IMAGE SENSING STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

    公开(公告)号:US20240096923A1

    公开(公告)日:2024-03-21

    申请号:US18150806

    申请日:2023-01-06

    CPC classification number: H01L27/14643 H01L27/14607 H01L27/14689

    Abstract: The image sensing structure includes a first semiconductor device and a second semiconductor device. The first semiconductor device includes at least one first unit. The at least one first unit includes a plurality of first interconnects adjacent to the top side of the first semiconductor device, a row selector, and an analog-to-digital converter (ADC) connected to the row selectors. The second semiconductor device includes at least one second unit. The at least one second unit includes a photodiode facing the top side of the second semiconductor device. The photodiode is configured to receive the light incident on the top side of the second semiconductor device. The top side of the first semiconductor device is bonded to the bottom side of the second semiconductor device.

    BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
    5.
    发明申请
    BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
    背面照明图像传感器及其制造方法

    公开(公告)号:US20160343752A1

    公开(公告)日:2016-11-24

    申请号:US14854672

    申请日:2015-09-15

    Abstract: A backside illuminated (BSI) image sensor comprises a semiconductor substrate having a first surface and a second surface opposite to the first surface; a photosensitive element in the semiconductor substrate; a gate structure partially over the first surface of the semiconductor substrate; and a temporary carrier depository in proximity to the first surface of the semiconductor substrate, wherein the gate structure has a plug portion extending from the first surface toward the second surface. The plug portion of the gate structure helps to increase the charge transfer efficiency so as to improve quantum efficiency of the BSI image sensor.

    Abstract translation: 背面照明(BSI)图像传感器包括具有第一表面和与第一表面相对的第二表面的半导体衬底; 半导体衬底中的感光元件; 位于半导体衬底的第一表面上的栅极结构; 以及靠近所述半导体衬底的第一表面的临时载体托架,其中所述栅极结构具有从所述第一表面延伸到所述第二表面的插塞部分。 门结构的插头部分有助于提高电荷转移效率,从而提高BSI图像传感器的量子效率。

    IMAGE SENSING DEVICE AND MANUFACTURING METHOD THEREOF
    6.
    发明申请
    IMAGE SENSING DEVICE AND MANUFACTURING METHOD THEREOF 审中-公开
    图像感测装置及其制造方法

    公开(公告)号:US20160148970A1

    公开(公告)日:2016-05-26

    申请号:US14554649

    申请日:2014-11-26

    Abstract: Some embodiments of the present disclosure provide a method of manufacturing a back side illuminated (BSI) image sensor. The method includes receiving a semiconductive substrate; forming a photosensitive element at a front side of the semiconductive substrate; forming a transistor coupled to the photosensitive element; forming a recess at a back side of the semiconductive substrate; forming a first dielectric layer lining to a side portion of the recess and over the back side of the semiconductor substrate; covering a conductive material over the first dielectric layer and filling in the recess; forming a conductive column on top of the recess by patterning the conductive material; and forming a second dielectric layer covering the conductive column and the first dielectric layer.

    Abstract translation: 本公开的一些实施例提供制造背面照明(BSI)图像传感器的方法。 该方法包括接收半导体衬底; 在半导体基板的前侧形成感光元件; 形成耦合到所述感光元件的晶体管; 在所述半导体基板的背面形成凹部; 在所述凹部的侧部和所述半导体衬底的背面上形成衬里的第一电介质层; 覆盖所述第一电介质层上的导电材料并填充在所述凹部中; 通过图案化导电材料在凹部的顶部上形成导电柱; 以及形成覆盖所述导电柱和所述第一介电层的第二介电层。

    CONDUCTION LAYER FOR STACKED CIS CHARGING PREVENTION
    9.
    发明申请
    CONDUCTION LAYER FOR STACKED CIS CHARGING PREVENTION 有权
    用于堆叠CIS充电预防的导电层

    公开(公告)号:US20160056196A1

    公开(公告)日:2016-02-25

    申请号:US14464035

    申请日:2014-08-20

    Abstract: A semiconductor device includes a first semiconductor chip comprising a first metallic structure and a second semiconductor chip comprising a second metallic structure. The second semiconductor chip is bonded with the first semiconductor chip by a first conductive plug. A second conductive plug extends from the first metallic structure and into a substrate of the first semiconductor chip. The first conductive plug connects the first metallic structure and the second metallic structure, wherein a conductive liner is along a sidewall of the first conductive plug or the second conductive plug.

    Abstract translation: 半导体器件包括包括第一金属结构的第一半导体芯片和包括第二金属结构的第二半导体芯片。 第二半导体芯片通过第一导电插塞与第一半导体芯片接合。 第二导电插塞从第一金属结构延伸到第一半导体芯片的衬底中。 第一导电插头连接第一金属结构和第二金属结构,其中导电衬垫沿着第一导电插塞或第二导电插塞的侧壁。

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