CERAMIC MEMBER
    9.
    发明申请
    CERAMIC MEMBER 审中-公开

    公开(公告)号:US20180310362A1

    公开(公告)日:2018-10-25

    申请号:US15736172

    申请日:2016-11-29

    发明人: Atsushi TSUCHIDA

    IPC分类号: H05B3/26 H01L21/683 H01L21/67

    摘要: A ceramic member includes a voltage supply rod capable of reducing a local temperature drop of the ceramic member. The ceramic member comprises a ceramic base, a metal body disposed inside the ceramic base, and a voltage supply rod made of an electrically conductive material and having a far end portion electrically connected to the metal body. The far end portion is located at an end of the voltage supply rod in a longitudinal direction. The voltage supply rod also includes a heat-transfer reducing portion continuous with the far end portion. The heat-transfer reducing portion has thermal conductivity k2 and a cross-sectional area A2 in a cross section taken perpendicularly to the longitudinal direction. The thermal conductivity k2 and the cross-sectional area A2 satisfy a formula k2·A2