公开(公告)号：US09005697B2

公开(公告)日：2015-04-14

申请号：US11866617

申请日：2007-10-03

申请人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

发明人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

IPC分类号： B05D7/00 ,  H01L27/12 ,  C30B13/24 ,  C30B29/06 ,  H01L21/20

CPC分类号： H01L21/02678 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L27/1229 ,  H01L27/1285 ,  H01L27/1296 ,  Y10T428/24273

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; forming a gate insulating layer on the polysilicon layer; forming a plurality of gate lines on the gate insulating layer; forming a first interlayer insulating layer on the gate lines; forming a plurality of data lines on the first interlayer insulating layer; forming a second interlayer insulating layer on the data lines; and forming a plurality of pixel electrodes on the second interlayer insulating layer, wherein the mask comprises a plurality of transmitting areas and a plurality of blocking areas arranged in a mixed manner.

摘要翻译： 提供一种制造薄膜晶体管阵列面板的方法，其包括：在绝缘衬底上沉积非晶硅层; 通过使用掩模的多个激光照射将非晶硅层转化为多晶硅层; 在所述多晶硅层上形成栅极绝缘层; 在所述栅极绝缘层上形成多个栅极线; 在栅极线上形成第一层间绝缘层; 在所述第一层间绝缘层上形成多条数据线; 在数据线上形成第二层间绝缘层; 以及在所述第二层间绝缘层上形成多个像素电极，其中所述掩模包括以混合方式布置的多个透射区域和多个阻挡区域。

公开(公告)号：US07223504B2

公开(公告)日：2007-05-29

申请号：US10993648

申请日：2004-11-19

申请人： Su-Gyeong Lee ,  Hyun-Jae Kim ,  Myung-Koo Kang

发明人： Su-Gyeong Lee ,  Hyun-Jae Kim ,  Myung-Koo Kang

IPC分类号： G03F1/00

CPC分类号： H01L21/0268 ,  B23K26/066 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L29/66757

摘要： A crystallization mask for laser illumination for converting amorphous silicon into polysilicon is provided, which includes: a plurality of transmissive areas having a plurality of first slits for adjusting energy of the laser illumination passing through the mask; and an opaque area.

摘要翻译： 提供了一种用于将非晶硅转化为多晶硅的激光照明的结晶掩模，其包括：具有多个第一狭缝的多个透射区域，用于调节穿过掩模的激光照射的能量; 和不透明区域。

公开(公告)号：US07691545B2

公开(公告)日：2010-04-06

申请号：US11523932

申请日：2006-09-19

申请人： Su-Gyeong Lee ,  Hyun-Jae Kim ,  Myung-Koo Kang

发明人： Su-Gyeong Lee ,  Hyun-Jae Kim ,  Myung-Koo Kang

IPC分类号： G03F1/00

CPC分类号： H01L21/0268 ,  B23K26/066 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L29/66757

摘要： A crystallization mask for laser illumination for converting amorphous silicon into polysilicon is provided, which includes: a plurality of transmissive areas having a plurality of first slits for adjusting energy of the laser illumination passing through the mask; and an opaque area.

摘要翻译： 提供了一种用于将非晶硅转化为多晶硅的激光照明的结晶掩模，其包括：具有多个第一狭缝的多个透射区域，用于调节穿过掩模的激光照射的能量; 和不透明区域。

公开(公告)号：US20080115718A1

公开(公告)日：2008-05-22

申请号：US11866617

申请日：2007-10-03

申请人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

发明人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

IPC分类号： C30B28/08 ,  B32B3/10

CPC分类号： H01L21/02678 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L27/1229 ,  H01L27/1285 ,  H01L27/1296 ,  Y10T428/24273

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; forming a gate insulating layer on the polysilicon layer; forming a plurality of gate lines on the gate insulating layer; forming a first interlayer insulating layer on the gate lines; forming a plurality of data lines on the first interlayer insulating layer; forming a second interlayer insulating layer on the data lines; and forming a plurality of pixel electrodes on the second interlayer insulating layer, wherein the mask comprises a plurality of transmitting areas and a plurality of blocking areas arranged in a mixed manner.

