Method of heat-treating amorphous material
    1.
    发明授权
    Method of heat-treating amorphous material 失效
    无定形材料的热处理方法

    公开(公告)号:US4525222A

    公开(公告)日:1985-06-25

    申请号:US609837

    申请日:1984-05-14

    CPC classification number: H01F1/15341 C22C45/00

    Abstract: A method of heat-treating an amorphous material as that the amorphous material has a high magnetic permeability, is disclosed in which an amorphous material having a Curie temperature T.sub.c higher than or equal to its crystallization temperature T.sub.x is held for a short time at a temperature T satisfying relations T.gtoreq.0.95 T.sub.c and T.gtoreq.T.sub.x.

    Abstract translation: 公开了一种使非晶材料具有高导磁率的非晶材料的热处理方法,其中具有高于或等于其结晶温度Tx的居里温度Tc的非晶材料在温度下保持短时间 T满足关系T> / = 0.95 Tc和T> / = Tx。

    Magnetic head alloy material and method of producing the same
    2.
    发明授权
    Magnetic head alloy material and method of producing the same 失效
    磁头合金材料及其制造方法

    公开(公告)号:US4581080A

    公开(公告)日:1986-04-08

    申请号:US620001

    申请日:1984-06-12

    CPC classification number: C22C38/02 H01F1/14

    Abstract: An alloy material for magnetic head which ensures, when formed into a head, reduced distortion during writing and reduced level of noises such as sliding noise, while presenting high wear resistance.The alloy material is produced by preparing a molten alloy having a basic composition consisting essentially of Fe and 4 to 8 wt % of Si, and further containing one or more than two additive element or elements selected from a group consisting of elements belonging in periodic table to groups IIA, IVB, VB, VIB, VIIB, VIII, IB, IIB, IIIA, IVA and VA. The molten alloy is then quenched at a high cooling rate of at least 10.sup.3 .degree.C./sec to become a thin sheet having a thickness ranging between 0.02 mm and 0.3 mm. The sheet is then heat-treated in a non-oxidizing atmosphere at 600.degree. to 1200.degree. C. for 0.01 to 20 hours, so that the mean grain size of 0.2 mm or smaller can be obtained.

    Abstract translation: 一种用于磁头的合金材料,当形成头部时,其在书写过程中减少失真并降低噪音,例如滑动噪音,同时具有高耐磨性。 该合金材料是通过制备具有基本上由Fe和4至8重量%Si组成的碱性组成的熔融合金制备的,并且还含有一种或多于两种选自元素周期表中的元素的添加元素或元素 至IIA,IVB,VB,VIB,VIIB,VIII,IB,IIB,IIIA,IVA和VA组。 然后将熔融合金以至少103℃/秒的高冷却速度骤冷,成为厚度范围在0.02mm至0.3mm之间的薄片。 然后将片材在600〜1200℃的非氧化性气氛中进行0.01〜20小时的热处理,得到0.2mm以下的平均粒径。

    Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtod
    3.
    发明申请
    Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtod 审中-公开
    舞台装置,曝光装置和半导体器件制造mehtod

    公开(公告)号:US20060017909A1

    公开(公告)日:2006-01-26

    申请号:US11210883

    申请日:2005-08-25

    Abstract: A stage apparatus has a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted. A fixing member fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.

    Abstract translation: 平台装置具有夹持和保持基板的基板保持单元,并且包括具有要安装基板保持单元的凹部的平坦表面。 固定构件将设置在基板保持单元上的突起支撑件固定到平坦表面上。 基板保持单元由固定构件支撑,而突起支撑件的远端与平坦表面的凹部接触,并且基板保持单元的剩余部分不与平坦表面接触。

    Method for producing mother alloys for iron-based amorphous alloys
    4.
    发明授权
    Method for producing mother alloys for iron-based amorphous alloys 有权
    铁基非晶合金母合金的制备方法

    公开(公告)号:US06451087B2

    公开(公告)日:2002-09-17

    申请号:US09852634

    申请日:2001-05-11

    CPC classification number: C22C1/03 C22C33/003 C22C45/02

    Abstract: The method for producing a mother alloy for an iron-based amorphous alloy has the steps of (a) melting raw materials for elements constituting the amorphous alloy together with at least one oxide of an element constituting the amorphous alloy, the raw materials containing aluminum as an inevitable impurity, and the oxide having a smaller standard free energy of formation than that of Al2O3 in an absolute value; and (b) removing the resultant Al2O3 from the melt, thereby reducing the content of aluminum to 50 ppm or less in the melt.

