公开(公告)号：US11211362B2

公开(公告)日：2021-12-28

申请号：US16824908

申请日：2020-03-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Xin-Hua Huang ,  Chung-Yi Yu ,  Yeong-Jyh Lin ,  Rei-Lin Chu

IPC: H01L25/065 ,  H01L23/00 ,  H01L23/528 ,  H01L27/01 ,  H01L23/48 ,  H01L21/768 ,  H01L25/00

Abstract: Various embodiments of the present disclosure are directed towards a three-dimensional (3D) trench capacitor, as well as methods for forming the same. In some embodiments, a first substrate overlies a second substrate so a front side of the first substrate faces a front side of the second substrate. A first trench capacitor and a second trench capacitor extend respectively into the front sides of the first and second substrates. A plurality of wires and a plurality of vias are stacked between and electrically coupled to the first and second trench capacitors. A first through substrate via (TSV) extends through the first substrate from a back side of the first substrate, and the wires and the vias electrically couple the first TSV to the first and second trench capacitors. The first and second trench capacitors and the electrical coupling therebetween collectively define the 3D trench capacitor.

公开(公告)号：US20220123031A1

公开(公告)日：2022-04-21

申请号：US17073553

申请日：2020-10-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Min-Ying Tsai ,  Cheng-Te Lee ,  Rei-Lin Chu ,  Ching I Li ,  Chung-Yi Yu

IPC: H01L27/146

Abstract: The present disclosure relates to an image sensor comprising a substrate. A photodetector is in the substrate. A trench is in the substrate and is defined by sidewalls and an upper surface of the substrate. A first isolation layer extends along the sidewalls and the upper surface of the substrate that define the trench. The first isolation layer comprises a first dielectric material. A second isolation layer is over the first isolation layer. The second isolation layer lines the first isolation layer. The second isolation layer comprises a second dielectric material. A third isolation layer is over the second isolation layer. The third isolation layer fills the trench and lines the second isolation layer. The third isolation layer comprises a third material. A ratio of a first thickness of the first isolation layer to a second thickness of the second isolation layer is about 0.17 to 0.38.

公开(公告)号：US11430729B2

公开(公告)日：2022-08-30

申请号：US17022320

申请日：2020-09-16

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Hsing-Lien Lin ,  Cheng-Te Lee ,  Rei-Lin Chu ,  Chii-Ming Wu ,  Yeur-Luen Tu ,  Chung-Yi Yu

IPC: H01L23/522 ,  H01L27/08 ,  H01L49/02 ,  H01L21/02

Abstract: Various embodiments of the present application are directed towards a metal-insulator-metal (MIM) capacitor. The MIM capacitor comprises a bottom electrode disposed over a semiconductor substrate. A top electrode is disposed over and overlies the bottom electrode. A capacitor insulator structure is disposed between the bottom electrode and the top electrode. The capacitor insulator structure comprises at least three dielectric structures vertically stacked upon each other. A bottom half of the capacitor insulator structure is a mirror image of a top half of the capacitor insulator structure in terms of dielectric materials of the dielectric structures.

公开(公告)号：US11232946B2

公开(公告)日：2022-01-25

申请号：US16786870

申请日：2020-02-10

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Rei-Lin Chu ,  Chih-Ming Chen ,  Chung-Yi Yu ,  Yeur-Luen Tu

IPC: H01L21/02 ,  H01L21/67 ,  H01L21/3065

Abstract: In accordance with some embodiments, a method for processing semiconductor wafer is provided. The method includes loading a semiconductor wafer into a chamber. The method also includes creating an exhaust flow from the chamber. The method further includes depositing a film on the semiconductor wafer by supplying a processing gas into the chamber. In addition, the method includes detecting, with a use of a gas sensor, a concentration of the processing gas in the exhaust flow and generating a detection signal according to a result of the detection. The method further includes supplying a cleaning gas into the processing chamber for a time period after the film is formed on the semiconductor wafer. The time period is determined based on the detection signal.

公开(公告)号：US11152455B2

公开(公告)日：2021-10-19

申请号：US16579738

申请日：2019-09-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Hsing-Lien Lin ,  Chii-Ming Wu ,  Chia-Shiung Tsai ,  Chung-Yi Yu ,  Rei-Lin Chu

IPC: H01L21/00 ,  H01L23/52 ,  H01L49/02 ,  H01L21/768 ,  H01L21/02 ,  H01L23/64 ,  H01L27/22

Abstract: Various embodiments of the present application are directed towards a method for forming a metal-insulator-metal (MIM) capacitor comprising an enhanced interfacial layer to reduce breakdown failure. In some embodiments, a bottom electrode layer is deposited over a substrate. A native oxide layer is formed on a top surface of the bottom electrode layer and has a first adhesion strength with the top surface. A plasma treatment process is performed to replace the native oxide layer with an interfacial layer. The interfacial layer is conductive and has a second adhesion strength with the top surface of the bottom electrode layer, and the second adhesion strength is greater than the first adhesion strength. An insulator layer is deposited on the interfacial layer. A top electrode layer is deposited on the insulator layer. The top and bottom electrode layers, the insulator layer, and the interfacial layer are patterned to form a MIM capacitor.