摘要翻译： 提供一种制造薄膜晶体管阵列面板的方法，其包括：在绝缘衬底上沉积非晶硅层; 通过使用掩模的多个激光照射将非晶硅层转化为多晶硅层; 在所述多晶硅层上形成栅极绝缘层; 在所述栅极绝缘层上形成多个栅极线; 在栅极线上形成第一层间绝缘层; 在所述第一层间绝缘层上形成多条数据线; 在数据线上形成第二层间绝缘层; 以及在所述第二层间绝缘层上形成多个像素电极，其中所述掩模包括以混合方式布置的多个透射区域和多个阻挡区域。

公开(公告)号：US07879700B2

公开(公告)日：2011-02-01

申请号：US10547070

申请日：2004-02-24

申请人： Ui-Jin Chung ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang ,  Hyun-Jae Kim

发明人： Ui-Jin Chung ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang ,  Hyun-Jae Kim

IPC分类号： H01L21/322 ,  H01L21/428

CPC分类号： B23K26/0676 ,  B23K26/06 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/066 ,  B23K26/067 ,  B23K26/0732 ,  B23K2101/40 ,  H01L21/02532 ,  H01L21/0268 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/268 ,  H01L27/1285

摘要： A silicon crystallization system includes a beam generator generating a laser beam, first and second optical units for controlling the laser beam from the beam generator; and a stage for mounting a panel including an amorphous silicon layer to be polycrystallized by the laser beam from the optical units. The first optical unit makes the laser beam have a transverse edge and a longitudinal edge longer than the transverse edge, and the second optical unit makes the laser beam have a transverse edge and a longitudinal edge shorter than the transverse edge.

摘要翻译： 硅结晶系统包括产生激光束的光束发生器，用于控制来自光束发生器的激光束的第一和第二光学单元; 以及用于安装包括由来自光学单元的激光束多晶化的非晶硅层的面板的台。 第一光学单元使得激光束具有比横向边缘长的横向边缘和纵向边缘，并且第二光学单元使得激光束具有比横向边缘更短的横向边缘和纵向边缘。

公开(公告)号：US20070042575A1

公开(公告)日：2007-02-22

申请号：US10549334

申请日：2004-03-12

申请人： Su-Gyeong Lee ,  Dong-Byum Kim ,  Myung-Koo Kang ,  Ui-Jin Chung ,  Hyun-Jae Kim

发明人： Su-Gyeong Lee ,  Dong-Byum Kim ,  Myung-Koo Kang ,  Ui-Jin Chung ,  Hyun-Jae Kim

IPC分类号： H01L21/20 ,  H01L21/36

CPC分类号： H01L21/02675 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/0673 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/2026 ,  H01L21/268

摘要： A plurality laser beams generated by a plurality of beam generators are synthesized by a beam synthesizer. The synthesized beam is splitted into a plurality of beamlets and provided for a plurality of optical units controlling the beamlets. Each beamlet controlled by each optical unit is illuminated onto an amorphous silicon layer deposited on a substrate that is mounted on a plurality of stages to be polycrystallized.

摘要翻译： 由多个光束发生器产生的多个激光束由光束合成器合成。 合成的光束被分裂成多个子束并且被设置用于控制子束的多个光学单元。 由每个光学单元控制的每个子束被照射到沉积在基板上的非晶硅层上，所述非晶硅层安装在多个阶段上以进行多晶化。

公开(公告)号：US20060148165A1

公开(公告)日：2006-07-06

申请号：US10547070

申请日：2004-02-24

申请人： Ui-Jin Chung ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang ,  Hyun-Jae Kim

发明人： Ui-Jin Chung ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang ,  Hyun-Jae Kim

IPC分类号： H01L21/8238

CPC分类号： B23K26/0676 ,  B23K26/06 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/066 ,  B23K26/067 ,  B23K26/0732 ,  B23K2101/40 ,  H01L21/02532 ,  H01L21/0268 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/268 ,  H01L27/1285

摘要： A silicon crystallization system includes a beam generator generating a laser beam, first and second optical units for controlling the laser beam from the beam generator; and a stage for mounting a panel including an amorphous silicon layer to be polycrystallized by the laser beam from the optical units. The first optical unit makes the laser beam have a transverse edge and a longitudinal edge longer than the transverse edge, and the second optical unit makes the laser beam have a transverse edge and a longitudinal edge shorter than the transverse edge.

