公开(公告)号：US06790774B2

公开(公告)日：2004-09-14

申请号：US10314990

申请日：2002-12-10

申请人： Takao Fujikawa ,  Makoto Kadoguchi ,  Kohei Suzuki ,  Takuya Masui

发明人： Takao Fujikawa ,  Makoto Kadoguchi ,  Kohei Suzuki ,  Takuya Masui

IPC分类号： H01L2144

CPC分类号： H01L21/2855 ,  H01L21/76882 ,  H01L21/76886

摘要： A wiring film, which can be formed into wiring for ULSI semiconductor circuits, is formed by first forming holes in an insulating film on a substrate; then depositing a metallic material of copper, copper alloy, silver or silver alloy into the holes under an atmosphere including hydrogen; and finally annealing the deposited metallic material. The metallic material can be deposited by a sputtering process in which the atmosphere includes an inert gas in addition to the hydrogen. Hydrogen doped in the metallic material during the sputtering process promotes diffusion of atoms in the metallic material. The diffusion eliminates voids in the deposited metallic material.

摘要翻译： 可以形成为ULSI半导体电路的布线的布线膜通过在基板上的绝缘膜中首先形成孔而形成; 然后在包含氢气的气氛下将铜，铜合金，银或银合金的金属材料沉积到孔中; 最后退火沉积的金属材料。 金属材料可以通过溅射工艺沉积，其中除了氢气之外，气氛中还包括惰性气体。 在溅射过程中在金属材料中掺杂的氢促进金属材料中原子的扩散。 扩散消除沉积的金属材料中的空隙。

公开(公告)号：US06451682B1

公开(公告)日：2002-09-17

申请号：US09429109

申请日：1999-10-28

申请人： Takao Fujikawa ,  Makoto Kadoguchi ,  Kohei Suzuki ,  Yasushi Mizusawa ,  Tomoyasu Kondou ,  Yoji Taguchi

发明人： Takao Fujikawa ,  Makoto Kadoguchi ,  Kohei Suzuki ,  Yasushi Mizusawa ,  Tomoyasu Kondou ,  Yoji Taguchi

IPC分类号： H01L214763

CPC分类号： H01L21/76864 ,  H01L21/76843 ,  H01L21/76873 ,  H01L21/76882

摘要： This invention provides a filming method for covering the surface of the insulating film of a semiconductor substrate with a copper interconnect film free from pores. The surface of the insulating film 2 of a semiconductor substrate 1 is filmed with a copper or copper alloy 3 by any one of plating, CVD and PVD, and the whole body is then heated under a high-pressure gas atmosphere to cover the surface with an interconnect film 4 free from pores.

摘要翻译： 本发明提供了一种用不含孔的铜互连膜覆盖半导体衬底的绝缘膜的表面的成膜方法。半导体衬底1的绝缘膜2的表面用铜或铜合金3通过任何 电镀，CVD和PVD之一，然后在高压气体气氛下加热全体，以便用不含孔的互连膜4覆盖表面。

公开(公告)号：US06323120B1

公开(公告)日：2001-11-27

申请号：US09522473

申请日：2000-03-09

申请人： Takao Fujikawa ,  Yutaka Narukawa ,  Kohei Suzuki ,  Takuya Masui

发明人： Takao Fujikawa ,  Yutaka Narukawa ,  Kohei Suzuki ,  Takuya Masui

IPC分类号： H01L21283

CPC分类号： H01L21/76873 ,  H01L21/76843 ,  H01L21/76882

摘要： A method of forming an intact wiring film by applying a filling treatment with a metal material with no pores to holes/trenches, the method comprising forming a barrier layer 3 to an insulation film 2 having holes/trenches 2A, forming a seed layer by a PVD method on the surface of the barrier layer and laminating a wiring film 5A by a electrolytic plating method and heat treating the same under a high temperature/high pressure gas atmosphere.