公开(公告)号：US11784204B2

公开(公告)日：2023-10-10

申请号：US17073553

申请日：2020-10-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Min-Ying Tsai ,  Cheng-Te Lee ,  Rei-Lin Chu ,  Ching I Li ,  Chung-Yi Yu

IPC: H01L27/146

CPC classification number: H01L27/1463 ,  H01L27/14689 ,  H01L27/14698

Abstract: The present disclosure relates to an image sensor comprising a substrate. A photodetector is in the substrate. A trench is in the substrate and is defined by sidewalls and an upper surface of the substrate. A first isolation layer extends along the sidewalls and the upper surface of the substrate that define the trench. The first isolation layer comprises a first dielectric material. A second isolation layer is over the first isolation layer. The second isolation layer lines the first isolation layer. The second isolation layer comprises a second dielectric material. A third isolation layer is over the second isolation layer. The third isolation layer fills the trench and lines the second isolation layer. The third isolation layer comprises a third material. A ratio of a first thickness of the first isolation layer to a second thickness of the second isolation layer is about 0.17 to 0.38.

公开(公告)号：US20220084935A1

公开(公告)日：2022-03-17

申请号：US17022320

申请日：2020-09-16

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Hsing-Lien Lin ,  Cheng-Te Lee ,  Rei-Lin Chu ,  Chii-Ming Wu ,  Yeur-Luen Tu ,  Chung-Yi Yu

IPC: H01L23/522 ,  H01L49/02 ,  H01L27/08

Abstract: Various embodiments of the present application are directed towards a metal-insulator-metal (MIM) capacitor. The MIM capacitor comprises a bottom electrode disposed over a semiconductor substrate. A top electrode is disposed over and overlies the bottom electrode. A capacitor insulator structure is disposed between the bottom electrode and the top electrode. The capacitor insulator structure comprises at least three dielectric structures vertically stacked upon each other. A bottom half of the capacitor insulator structure is a mirror image of a top half of the capacitor insulator structure in terms of dielectric materials of the dielectric structures.

公开(公告)号：US20210296283A1

公开(公告)日：2021-09-23

申请号：US16824908

申请日：2020-03-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Xin-Hua Huang ,  Chung-Yi Yu ,  Yeong-Jyh Lin ,  Rei-Lin Chu

IPC: H01L25/065 ,  H01L27/01 ,  H01L23/48 ,  H01L21/768 ,  H01L23/00 ,  H01L25/00 ,  H01L23/528

Abstract: Various embodiments of the present disclosure are directed towards a three-dimensional (3D) trench capacitor, as well as methods for forming the same. In some embodiments, a first substrate overlies a second substrate so a front side of the first substrate faces a front side of the second substrate. A first trench capacitor and a second trench capacitor extend respectively into the front sides of the first and second substrates. A plurality of wires and a plurality of vias are stacked between and electrically coupled to the first and second trench capacitors. A first through substrate via (TSV) extends through the first substrate from a back side of the first substrate, and the wires and the vias electrically couple the first TSV to the first and second trench capacitors. The first and second trench capacitors and the electrical coupling therebetween collectively define the 3D trench capacitor.

公开(公告)号：US20210091169A1

公开(公告)日：2021-03-25

申请号：US16579738

申请日：2019-09-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Hsing-Lien Lin ,  Chii-Ming Wu ,  Chia-Shiung Tsai ,  Chung-Yi Yu ,  Rei-Lin Chu

IPC: H01L49/02 ,  H01L23/64 ,  H01L21/02 ,  H01L21/768

Abstract: Various embodiments of the present application are directed towards a method for forming a metal-insulator-metal (MIM) capacitor comprising an enhanced interfacial layer to reduce breakdown failure. In some embodiments, a bottom electrode layer is deposited over a substrate. A native oxide layer is formed on a top surface of the bottom electrode layer and has a first adhesion strength with the top surface. A plasma treatment process is performed to replace the native oxide layer with an interfacial layer. The interfacial layer is conductive and has a second adhesion strength with the top surface of the bottom electrode layer, and the second adhesion strength is greater than the first adhesion strength. An insulator layer is deposited on the interfacial layer. A top electrode layer is deposited on the insulator layer. The top and bottom electrode layers, the insulator layer, and the interfacial layer are patterned to form a MIM capacitor.