MEMS tunable VCSEL powered swept source OCT for 3D metrology applications

    公开(公告)号:US11353318B2

    公开(公告)日:2022-06-07

    申请号:US17123979

    申请日:2020-12-16

    申请人: Thorlabs, Inc.

    摘要: Disclosed is an optical probe system that is capable of high speed, high precision, and high resolution 3D digitalization of engineered objects. The 3D dimensional data of the engineered object is measured using a swept source optical coherence tomography system with improved speed, spatial resolutions, and depth range. Also disclosed is a type of coordinate measurement machine (CMM) that is capable of performing high speed, high resolution, and non-contact measurement of engineered objects. The mechanic stylus in the touch-trigger probe of a conventional CMM is replaced with an optical stylus with reconfigurable diameter and length. The distance from the center of the optical stylus to the measurement probe is optically adjusted to match the height of the object to be measured quickly, which eliminates one dimensional movement of the probe and greatly improves the productivity.

    Optical spectroscopic measurement system

    公开(公告)号:US10168212B2

    公开(公告)日:2019-01-01

    申请号:US14964956

    申请日:2015-12-10

    申请人: Thorlabs, Inc.

    摘要: A system capable of highly sensitive measurement of material concentration values in a sample using an optical spectroscopic method is disclosed. The system utilizes high-speed data acquisition and high resolution sampling of the raw signals output by the sensors with reduced total channel counts, and performs frequency analysis of the signals using the Fourier transform method to process all sensor channels in parallel. When each sensor is targeting the detection of some certain materials at some certain frequencies, the system is capable of simultaneous detection of multiple materials of interest in the sample with high measurement sensitivity and high speed.

    APPARATUS AND METHODS FOR ONE OR MORE WAVELENGTH SWEPT LASERS AND THE DETECTION OF SIGNALS THEREOF
    5.
    发明申请
    APPARATUS AND METHODS FOR ONE OR MORE WAVELENGTH SWEPT LASERS AND THE DETECTION OF SIGNALS THEREOF 有权
    一种或多种波长扫描激光的装置和方法及其信号的检测

    公开(公告)号:US20170074640A1

    公开(公告)日:2017-03-16

    申请号:US15265429

    申请日:2016-09-14

    IPC分类号: G01B9/02 H01S5/42

    摘要: An optical instrument including at least a first and second wavelength swept vertical cavity laser (VCL) sources. The wavelength sweeping ranges spanned by the first and second VCL sources may differ with a region of spectral overlap. The first and second VCL sources may be operable under different modes of operation, wherein the modes of operation differ in at least one of: sweep repetition rate, sweep wavelength range, sweep center wavelength, and sweep trajectory. A VCL source may also exhibit sweep-to-sweep variation. Apparatus and methods are described for aligning sample signal data from the first VCL and sample signal data from the second VCL to generate output digital data. The output digital data is aligned with respect to at least one of: wavelength, wavenumber, and interferometric phase. The apparatus and methods can also be used to phase stabilize successive sweeps from the same VCL source or wavelength swept source.

    摘要翻译: 一种光学仪器,包括至少第一和第二波长扫描垂直腔体激光器(VCL)源。 由第一和第二VCL源跨越的波长扫描范围可以随着光谱重叠的区域而不同。 第一和第二VCL源可以在不同的操作模式下操作,其中操作模式在以下至少一个方面不同:扫描重复率,扫描波长范围,扫描中心波长和扫描轨迹。 VCL源也可能具有扫掠到扫描的变化。 描述了用于对准来自第一VCL的采样信号数据和来自第二VCL的采样信号数据以产生输出数字数据的装置和方法。 输出数字数据相对于波长,波数和干涉相位中的至少一个对准。 该装置和方法也可用于相位稳定来自相同VCL源或波长扫描源的连续扫描。

    Apparatus and methods for one or more wavelength swept lasers and the detection of signals thereof

    公开(公告)号:US10234267B2

    公开(公告)日:2019-03-19

    申请号:US15885754

    申请日:2018-01-31

    摘要: An optical instrument including at least a first and second wavelength swept vertical cavity laser (VCL) sources. The wavelength sweeping ranges spanned by the first and second VCL sources may differ with a region of spectral overlap. The first and second VCL sources may be operable under different modes of operation, wherein the modes of operation differ in at least one of: sweep repetition rate, sweep wavelength range, sweep center wavelength, and sweep trajectory. A VCL source may also exhibit sweep-to-sweep variation. Apparatus and methods are described for aligning sample signal data from the first VCL and sample signal data from the second VCL to generate output digital data. The output digital data is aligned with respect to at least one of: wavelength, wavenumber, and interferometric phase. The apparatus and methods can also be used to phase stabilize successive sweeps from the same VCL source or wavelength swept source.