    Abstract translation: 制造铁基非晶合金母合金的方法具有以下步骤:(a)将构成非晶合金的元素的原料与至少一种构成非晶态合金的元素的氧化物一起熔化,将含铝的原料作为 不可避免的杂质,氧化物的绝对值比Al2O3的标准自由能更小; 和(b)从熔体中除去所得的Al 2 O 3,从而在熔体中将铝的含量降低到50ppm以下。

    Exposure apparatus, and device manufacturing method
    5.
    发明授权
    Exposure apparatus, and device manufacturing method 有权
    曝光装置和装置制造方法

    公开(公告)号:US07463335B2

    公开(公告)日:2008-12-09

    申请号:US11762286

    申请日:2007-06-13

    CPC classification number: G03F7/70066 G03F7/70075 G03F7/709

    Abstract: An exposure apparatus for illuminating an original through an illumination system and for transferring a pattern of the original onto a substrate. The apparatus includes a movable element having a blade, the blade being provided in the illumination system and blocking at least a portion of illumination light, a stator configured to relatively move the movable element, and a resilient supporting member configured to resiliently support the stator without contacting the stator.

    Abstract translation: 一种用于通过照明系统照亮原稿并将原稿的图案转印到基板上的曝光装置。 该装置包括具有刀片的可移动元件,刀片设置在照明系统中并且阻挡照明光的至少一部分,被配置为相对移动可移动元件的定子以及构造成弹性地支撑定子而没有 接触定子。

    Exposure apparatus, and device manufacturing method
    6.
    发明申请
    Exposure apparatus, and device manufacturing method 失效
    曝光装置和装置制造方法

    公开(公告)号:US20060114433A1

    公开(公告)日:2006-06-01

    申请号:US11251837

    申请日:2005-10-18

    CPC classification number: G03F7/70066 G03F7/70075 G03F7/709

    Abstract: Disclosed is an exposure apparatus for projecting, by exposure, a pattern of an original onto a substrate, the exposure apparatus including comprising a light blocking system for blocking at least a portion of exposure light, a driving system for moving the light blocking system, and a reaction force absorbing system for absorbing a drive reaction force of the driving system, wherein the driving system includes a stator, and wherein the reaction force absorbing system absorbs the reaction force by moving the stator of the driving system. With this structure, adverse influence of vibratory external disturbance to be caused by a drive reaction force as the blade of the light blocking system is driven, can be reduced significantly.

    Abstract translation: 公开了一种曝光装置,用于通过曝光将原稿的图案曝光到基板上,所述曝光装置包括包括用于遮挡至少一部分曝光光的遮光系统,用于移动遮光系统的驱动系统,以及 用于吸收驱动系统的驱动反作用力的反作用力吸收系统,其中所述驱动系统包括定子,并且其中所述反作用力吸收系统通过移动所述驱动系统的定子来吸收所述反作用力。 利用这种结构,驱动作为遮光系统的叶片的驱动反作用力引起的振动外部干扰的不良影响可以显着降低。

    EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    8.
    发明申请
    EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
    曝光装置和装置制造方法

    公开(公告)号:US20070285648A1

    公开(公告)日:2007-12-13

    申请号:US11762286

    申请日:2007-06-13

    CPC classification number: G03F7/70066 G03F7/70075 G03F7/709

    Abstract: An exposure apparatus for illuminating an original through an illumination system and for transferring a pattern of the original onto a substrate. The apparatus includes a movable element having a blade, the blade being provided in the illumination system and blocking at least a portion of illumination light, a stator configured to relatively move the movable element, and a resilient supporting member configured to resiliently support the stator without contacting the stator.

