公开(公告)号：US11940485B2

公开(公告)日：2024-03-26

申请号：US17286959

申请日：2019-10-17

Applicant: Tokyo Electron Limited

Inventor： Naoki Akiyama ,  Susumu Saito ,  Hiroyuki Nakayama ,  Shigeru Kasai

IPC: G01R31/28 ,  G01R1/067 ,  G01R1/073 ,  H01L27/146

CPC classification number: G01R31/287 ,  G01R1/0675 ,  G01R1/07342 ,  G01R31/2877 ,  H01L27/1464 ,  H01L27/14683

Abstract: In an inspection apparatus for inspecting an inspection target device formed on an inspection object, the inspection target device is a back-illuminated imaging device into which light is incident from a rear surface opposite to a side of a wiring layer. The inspection apparatus includes a stage having the inspection object placed such that the inspection object faces the rear surface. The stage includes a light transmitter made of a light-transmissive material. The inspection object is placed on the light transmitter below which a light illuminator is disposed. The light illuminator includes a flat light guide plate having a facing surface facing the inspection object. A light source is provided laterally outside the light guide plate configured to diffuse light emitted from the light source incident from a side end surface of the light guide plate, and to emit the light as planar light from the facing surface.

公开(公告)号：US11927539B2

公开(公告)日：2024-03-12

申请号：US17291207

申请日：2019-10-24

Applicant: TOKYO ELECTRON LIMITED

Inventor： Naoki Akiyama ,  Hiroyuki Nakayama ,  Susumu Saito

IPC: G01N21/88 ,  G01N21/95 ,  G01R1/073 ,  G01R31/265 ,  G01R31/28

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01R1/07307 ,  G01R31/2656 ,  G01R31/2831

Abstract: This inspection apparatus is for inspecting an inspection subject device. The inspection subject device is formed on an object to be inspected, and is a reverse-side irradiation-type imaging device into which light enters from the reverse side opposite to the side where a wiring layer is provided. This inspection apparatus has: a placement table having a transparent surface on which the object to be inspected is placed; a light irradiation mechanism that is provided in the placement table and that irradiates the to-be-inspected object placed on the placement table with light through the placement surface; and an acquisition unit that acquires in-plane distribution of illuminance of light from the placement table.

公开(公告)号：US11164730B2

公开(公告)日：2021-11-02

申请号：US16122226

申请日：2018-09-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Taro Ikeda ,  Tomohito Komatsu ,  Yuki Osada ,  Hiroyuki Miyashita ,  Susumu Saito ,  Kazuhiro Furuki ,  Mikio Sato ,  Eiki Kamata

IPC: H01J37/32

Abstract: A plasma probe device includes an antenna unit installed at an opening formed in a wall of a processing chamber or a mounting table through a sealing member configured to seal between a vacuum space and an atmospheric space, an electrode connected to the antenna unit, and a dielectric support portion made of a dielectric material and configured to support the antenna unit from an outer peripheral side. A surface of the antenna unit which is exposed through the opening and separated from a facing surface of the wall or the mounting table facing the antenna unit by a width is depressed from a surface of the wall or the mounting table where the opening is formed, which faces a plasma generation space.

公开(公告)号：US11525856B2

公开(公告)日：2022-12-13

申请号：US17287836

申请日：2019-10-17

Applicant: Tokyo Electron Limited

Inventor： Naoki Akiyama ,  Susumu Saito ,  Hiroyuki Nakayama ,  Shigeru Kasai

IPC: G01R31/28 ,  G01R31/308 ,  H01L27/146

Abstract: An inspection apparatus for inspecting a backside irradiation type imaging device formed on an inspection object includes: a stage on which the inspection object is mounted such that the stage faces a rear surface of the backside irradiation type imaging device, wherein the stage includes: a transmitter including a flat plate formed of a light transmitting material, and configured to mount the inspection object on the transmitter; and a light emitter disposed at a location facing the inspection object with the transmitter interposed between the light emitter and the inspection object, and configured to emit light toward the transmitter, and wherein the transmitter transmits the light from the light emitter while diffusing the light.