摘要翻译： 通过对孔/沟槽没有孔的金属材料进行填充处理来形成完整的布线膜的方法，该方法包括在具有孔/沟槽2A的绝缘膜2上形成阻挡层3，形成阻挡层3，通过 PVD法，通过电解电镀法层叠布线膜5A，并在高温高压气体气氛下进行热处理。

公开(公告)号：US06221743B1

公开(公告)日：2001-04-24

申请号：US09111377

申请日：1998-07-07

申请人： Takao Fujikawa ,  Yutaka Narukawa ,  Itaru Masuoka ,  Kohei Suzuki

发明人： Takao Fujikawa ,  Yutaka Narukawa ,  Itaru Masuoka ,  Kohei Suzuki

IPC分类号： H01L21425

CPC分类号： H01L21/26533 ,  H01L21/76243

摘要： The present invention provides a method for processing a substrate in which crystal defects occurring according to ion implantation can be prevented from being integrated to form defects such as dislocation or large vacancies in the manufacture of a SIMOX substrate by implanting oxygen atom to a Si base by ion implantation and reacting it with Si to form a buried oxide film. The annealing after ion implantation is performed under a gas atmosphere pressurized to, for example, about 100 MPa. In the pressurized state, a structure having a smaller volume is thermodynamically more stable, and a behavior as increases crystal distortion is arrested in the annealing. Thus, crystal defects can be laid in uniformly dispersed state, vacancies can be also extinguished, and a Si base of good quality suitable for manufacture of ULSI in which defects such as dislocation are reduced can be provided.

摘要翻译： 本发明提供了一种处理衬底的方法，其中可以防止根据离子注入发生的晶体缺陷被集成在SIMOX衬底的制造中，通过将氧原子注入到Si衬底中而形成诸如位错或大空位的缺陷 离子注入并与Si反应形成掩埋氧化膜。 离子注入后的退火在加压至例如约100MPa的气体气氛下进行。 在加压状态下，具有较小体积的结构在热力学上更稳定，并且在退火中阻止增加晶体变形的行为。 因此，可以以均匀分散的状态铺设晶体缺陷，空位也可以熄灭，并且可以提供适合制造其中诸如位错的缺陷减少的ULSI的良好质量的Si基底。

公开(公告)号：US08003259B2

公开(公告)日：2011-08-23

申请号：US12149199

申请日：2008-04-29

申请人： Kaoru Inoue ,  Kiyomi Kato ,  Kohei Suzuki ,  Shigeo Ikuta ,  Yusuke Fukumoto ,  Tetsuya Hayashi

发明人： Kaoru Inoue ,  Kiyomi Kato ,  Kohei Suzuki ,  Shigeo Ikuta ,  Yusuke Fukumoto ,  Tetsuya Hayashi

IPC分类号： H01M4/62

CPC分类号： H01M2/1673 ,  H01M2/1653 ,  H01M2/168 ,  H01M2/1686 ,  H01M4/131 ,  H01M4/133 ,  H01M10/0525 ,  H01M10/4235

摘要： A non-aqueous electrolyte secondary battery including: a positive electrode; a negative electrode; a separator interposed between the positive electrode and the negative electrode; a non-aqueous electrolyte; and a porous insulating film adhered to a surface of at least one selected from the group consisting of the positive electrode and the negative electrode, the porous insulating film including an inorganic oxide filler and a film binder, wherein the ratio R of actual volume to apparent volume of the separator is not less than 0.4 and not greater than 0.7, and wherein the ratio R and a porosity P of the porous insulating film satisfy the relational formula: −0.10≦R−P≦0.30.

摘要翻译： 一种非水电解质二次电池，包括：正极; 负极; 夹在正极和负极之间的隔膜; 非水电解质; 以及粘附到从由正极和负极组成的组中选择的至少一个的表面的多孔绝缘膜，多孔绝缘膜包括无机氧化物填料和膜粘合剂，其中实际体积与表观的比率R 隔膜的体积不小于0.4且不大于0.7，并且其中多孔绝缘膜的比率R和孔隙率P满足关系式：-0.10＆nlE; R-P＆nlE; 0.30。

公开(公告)号：US07931983B2

公开(公告)日：2011-04-26

申请号：US11790545

申请日：2007-04-26

申请人： Tsumoru Ohata ,  Junji Nakajima ,  Tetsuya Hayashi ,  Takashi Takano ,  Shigeo Ikuta ,  Kohei Suzuki ,  Kouji Nishida ,  Masao Fukunaga ,  Akiko Fujino