    Abstract translation: 一种用于通过照明系统照亮原稿并将原稿的图案转印到基板上的曝光装置。 该装置包括具有刀片的可移动元件,刀片设置在照明系统中并且阻挡照明光的至少一部分,被配置为相对移动可移动元件的定子以及构造成弹性地支撑定子而没有 接触定子。

    Target for magneto-optical recording medium and process for production
thereof
    9.
    发明授权
    Target for magneto-optical recording medium and process for production thereof 失效
    磁光记录介质的目标及其生产方法

    公开(公告)号:US5607780A

    公开(公告)日:1997-03-04

    申请号:US246825

    申请日:1994-05-20

    CPC classification number: G11B11/10589 C23C14/3414 H01F41/183

    Abstract: Disclosed are a target material for magneto-optical recording medium having a structure formed by sintering of an RE-TM phase (A) having a composition with an RE content higher than that of the composition of an intermetallic compound represented by the chemical formula TM.sub.2 RE, and a TM-RE phase (B) having a composition with an RE content equal to or lower than that of the composition of an intermetallic compound represented by the chemical formula TM.sub.2 E, wherein RE denotes at least one rare earth element selected from the group of elements consisting of Nd, Gd, Tb, Dy, Ho and Er, and TM denotes at least one element selected from the group of metals of the iron group which consists of Fe, Co and Ni; and a process for producing the same.

    Abstract translation: 公开了具有通过烧结具有RE含量高于化学式TM2RE表示的金属间化合物的组成的RE组成的RE-TM相(A)形成的结构的磁光记录介质的目标材料, 和具有等于或低于由化学式TM2E表示的金属间化合物的组成的RE含量的组成的TM-RE相(B),其中RE表示至少一种选自以下的稀土元素: 由Nd,Gd,Tb,Dy,Ho和Er组成的元素和TM表示选自Fe,Co和Ni组成的铁族金属族中的至少一种元素; 及其制造方法。

    Fe-Ni alloy fine powder of flat shape
    10.
    发明授权
    Fe-Ni alloy fine powder of flat shape 失效
    Fe-Ni合金细粉扁平形状

    公开(公告)号:US5135586A

    公开(公告)日:1992-08-04

    申请号:US619448

    申请日:1990-11-29

    CPC classification number: H01F1/14733

    Abstract: A flat-shaped fine Fe-Ni alloy powder suitable for use as a magnetic shield coating material for cards or the like. The power has a mean particle size of 0.1 to 30 .mu.m, a mean thickness not greater than 2 .mu.m and a coercive force not greater than 400 A/m. The flat-shaped fine powder is produced by preparing an Fe-Ni alloy powder of a composition which exhibits, in a bulk state, a saturated magnetostriction constant value falling within the range of .+-.15.times.10.sup.-6 and which contains, by weight, 70 to 83% Ni, 2 to 6% Mo, 3 to 6% Cu, 1 to 2% Mn, not more than 0.05% C and the balance Fe and incidental impurities, pulverizing the alloy powder by an attrition mill, and annealing the pulverized powder in a fluidized or moving state in a substantially non-oxidizing atmosphere.

    Abstract translation: 适合用作卡片等的磁屏蔽涂层材料的扁平状Fe-Ni合金粉末。 功率的平均粒径为0.1〜30μm,平均厚度不大于2μm,矫顽力不大于400A / m。 扁平状细粉末是通过制备组合物的Fe-Ni合金粉末制造的,该组合物在大体积状态下呈现在+/- 15×10 -6范围内的饱和磁致伸缩常数值, 70〜83%的Ni,2〜6%的Mo,3〜6%的Cu,1〜2%的Mn,不大于0.05%的C,余量为Fe和杂质,用磨粉机粉碎合金粉末, 在基本上非氧化性气氛中处于流化或移动状态的粉碎粉末。

Patent Agency Ranking