    OPTICAL SPECTROSCOPIC MEASUREMENT SYSTEM
    7.
    发明申请
    OPTICAL SPECTROSCOPIC MEASUREMENT SYSTEM 审中-公开
    光学光谱测量系统

    公开(公告)号:US20160169740A1

    公开(公告)日:2016-06-16

    申请号:US14964956

    申请日:2015-12-10

    申请人: Thorlabs, Inc.

    IPC分类号: G01J3/427 G01J3/10

    摘要: A system capable of highly sensitive measurement of material concentration values in a sample using an optical spectroscopic method is disclosed. The system utilizes high-speed data acquisition and high resolution sampling of the raw signals output by the sensors with reduced total channel counts, and performs frequency analysis of the signals using the Fourier transform method to process all sensor channels in parallel. When each sensor is targeting the detection of some certain materials at some certain frequencies, the system is capable of simultaneous detection of multiple materials of interest in the sample with high measurement sensitivity and high speed.

    摘要翻译: 公开了一种能够使用光学分光法对样品中的材料浓度值进行高灵敏度测量的系统。 该系统利用传感器输出的原始信号进行高速数据采集和高分辨率采样,总信道数减少,并使用傅里叶变换方法对信号进行频率分析,并行处理所有传感器通道。 当每个传感器以某些特定频率对某些材料进行检测时,系统能够以高测量灵敏度和高速度同时检测样品中感兴趣的多种材料。

    TUNABLE MID-IR FIBER LASER FOR NON-LINEAR IMAGING APPLICATIONS
    8.
    发明申请
    TUNABLE MID-IR FIBER LASER FOR NON-LINEAR IMAGING APPLICATIONS 审中-公开
    用于非线性成像应用的TIRNABLE中红外光纤激光器

    公开(公告)号:US20150192768A1

    公开(公告)日:2015-07-09

    申请号:US14591489

    申请日:2015-01-07

    申请人: THORLABS, INC.

    IPC分类号: G02B21/36

    摘要: A microscopy system, including: a mode-locked fiber laser configured to output a pulse having a center wavelength; a nonlinear waveguide configured to shift the wavelength of the pulse from the mode-locked fiber laser; a fiber amplifier configured to amplify the output from the first nonlinear waveguide; a second-harmonic generator configured to generate femtosecond pulses at twice the optical frequency from the output of the fiber amplifier; and an imaging system.

    摘要翻译: 一种显微镜系统,包括:锁模光纤激光器,被配置为输出具有中心波长的脉冲; 非线性波导,被配置为从所述锁模光纤激光器偏移所述脉冲的波长; 光纤放大器,被配置为放大来自第一非线性波导的输出; 二次谐波发生器,被配置为从所述光纤放大器的输出端产生两倍光频率的飞秒脉冲; 和成像系统。

    MEMS tunable VCSEL powered swept source OCT for 3D metrology applications

    公开(公告)号:US10890431B2

    公开(公告)日:2021-01-12

    申请号:US16709494

    申请日:2019-12-10

    申请人: Thorlabs, Inc.

    摘要: Disclosed is an optical probe system that is capable of high speed, high precision, and high resolution 3D digitalization of engineered objects. The 3D dimensional data of the engineered object is measured using a swept source optical coherence tomography system with improved speed, spatial resolutions, and depth range. Also disclosed is a type of coordinate measurement machine (CMM) that is capable of performing high speed, high resolution, and non-contact measurement of engineered objects. The mechanic stylus in the touch-trigger probe of a conventional CMM is replaced with an optical stylus with reconfigurable diameter and length. The distance from the center of the optical stylus to the measurement probe is optically adjusted to match the height of the object to be measured quickly, which eliminates one dimensional movement of the probe and greatly improves the productivity.

    MID-INFRARED VERTICAL CAVITY LASER
    10.
    发明申请

    公开(公告)号:US20200343687A1

    公开(公告)日:2020-10-29

    申请号:US16924969

    申请日:2020-07-09

    摘要: Disclosed is an optically pumped vertical cavity laser structure operating in the mid-infrared region, which has demonstrated room-temperature continuous wave operation. This structure uses a periodic gain active region with type I quantum wells comprised of InGaAsSb, and barrier/cladding regions which provide strong hole confinement and substantial pump absorption. A preferred embodiment includes at least one wafer bonded GaAs-based mirror. Several preferred embodiments also include means for wavelength tuning of mid-IR VCLs as disclosed, including a MEMS-tuning element. This document also includes systems for optical spectroscopy using the VCL as disclosed, including systems for detection concentrations of industrial and environmentally important gases.