Staggered Vertical Comb Drive Fabrication Method
    1.
    发明申请
    Staggered Vertical Comb Drive Fabrication Method 有权
    交错垂直梳齿驱动制造方法

    公开(公告)号:US20070241076A1

    公开(公告)日:2007-10-18

    申请号:US11733821

    申请日:2007-04-11

    IPC分类号: C23F1/00

    摘要: The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

    摘要翻译: 本发明涉及一种制造具有松弛横向对准公差的交错垂直梳驱动致动器的方法。 首先使用自对准的双层掩模从前侧蚀刻晶片的器件层,以限定移动和静止梳状物的指状指状物。 第二蚀刻步骤用于通过选择性地去除它们的顶部部分来垂直变薄两组手指之一。 然后将晶片的前侧结合到载体晶片。 然后从器件层的背面选择性地蚀刻晶片,以便去除第二组指状物的下部,由此形成具有垂直偏移的指状物的交错的移动和静止梳。

    Staggered vertical comb drive fabrication method
    2.
    发明授权
    Staggered vertical comb drive fabrication method 有权
    交错垂直梳驱动制造方法

    公开(公告)号:US07357874B2

    公开(公告)日:2008-04-15

    申请号:US11733821

    申请日:2007-04-11

    IPC分类号: C23F1/00

    摘要: The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

    摘要翻译: 本发明涉及一种制造具有松弛横向对准公差的交错垂直梳驱动致动器的方法。 首先使用自对准的双层掩模从前侧蚀刻晶片的器件层,以限定移动和静止梳状物的指状指状物。 第二蚀刻步骤用于通过选择性地去除它们的顶部部分来垂直变薄两组手指之一。 然后将晶片的前侧结合到载体晶片。 然后从器件层的背面选择性地蚀刻晶片,以便去除第二组指状物的下部,由此形成具有垂直偏移的指状物的交错的移动和静止梳。

    System and method for collecting, transferring and managing quality control data
    4.
    发明授权
    System and method for collecting, transferring and managing quality control data 有权
    收集,传输和管理质量控制数据的系统和方法

    公开(公告)号:US08230005B2

    公开(公告)日:2012-07-24

    申请号:US12322189

    申请日:2009-01-30

    IPC分类号: G06F15/16

    CPC分类号: H04L67/025 H04L67/125

    摘要: The information system and method for collecting, transferring and administrating quality control data, and particularly HACCP data disclosed allows bi-directional communication between a plurality of remote wireless measurement devices and a central web server through a local com/data link. The com/data link provides wireless communication with the various measurement devices and communication with the web server via an Internet connection. An Internet based database and website interface provides centralized data storage and easily accessible data management and analysis. Administrator/users can access and manage the data from any location or device with Internet connectivity. The measurement devices allow their operation and functions to be configured and reconfigured by uploading customized device “data packets” into the devices system memory. The Internet-based user interface allows administrator/users to remotely customize and modify these “data packets” for each individual measurement device to suit each specific application. The bi-directional communication between the various wireless measurement devices and the web server allows administrator/users to reconfigure each individual measurement device remotely through an Internet-based user interface.

    摘要翻译: 用于收集,传送和管理质量控制数据的信息系统和方法,特别是公开的HACCP数据允许多个远程无线测量设备和中央web服务器之间通过本地com /数据链路进行双向通信。 com /数据链路提供与各种测量设备的无线通信以及通过因特网连接与web服务器的通信。 基于互联网的数据库和网站界面提供集中的数据存储和易于访问的数据管理和分析。 管理员/用户可以从具有Internet连接的任何位置或设备访问和管理数据。 测量设备允许通过将定制的设备“数据包”上传到设备系统存储器中来配置和重新配置它们的操作和功能。 基于互联网的用户界面允许管理员/用户对每个单独的测量设备进行远程定制和修改这些“数据包”,以适应每个特定的应用。 各种无线测量设备和Web服务器之间的双向通信允许管理员/用户通过基于互联网的用户界面远程重新配置每个单独的测量设备。

    Reusable cable joint cover
    10.
    发明授权
    Reusable cable joint cover 失效
    可重复使用的电缆接头盖

    公开(公告)号:US4902856A

    公开(公告)日:1990-02-20

    申请号:US130574

    申请日:1987-12-09

    申请人: John M. Miller

    发明人: John M. Miller

    摘要: A cable joint cover for protecting a cable joint consisting of a hollow sleeve, and two endcaps which can be permanently sealed to the cables. One endcap is of smaller diameter than the sleeve so that the sleeve can slide over that endcap to expose the joint.

    摘要翻译: 用于保护由中空套管组成的电缆接头的电缆接头盖和可以永久地密封到电缆的两个端盖。 一个端盖的直径小于套筒,使得套筒可以在该端盖上滑动以暴露接头。