发明人： Tsumoru Ohata ,  Junji Nakajima ,  Tetsuya Hayashi ,  Takashi Takano ,  Shigeo Ikuta ,  Kohei Suzuki ,  Kouji Nishida ,  Masao Fukunaga ,  Akiko Fujino

IPC分类号： H01M4/62

CPC分类号： H01M10/0525 ,  H01M2/145 ,  H01M2/1653 ,  H01M2/166 ,  H01M2/1673 ,  H01M2/18 ,  H01M4/13 ,  H01M4/131 ,  H01M4/133 ,  H01M10/0587 ,  Y10T29/49115

摘要： A lithium ion secondary battery includes a positive electrode capable of absorbing and desorbing lithium ion, a negative electrode capable of absorbing and desorbing lithium ion, a porous film interposed between the positive electrode and the negative electrode, and a non-aqueous electrolyte: the porous film being adhered to a surface of at least one of the positive electrode and the negative electrode; the porous film including a filler and a resin binder; the resin binder content in the porous film being 1.5 to 8 parts by weight per 100 parts by weight of the filler; and the resin binder including an acrylonitrile unit, an acrylate unit, or a methacrylate unit.

摘要翻译： 锂离子二次电池包括能够吸收和解吸锂离子的正极，能够吸收和解吸锂离子的负极，插入在正极和负极之间的多孔膜和非水电解质：多孔 膜粘附到正极和负极中的至少一个的表面上; 所述多孔膜包括填料和树脂粘合剂; 多孔膜中的树脂粘合剂含量相对于100重量份填料为1.5〜8重量份; 所述树脂粘合剂包括丙烯腈单元，丙烯酸酯单元或甲基丙烯酸酯单元。

公开(公告)号：US20100155536A1

公开(公告)日：2010-06-24

申请号：US11884490

申请日：2006-02-27

申请人： Bungo Asami ,  Kohei Suzuki

发明人： Bungo Asami ,  Kohei Suzuki

IPC分类号： B64D11/06 ,  A47C7/02 ,  A47C7/40

CPC分类号： B64D11/0649 ,  A47C7/40 ,  B60N2/686 ,  B60N3/004 ,  B64D11/0638 ,  B64D11/064 ,  Y02T50/46

摘要： An aircraft seat which can receive the load of a sitting person with only a back plate member, using no seat back frame, thus eliminating the need for sacrificing the sitting space, which results from the existence of the seat back frame, and at the same time, allowing the weight of the seat to be reduced, is provided. The aircraft seat (1) on which an aircraft passenger is to sit comprises a seat back (10) made up of a back plate member (11) that a cushion (12) is installed onto a front face (11a) thereof for receiving the back of a sitting person, and a reinforcing member (13) which is disposed on the rear face (11b) of the back plate member (11) for reinforcing the back plate member (11), and said back plate member (11) is formed in the shape of a curved surface which enhances the surface rigidity.

摘要翻译： 能够仅使用背板构件的座位人员的负载的座椅靠背框架，从而不需要牺牲由于座椅靠背框架的存在而产生的休息空间，并且在相同的位置 时间，允许减轻座椅的重量。 要乘坐飞机乘客的飞机座椅（1）包括由背板构件（11）构成的座椅靠背（10），其中垫子（12）安装在其前表面（11a）上，用于接收 以及设置在背板构件（11）的背面（11b）上用于加强背板构件（11）的加强构件（13），并且所述后板构件（11）是 形成为增强表面刚度的弯曲表面的形状。

公开(公告)号：US07435507B2

公开(公告)日：2008-10-14

申请号：US10973431

申请日：2004-10-27

申请人： Tsumoru Ohata ,  Shigeo Ikuta ,  Akiko Fujino ,  Tetsuya Hayashi ,  Kohei Suzuki

发明人： Tsumoru Ohata ,  Shigeo Ikuta ,  Akiko Fujino ,  Tetsuya Hayashi ,  Kohei Suzuki

IPC分类号： H01M2/18 ,  H01M2/16

CPC分类号： H01M4/13 ,  H01M2/18 ,  H01M4/62 ,  H01M10/0431 ,  H01M10/0525 ,  H01M10/0587 ,  H01M2004/021 ,  Y10T29/49108

摘要： A lithium ion secondary battery has an electrode group including: a winding core; and a positive electrode and a negative electrode that are wound around the winding core. This electrode group does not have an independent separator between the positive and negative electrodes. A porous film is integrally formed on both sides of at least one of the positive electrode and the negative electrode. The negative electrode and the positive electrode are connected to the winding core by a negative electrode resin film and a positive electrode resin film, respectively. The use of such resin films makes it possible to reduce the breakage of the porous films and prevent a short-circuit between the positive and negative electrodes.

