公开(公告)号：US20200111652A1

公开(公告)日：2020-04-09

申请号：US16705437

申请日：2019-12-06

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Feng-Kuang Wu ,  Chih-Kuo Chang ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo ,  Sing-Tsung Li

IPC分类号： H01J37/32

摘要： Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.

公开(公告)号：US10559453B2

公开(公告)日：2020-02-11

申请号：US16232404

申请日：2018-12-26

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Feng-Kuang Wu ,  Chih-Kuo Chang ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo ,  Sing-Tsung Li

IPC分类号： H01J37/32

摘要： Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.

公开(公告)号：US20190163149A1

公开(公告)日：2019-05-30

申请号：US16028422

申请日：2018-07-06

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Sing-Tsung Li ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Sheng-Hsiang Chuang ,  Shou-Wen Kuo ,  Chien-Ko Liao

IPC分类号： G05B19/042 ,  G06T7/00

摘要： A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.

公开(公告)号：US10734206B2

公开(公告)日：2020-08-04

申请号：US16705437

申请日：2019-12-06

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Feng-Kuang Wu ,  Chih-Kuo Chang ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo ,  Sing-Tsung Li

IPC分类号： H01J37/32

摘要： Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.

公开(公告)号：US10170287B1

公开(公告)日：2019-01-01

申请号：US15855128

申请日：2017-12-27

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Feng-Kuang Wu ,  Chih-Kuo Chang ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo ,  Sing-Tsung Li

IPC分类号： H01J37/32

摘要： Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.

公开(公告)号：US11664206B2

公开(公告)日：2023-05-30

申请号：US15901970

申请日：2018-02-22

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Wun-Kai Tsai ,  Wen-Che Liang ,  Chao-Keng Li ,  Zheng-Jie Xu ,  Chih-Kuo Chang ,  Sing-Tsung Li ,  Feng-Kuang Wu ,  Hsu-Shui Liu

IPC分类号： H01J37/32 ,  H01J37/244 ,  H01L21/66 ,  H01L21/67 ,  G05B19/4065 ,  C23C16/505

CPC分类号： H01J37/32926 ,  C23C16/505 ,  G05B19/4065 ,  H01J37/244 ,  H01J37/32183 ,  H01L21/67069 ,  H01L21/67253 ,  H01L22/20 ,  G05B2219/45031 ,  H01J2237/334 ,  H01J2237/3321

摘要： A fabrication system for fabricating an IC is provided which includes a processing tool, a computation device and a FDC system. The processing tool includes an electrode and an RF sensor to execute a semiconductor manufacturing process to fabricate the IC. The RF sensor wirelessly detects the intensity of the RF signal. The computation device extracts statistical characteristics based on the detection of the intensity of the RF signal. The FDC system determines whether or not the intensity of the RF signal meets a threshold value or a threshold range according to the extracted statistical characteristics. When the detected intensity of the RF signal exceeds the threshold value or the threshold range, the FDC system notifies the processing tool to adjust the RF signal or stop tool to check parts damage.

公开(公告)号：US10852704B2

公开(公告)日：2020-12-01

申请号：US16028422

申请日：2018-07-06

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Sing-Tsung Li ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Sheng-Hsiang Chuang ,  Shou-Wen Kuo ,  Chien-Ko Liao

IPC分类号： G05B19/042 ,  G06T7/00

摘要： A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.

公开(公告)号：US20190131116A1

公开(公告)日：2019-05-02

申请号：US16232404

申请日：2018-12-26

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Feng-Kuang Wu ,  Chih-Kuo Chang ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo ,  Sing-Tsung Li

IPC分类号： H01J37/32

摘要： Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.