摘要:
A vertical boat for holding a plurality of semiconductor wafers comprising two end members (2) positioned at the top and the bottom of the vertical boat, and a plurality of support members (3,4,5,6,104) vertically mounted on the end members (2) for supporting the wafers, wherein each support member (3,4,5,6,104) is formed by a plate-like member having a series of slits (9,10,7,8,108) formed thereon in such a manner that a plurality of support arms are defined by the slits (9,10,7,8,108) at a predetermined interval, each support arm having a support projection (11,12,13,14,112) formed at the end thereof, and wherein the inner portions (P) of the wafer (1) is to be supported by the support projections (11,12,13,14,112) whereas the periphery of the wafer (1) does not contact the arms of the support members (3,4,5,6,104). The slits can be formed in two steps: forming a series of first slit portions on the plate-like member at a predetermined interval so as to retain two side walls of the plate-like member; and forming a series of second small slit portions on one of the side walls at the same interval so as to connect each second slit portion to the corresponding first slit portion.
摘要:
A vertical boat for holding a plurality of semiconductor wafers comprising two end members (5) positioned at the top and the bottom of the vertical boat, and a plurality of support members (3,4) vertically mounted on the end members (5), the support members (3,4) including two front support members (3) located on the wafer inserting side and at least one rear support members (4) located on the rear side of the boat, each support member (3,4) having a series of slits (3a,4a) formed thereon at a predetermined interval and a series of support portions defined by the slits (3a,4a) for supporting semiconductor wafers (1), wherein the front support member (3) is generally formed by a circular arc plate, and wherein each angle (A,B) formed between the wafer inserting direction (X) and a line linking the front end (3b) of the support portion of the front support member (3) to the center (1a) of the wafer (1) is 100 degrees or more.
摘要:
A sintered silicon carbide matrix component for a semi-conductor diffusion furnace results from sintering a mixture of three types of silicon carbide powder. The mixture includes fine silicon carbide having an average particle size of 0.1-10 microns, intermediate silicon carbide having an average particle size of 12-30 microns and coarse silicon carbide having an average particle size of 40-200 microns. The difference between the average particle sizes of the three types of powder is at least 10 microns.
摘要:
A method for making a component for a semi-conductor diffusion furnace by blending two types of silicon carbide powders, that is, 10 parts by weight of intermediate silicon carbide having an average particle size of 10-30 microns and 10-25 parts by weight of coarse silicon carbide having an average particle size of 80-200 microns, thereby to make a mixture, admixing an organic binder with the mixture, thereafter granulating the mixture thereby to produce pellets, preforming the pellets by a rubber press thereby to produce a formed body, presintering the formed body thereby to produce a presintered body, and impregnating the presintered body with silicon and simultaneously sintering it.
摘要:
The invention relates to a sample containing a gastric mucosa lavage fluid collected from a subject who has received a gastric mucus removal treatment and a method for detecting a disease-related marker using the same. By using the sample of the invention, the disease-related marker can be detected conveniently, less invasively, highly sensitively and highly accurately.
摘要:
A use-side unit and an air conditioner that can feed out air at a target temperature into a target space are provided. A use-side evaporator that recovers moisture obtained by cooling and condensing the air to be fed out into the space to be air-conditioned or the like and dehumidifies it so as to obtain target relative humidity, a use-side condenser that heats the air having passed through the use-side evaporator by heat exchange, adjusts it to a target dry-bulb temperature and feeds it out into the space to be air-conditioned or the like, and a use-side controller that calculates a correction value if a difference between a dry-bulb temperature according to the detection of a temperature detector that detects a dry-bulb temperature of the air to be fed out into the target space and the target dry-bulb temperature is larger than a predetermined value and performs processing to correct a target intermediate dry-bulb temperature.
摘要:
With a TFT using an oxide semiconductor film, there is such an issue that oxygen deficit is generated in a surface region of the oxide semiconductor film after performing plasma etching of a source/drain electrode, thereby increasing the off-current. Provided is a TFT which includes: a gate electrode on an insulating substrate; a gate insulating film on the gate electrode; an oxide semiconductor film containing indium on the gate insulating film; and a source/drain electrode on the oxide semiconductor film. Further, the peak position derived from an indium 3d orbital in the XPS spectrum of a surface layer in a part of the oxide semiconductor film where the source/drain electrode is not superimposed is shifted towards a high energy side than the peak position derived from the indium 3d orbital in the XPS spectrum of an oxide semiconductor region existing in a lower part of the surface layer.
摘要:
An object of the present invention is to provide an industrially advantageous process for preparing a benzaldehyde compound from a benzyl alcohol compound with high yield.The present invention relates to a process for preparing an aromatic aldehyde compound represented by the formula (2); which comprises reacting an aromatic methyl alcohol compound represented by the formula (1); and a peroxide under a pH value of a reaction solution being pH 0.01 or higher and less than 10 in the presence of at least one metallic compound selected from a molybdenum compound and a tungsten compound, a quaternary ammonium salt and an organic phosphonium salt.
摘要:
Disclosed is an electric current sensor, including a conducting wire, a core having a hole portion mating with the conducting wire and a gap communicating with the hole portion, and a magnetic sensor having a magnetic flux detection part arranged in the gap.
摘要:
The present invention provides steel plate for line pipe excellent in strength and ductility and a method of production of the same. The steel plate has a steel composition containing, by mass %, C: 0.04 to 0.15%, Si: 0.05 to 0.60%, Mn: 0.80 to 1.80%, P: 0.020% or less, S: 0.010% or less, Nb: 0.01 to 0.08%, and Al: 0.003 to 0.08%, having a balance of iron and unavoidable impurities, and having a value of Ceq shown by the following formula of 0.48 or less, comprised of a mixed structure of ferrite and pearlite or ferrite and pearlite partially containing bainite in which a ferrite percentage is 60 to 95%, having a yield strength of 450 MPa or more, and having an amount of hydrogen contained in the steel of 0.1 ppm or less: Ceq=C+Mn/6+(Cu+Ni)/15+(Cr+Mo+Nb+V+Ti)/5+5B
摘要翻译:本发明提供强度和延展性优异的管线用钢板及其制造方法。 该钢板的组成为:以质量%计含有C:0.04〜0.15%,Si:0.05〜0.60%,Mn:0.80〜1.80%,P:0.020%以下,S:0.010%以下,Nb: 0.01〜0.08%,Al:0.003〜0.08%,余量由铁和不可避免的杂质构成,并且由铁氧体和珠光体的混合结构构成的下述通式1所示的Ceq值为0.48以下 或部分含有铁素体百分比为60〜95%的贝氏体的铁素体和珠光体,屈服强度为450MPa以上,钢中含有的氢的量为0.1ppm以下:Ceq = C + Mn / 6+(Cu + Ni)/ 15 +(Cr + Mo + Nb + V + Ti)/ 5 + 5B 1