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公开(公告)号:US20220085147A1
公开(公告)日:2022-03-17
申请号:US17470338
申请日:2021-09-09
Applicant: TDK CORPORATION
Inventor: Yasunori HARADA , Daiki ISHII , Yoshihiko YANO
IPC: H01L49/02
Abstract: A dielectric thin film element including a first electrode layer, a dielectric layer, and a second electrode layer located in this order from a substrate side. A relationship of 0.75≤Rsk1≤5.0 is satisfied, in which skewness of a roughness curve of the first electrode layer on the dielectric layer side is set as Rsk1.
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公开(公告)号:US20160329152A1
公开(公告)日:2016-11-10
申请号:US15134799
申请日:2016-04-21
Applicant: TDK Corporation
Inventor: Saori TAKEDA , Masahito FURUKAWA , Masanori KOSUDA , Shirou OOTSUKI , Yasunori HARADA
CPC classification number: H01G4/33 , C04B35/4682 , C04B35/62218 , C04B35/6261 , C04B2235/3208 , C04B2235/3217 , C04B2235/3224 , C04B2235/3241 , C04B2235/3244 , C04B2235/3262 , C04B2235/3281 , C04B2235/3286 , C04B2235/604 , C04B2235/6567 , C04B2235/787 , C04B2235/788 , C04B2235/79 , C23C14/088 , H01G4/085 , H01G4/1227 , H01G4/1245
Abstract: The present invention relates to a dielectric element such as a thin-film capacitor including a dielectric film. The dielectric film contains a main component represented by the general formula (Ba1-xCax)z(Ti1-yZry)O3 wherein 0
Abstract translation: 电介质元件技术领域本发明涉及电介质元件,例如包括电介质膜的薄膜电容器。 电介质膜含有由通式(Ba1-xCax)z(Ti1-yZry)O3表示的主要成分,其中0
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公开(公告)号:US20250149252A1
公开(公告)日:2025-05-08
申请号:US18837696
申请日:2022-12-02
Applicant: TDK Corporation
Inventor: Daiki ISHII , Mitsuhiro TOMIKAWA , Kenichi YOSHIDA , Takashi KARIYA , Yasunori HARADA , Yoshiaki HAYAMIZU , Miyu HASEGAWA
Abstract: To provide a thin film capacitor having a pair of terminal electrodes capable of being disposed on the same plane. A thin film capacitor includes a metal foil having a roughened surface, a dielectric film covering the roughened surface of the metal foil and having an opening partially exposing the metal foil therethrough, an electrode layer contacting the metal foil through the opening, and an electrode layer contacting the dielectric film without contacting the metal foil. An upper surface position of the electrode layer is equal to or lower in height than that of the electrode layer.
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公开(公告)号:US20250120104A1
公开(公告)日:2025-04-10
申请号:US18836446
申请日:2022-12-02
Applicant: TDK Corporation
Inventor: Yasunori HARADA , Yoshiaki HAYAMIZU , Daiki ISHII , Mitsuhiro TOMIKAWA , Kenichi YOSHIDA
IPC: H10D1/68
Abstract: To provide a thin film capacitor having a pair of terminal electrodes capable of being disposed on the same plane. A thin film capacitor 1 includes a metal foil having a non-roughened center portion and a roughened upper surface, a dielectric film covering the roughened upper surface of the metal foil, an electrode layer contacting the non-roughened center portion of the metal foil through an opening formed in the dielectric film, and an electrode layer contacting the dielectric film without contacting the metal foil. A thickness of the center portion of the metal foil at a position overlapping the electrode layer is larger than a thickness thereof at a position overlapping the electrode layer.
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公开(公告)号:US20200312553A1
公开(公告)日:2020-10-01
申请号:US16823789
申请日:2020-03-19
Applicant: TDK Corporation
Inventor: Shirou OOTSUKI , Aiko TAKAHASHI , Yasunori HARADA , Shota SUZUKI , Yasunaga KAGAYA , Tomohiko KATO , Mirai ISHIDA
Abstract: A dielectric film, contains: (1) Bi and Ti; (2) at least one element E1 selected from the group consisting of Na and K; and (3) at least one element E2 selected from the group consisting of Ba, Sr, and Ca. The dielectric film has a main phase containing an oxide that contains Bi, Ti, the element E1, and the element E2 and has a perovskite structure, and a subphase that contains Bi and has an oxygen concentration lower than that of the main phase. In a sectional surface of the dielectric film, a ratio RS of an area of the subphase to a sum of an area of the main phase and the area of the subphase is greater than or equal to 0.03 and less than or equal to 0.3.
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