记录介质的方法，以第一溅射气体压力沉积第一磁性层并以第二溅射气体压力沉积第二磁性层，其中第一溅射气体压力高于 第二溅射气体压力和第一磁性层中的交换耦合也低于第二磁性层中的交换耦合。
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8.发明申请Magnetic recording media with tuned exchange coupling and method for fabricating same 有权具有调谐交换耦合的磁记录介质及其制造方法公开(公告)号：US20060024432A1
公开(公告)日：2006-02-02
申请号：US10902956
申请日：2004-08-02
申请人： Thomas Nolan , Samuel Harkness
发明人： Thomas Nolan , Samuel Harkness
摘要： A magnetic recording medium with tuned exchange coupling comprises: (a) a non-magnetic substrate having a surface; and (b) a stack of thin film layers on the substrate surface, including: (i) a compositionally segregated, exchange decoupled magnetic layer with substantially non-magnetic grain boundaries; and (ii) an exchange coupled magnetic layer adjacent to and in direct contact with the exchange decoupled magnetic layer.
摘要翻译： 具有调谐交换耦合的磁记录介质包括：（a）具有表面的非磁性基底; 和（b）衬底表面上的一叠薄膜层，包括：（i）具有基本上非磁性晶界的成分分离的交换去耦磁性层; 和（ii）与交换去耦磁性层相邻并直接接触的交换耦合磁性层。
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公开(公告)号：US09343273B2
公开(公告)日：2016-05-17
申请号：US12238279
申请日：2008-09-25
申请人： Thomas Nolan
发明人： Thomas Nolan
CPC分类号： H01J37/32715 , C23C14/50 , Y10T29/49826
摘要： A substrate holder for a substrate including a frame body having an opening for the placement of the substrate. The frame body also includes a hollow portion therein. The substrate holder may be used in a sputtering apparatus for sputtering material onto the substrate. The substrate holder is particularly advantageous in the manufacturing of magnetic recording medium.
摘要翻译： 一种用于衬底的衬底保持器，包括具有用于放置衬底的开口的框体。 框架体还包括其中的中空部分。 衬底保持器可用于将溅射材料溅射到衬底上的溅射装置中。 衬底保持器在制造磁记录介质方面特别有利。
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10.发明申请Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting 有权使用表面钝化和/或氧化物层生长来清洁衬底以防止点蚀的方法公开(公告)号：US20110306210A1
公开(公告)日：2011-12-15
申请号：US12070620
申请日：2008-02-19
申请人： Ismail Kashkoush , Thomas Nolan , Dennis Nemeth , Richard Novak
发明人： Ismail Kashkoush , Thomas Nolan , Dennis Nemeth , Richard Novak
IPC分类号： H01L21/306 , H01L21/304
CPC分类号： H01L21/02052
摘要： A process/method for cleaning wafers that eliminates and/or reduces pitting caused by standard clean 1 by performing a pre-etch and then passivating the wafer surface prior to the application of the standard clean 1. The process/method may be especially useful for advanced front end of line post-CPM cleaning. In one embodiment, the invention is a method of processing a substrate comprising: a) providing at least one substrate; b) etching a surface of the substrate by applying an etching solution; c) passivating the etched surface of the substrate by applying ozone; and d) cleaning the passivated surface of the substrate by applying an aqueous solution comprising ammonium hydroxide and hydrogen peroxide.
摘要翻译： 用于清洁晶片的方法/方法，其通过在施加标准清洁剂1之前执行预蚀刻然后钝化晶片表面来消除和/或减少由标准清洁1引起的点蚀。该方法/方法可能特别适用于 高级前端线后CPM清洗。 在一个实施例中，本发明是一种处理衬底的方法，包括：a）提供至少一个衬底; b）通过施加蚀刻溶液蚀刻所述基板的表面; c）通过施加臭氧钝化衬底的蚀刻表面; 以及d）通过施加包含氢氧化铵和过氧化氢的水溶液来清洁基材的钝化表面。
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