摘要翻译： 锂离子二次电池具有电极组，包括：卷芯; 以及卷绕在卷芯上的正极和负极。 该电极组在正极和负极之间不具有独立的隔膜。 在正电极和负电极中的至少一个的两侧一体地形成多孔膜。 负极和正极分别通过负极树脂膜和正极树脂膜与绕线芯连接。 通过使用这种树脂膜，可以减少多孔膜的断裂，防止正极和负极之间的短路。

公开(公告)号：US20070196737A1

公开(公告)日：2007-08-23

申请号：US11790544

申请日：2007-04-26

申请人： Tsumoru Ohata ,  Junji Nakajima ,  Tetsuya Hayashi ,  Takashi Takano ,  Shigeo Ikuta ,  Kohei Suzuki ,  Kouji Nishida ,  Masao Fukunaga ,  Akiko Fujino

发明人： Tsumoru Ohata ,  Junji Nakajima ,  Tetsuya Hayashi ,  Takashi Takano ,  Shigeo Ikuta ,  Kohei Suzuki ,  Kouji Nishida ,  Masao Fukunaga ,  Akiko Fujino

IPC分类号： H01M2/16

CPC分类号： H01M10/0525 ,  H01M2/145 ,  H01M2/1653 ,  H01M2/166 ,  H01M2/1673 ,  H01M2/18 ,  H01M4/13 ,  H01M4/131 ,  H01M4/133 ,  H01M10/0587 ,  Y10T29/49115

摘要： A lithium ion secondary battery includes a positive electrode capable of absorbing and desorbing lithium ion, a negative electrode capable of absorbing and desorbing lithium ion, a porous film interposed between the positive electrode and the negative electrode, and a non-aqueous electrolyte: the porous film being adhered to a surface of at least one of the positive electrode and the negative electrode; the porous film including a filler and a resin binder; the resin binder content in the porous film being 1.5 to 8 parts by weight per 100 parts by weight of the filler; and the resin binder including an acrylonitrile unit, an acrylate unit, or a methacrylate unit.

公开(公告)号：US20060234117A1

公开(公告)日：2006-10-19

申请号：US11402056

申请日：2006-04-12

申请人： Masato Fujikawa ,  Kohei Suzuki ,  Kaoru Inoue ,  Mikinari Shimada

发明人： Masato Fujikawa ,  Kohei Suzuki ,  Kaoru Inoue ,  Mikinari Shimada

IPC分类号： H01M2/18 ,  H01M2/02

CPC分类号： H01M10/0587 ,  H01M2/0207 ,  H01M2/0217 ,  H01M2/1673 ,  H01M10/052 ,  H01M10/4235 ,  Y02T10/7011

摘要： A prismatic lithium secondary battery includes: a prismatic battery can having a bottom, a side wall, and an open top; an electrode assembly; a non-aqueous electrolyte; and a sealing plate covering the open top of the battery can that accommodates the electrode assembly and the non-aqueous electrolyte. The electrode assembly includes: a positive electrode; a negative electrode; and a porous heat-resistant layer and a separator that are interposed between the positive and negative electrodes. The side wall of the battery can has two rectangular main flat portions that are opposed to each other, and the thickness A of the porous heat-resistant layer and the thickness B of each of the main flat portions of the side wall satisfy the relation: 0.003≦A/B≦0.05.

摘要翻译： 棱柱形锂二次电池包括：棱柱形电池罐，其具有底部，侧壁和敞开的顶部; 电极组件; 非水电解质; 以及覆盖电池壳的开口顶部的密封板，其容纳电极组件和非水电解质。 电极组件包括：正电极; 负极; 以及介于正极和负极之间的多孔耐热层和隔膜。 电池的侧壁可以具有彼此相对的两个矩形主平面部，多孔耐热层的厚度A和侧壁的主平面部的厚度B满足以下关系： 0.003 <= A / B <= 0.05。