摘要:
A liquid crystal display device and method includes a pair of substrates with liquid crystal sandwiched therebetween, a plurality of intersecting scanning signal lines and image signal lines, a thin film transistor formed corresponding to each intersection, a pixel electrode which is formed in a pixel region and connected to the thin film transistor, a gate insulating film, and a protective insulating film. At least one of the scanning signal lines and the image signal lines are each formed of a laminated film including a first layer and a second layer, wherein the first layer is formed of a copper film having a purity of at least 99.5%, and the second layer is formed of an alloy film containing copper as a main component. The first layer and the second layer are collectively subjected to wet etching with an etchant having a predetermined pH.
摘要:
It is an object of the present invention to provide an image display using a thin film electronic source having a structure for separating picture elements in a self-alignment manner. The structure of bus wiring (scanning line) for powering the electronic source is formed by a stacked structure including a lower layer 17 made of an alloy of CrMo, an intermediate layer 18 made of Al or an alloy of Al, and an upper layer 19 made of Cr, from a cathode substrate 10. The CrMo alloy in the lower layer 17 includes 30 wt % or more of Mo. Such a stacked structure can be used to process one side of the lower layer 17 to form an undercut relative to the intermediate layer 18. The undercut serves as a picture element separating structure in sputtering of an upper electrode 13 of the electronic source and achieves picture element separation in a self-alignment manner.
摘要:
Provided is a liquid crystal display device capable of significantly reducing occurrence of a failure such as an interlayer short-circuit. In the liquid crystal device, a first layer formed of a copper film having a purity of 99.5% or more and a second layer formed of an alloy film containing copper as a main component are successively formed on a glass substrate or a substrate on which a transparent conductive film containing indium is formed. The alloy film serving as the second layer is made of an alloy containing copper as a main component, which has a higher etching rate in a wet etching process compared with that of copper. Accordingly, a patterned cross-section of the copper film having a large film thickness can be etched in a tapered shape, to thereby improve coverage of an insulating film or the like laminated on a wiring pattern.
摘要:
Disclosed is a liquid crystal display device having a signal line of low electrical resistivity and high adhesion with an underlayer, wherein a copper alloy film is formed on an underlayer, and an oxide film, silicide film or nitride film, which are additive metal elements of the copper alloy, is formed at the boundary between the underlayer and the copper alloy film whereby the signal line is formed with a multi-layer film of the copper alloy film and the oxide film, the silicide film, or the nitride film.
摘要:
Disclosed is a liquid crystal display device having a signal line of low electrical resistivity and high adhesion with an underlayer, wherein a copper alloy film is formed on an underlayer, and an oxide film, silicide film or nitride film, which are additive metal elements of the copper alloy, is formed at the boundary between the underlayer and the copper alloy film whereby the signal line is formed with a multi-layer film of the copper alloy film and the oxide film, the silicide film, or the nitride film.
摘要:
Although sintered wire with lower resistance was preferable as a scan line and a signal line in conventional art in order to make a voltage drop small, there was a problem in electric connection with an electrode which constructs a cathode. In the present invention, a cathode which has an electron-emitting region 16 on a substrate 10 is constructed of a base electrode 11, a top electrode 13, and a protective insulating film 14 sandwiched by these electrodes, the base electrode 11 becomes a signal line, and sintered wire 18, used as a scan line, and the top electrode 13 are connected with an sub-electrode 17. The sub-electrode 17 includes metal included in the sintered wire 18, and metal included in the top electrode 13.
摘要:
A substrate with plane patterns formed in a liquid process wherein the plane patterns are formed based on a combination of plane shapes by which a difference in internal pressure of a solution between any two points of the solution is small, the solution being ejected onto the substrate so as to form the plane patterns by the liquid process.
摘要:
A substrate with plane patterns formed in a liquid process wherein the plane patterns are formed based on a combination of plane shapes by which a difference in internal pressure of a solution between any two points of the solution is small, the solution being ejected onto the substrate so as to form the plane patterns by the liquid process.
摘要:
An electrode for a lithium-ion secondary battery includes a collector of copper or the like, an electrode material layer being form on one surface and both surfaces of the collector and including an active material and a binder, and a binder-rich layer being formed in a dot shape or a stripe shape with a predetermined interval in the interface between the collector and the electrode material layer and having a binder concentration higher than that of the electrode material layer. Accordingly, a concentration gradient of the binder is provided to the surface of the collector. By arranging the binder-rich layer at a predetermined interval, it is possible to improve the adhesiveness between the collector and the electrode material layer due to an anchor effect and to guarantee conductivity between the collector and the electrode material layer.
摘要:
The disclosed method for producing a microstructure can form a complicated three-dimensionally formed microstructure with few steps.A first mask pattern (22) containing a light transmitting section and a light blocking section is disposed along an unexposed photosensitive resin (42), and a second mask pattern (32) containing a light transmitting section and a light blocking section is disposed on the reverse side of the first mask pattern (22) from the photosensitive resin (42). Additionally, by means of integrally rotating the photosensitive resin (42) and the first mask pattern (22) around a central axis (Z) that passes through the photosensitive resin (42) and the first mask pattern (22), and at the same time radiating exposure light from the reverse side of the second mask pattern (32) from the photosensitive resin (42) and the first mask pattern (22) in a direction that is inclined obliquely with respect to the direction of the central axis (Z), the light beam of the exposure light that is transmitted through the light transmitting section of the second mask pattern (32) and the light transmitting section of the first mask pattern (22) exposes the photosensitive resin (42).