摘要翻译： 硅结晶系统包括产生激光束的光束发生器，用于控制来自光束发生器的激光束的第一和第二光学单元; 以及用于安装包括由来自光学单元的激光束多晶化的非晶硅层的面板的台。 第一光学单元使得激光束具有比横向边缘长的横向边缘和纵向边缘，并且第二光学单元使得激光束具有比横向边缘更短的横向边缘和纵向边缘。

公开(公告)号：US06906349B2

公开(公告)日：2005-06-14

申请号：US10752510

申请日：2004-01-08

申请人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

发明人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

IPC分类号： H01L51/50 ,  G09F9/30 ,  H01L21/00 ,  H01L21/20 ,  H01L21/336 ,  H01L21/77 ,  H01L21/84 ,  H01L27/01 ,  H01L27/08 ,  H01L27/12 ,  H01L27/32 ,  H01L29/04 ,  H01L29/786 ,  H01L29/788 ,  H01L31/036 ,  H01L31/0392 ,  H01L31/20 ,  H05B33/14

CPC分类号： H01L21/02678 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L27/1229 ,  H01L27/1285 ,  H01L27/1296 ,  Y10T428/24273

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; forming a gate insulating layer on the polysilicon layer; forming a plurality of gate lines on the gate insulating layer; forming a first interlayer insulating layer on the gate lines; forming a plurality of data lines on the first interlayer insulating layer; forming a second interlayer insulating layer on the data lines; and forming a plurality of pixel electrodes on the second interlayer insulating layer, wherein the mask comprises a plurality of transmitting areas and a plurality of blocking areas arranged in a mixed manner.

公开(公告)号：US07294857B2

公开(公告)日：2007-11-13

申请号：US11048726

申请日：2005-02-03

申请人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

发明人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

IPC分类号： H01L29/04

CPC分类号： H01L21/02678 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L27/1229 ,  H01L27/1285 ,  H01L27/1296 ,  Y10T428/24273

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; forming a gate insulating layer on the polysilicon layer; forming a plurality of gate lines on the gate insulating layer; forming a first interlayer insulating layer on the gate lines; forming a plurality of data lines on the first interlayer insulating layer; forming a second interlayer insulating layer on the data lines; and forming a plurality of pixel electrodes on the second interlayer insulating layer, wherein the mask comprises a plurality of transmitting areas and a plurality of blocking areas arranged in a mixed manner.

摘要翻译： 提供一种制造薄膜晶体管阵列面板的方法，其包括：在绝缘衬底上沉积非晶硅层; 通过使用掩模的多个激光照射将非晶硅层转化为多晶硅层; 在所述多晶硅层上形成栅极绝缘层; 在所述栅极绝缘层上形成多个栅极线; 在所述栅极线上形成第一层间绝缘层; 在所述第一层间绝缘层上形成多条数据线; 在数据线上形成第二层间绝缘层; 以及在所述第二层间绝缘层上形成多个像素电极，其中所述掩模包括以混合方式布置的多个透射区域和多个阻挡区域。

公开(公告)号：US20070015069A1

公开(公告)日：2007-01-18

申请号：US11523932

申请日：2006-09-19

申请人： Su-Gyeong Lee ,  Hyun-Jae Kim ,  Myung-Koo Kang

发明人： Su-Gyeong Lee ,  Hyun-Jae Kim ,  Myung-Koo Kang

IPC分类号： C30B28/02 ,  C30B28/08 ,  C30B21/04 ,  C30B5/00 ,  G03F1/00 ,  C30B13/00 ,  C30B3/00 ,  C30B1/00

CPC分类号： H01L21/0268 ,  B23K26/066 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L29/66757

摘要： A crystallization mask for laser illumination for converting amorphous silicon into polysilicon is provided, which includes: a plurality of transmissive areas having a plurality of first slits for adjusting energy of the laser illumination passing through the mask; and an opaque area.