公开(公告)号：US20120067523A1

公开(公告)日：2012-03-22

申请号：US13246417

申请日：2011-09-27

申请人： Shigeru KASAI ,  Taro Ikeda ,  Yuki Osada

发明人： Shigeru KASAI ,  Taro Ikeda ,  Yuki Osada

IPC分类号： C23F1/08 ,  H03H7/38

CPC分类号： H05B6/80 ,  H01J37/32192 ,  H01J37/32256 ,  H05B6/705 ,  H05H1/46 ,  H05H2001/463

摘要： A tuner matching an impedance of a load in the chamber to a characteristic impedance of the microwave power source is provided. The tuner includes: a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path; an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and a drive mechanism for moving the slug and including a drive part for applying a driving force; a drive transmission part for transmitting the driving force to the slug; a drive guide part for guiding movement of the slug; and a holding part for holding the slug at the drive transmission part. The drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor.

摘要翻译： 提供了将腔室中的负载的阻抗与微波功率源的特性阻抗匹配的调谐器。 调谐器包括：主体，其具有管状外导体和同轴地设置在外导体中的管状内导体，主体形成微波传输路径的一部分; 设置在所述外部导体和所述内部导体之间的环状介电块，所述块可沿着所述内部导体的纵向方向移动; 以及驱动机构，用于移动所述塞子并且包括用于施加驱动力的驱动部件; 驱动传递部，用于将驱动力传递到所述塞子; 驱动引导部，用于引导所述塞子的运动; 以及用于将块塞保持在驱动传递部分的保持部分。 驱动传递部分，驱动引导部分和保持部分被容纳在内导体中。

公开(公告)号：US08308898B2

公开(公告)日：2012-11-13

申请号：US13246417

申请日：2011-09-27

申请人： Shigeru Kasai ,  Taro Ikeda ,  Yuki Osada

发明人： Shigeru Kasai ,  Taro Ikeda ,  Yuki Osada

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J7/24 ,  H05B31/26 ,  H03H7/38

CPC分类号： H05B6/80 ,  H01J37/32192 ,  H01J37/32256 ,  H05B6/705 ,  H05H1/46 ,  H05H2001/463

摘要： A tuner for matching impedance includes: a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path; an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and a drive mechanism for moving the slug and including a drive part for applying a driving force; a drive transmission part for transmitting the driving force to the slug; a drive guide part for guiding movement of the slug; and a holding part for holding the slug at the drive transmission part, and wherein the drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor.

摘要翻译： 用于匹配阻抗的调谐器包括：主体，其具有管状外导体和同轴地设置在外导体中的管状内导体，主体形成微波传输路径的一部分; 设置在所述外部导体和所述内部导体之间的环状介电块，所述块可沿着所述内部导体的纵向方向移动; 以及驱动机构，用于移动所述塞子并且包括用于施加驱动力的驱动部件; 驱动传递部，用于将驱动力传递到所述塞子; 驱动引导部，用于引导所述塞子的运动; 以及用于将所述块塞保持在所述驱动传递部分的保持部分，并且其中所述驱动传递部分，所述驱动引导部分和所述保持部分被容纳在所述内部导体中。

公开(公告)号：US08945342B2

公开(公告)日：2015-02-03

申请号：US13410957

申请日：2012-03-02

申请人： Taro Ikeda ,  Shigeru Kasai ,  Yuki Osada

发明人： Taro Ikeda ,  Shigeru Kasai ,  Yuki Osada

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J37/32 ,  C23C16/27

CPC分类号： H01J37/3222 ,  C23C16/274

摘要： A surface wave plasma generating antenna serves to generate a surface wave plasma in a chamber by radiating into the chamber a microwave transmitted from a microwave output section through a coaxial waveguide including an outer conductor and an inner conductor. The surface wave plasma generating antenna is formed in a planar shape and has a plurality of slots arranged in a circumferential direction, and each joint portion between two adjacent slots in the circumferential direction is overlapped with at least one of the slots in a diametrical direction.

摘要翻译： 表面波等离子体产生天线用于通过将包括外部导体和内部导体的同轴波导从微波输出部分发射的微波辐射到室中，从而在室内产生表面波等离子体。 表面波等离子体发生天线形成为平面形状，并且具有沿圆周方向排列的多个狭槽，并且沿圆周方向的两个相邻狭槽之间的每个接合部分沿直径方向与至少一个狭槽重叠。

公开(公告)号：US09072158B2

公开(公告)日：2015-06-30

申请号：US13551122

申请日：2012-07-17

申请人： Taro Ikeda ,  Yuki Osada ,  Shigeru Kasai

发明人： Taro Ikeda ,  Yuki Osada ,  Shigeru Kasai

IPC分类号： H01J37/32 ,  H05H1/46 ,  H01Q15/00

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/32211 ,  H01J37/3222 ,  H01J37/32229 ,  H01J37/32293 ,  H01J37/32311 ,  H01Q15/0006 ,  H05H2001/4622 ,  H05H2001/463

摘要： An electromagnetic-radiation power-supply mechanism includes a microwave power introduction port provided on the side of the coaxial waveguide, a power line being connected to the microwave power introduction port; and a power supply antenna for radiating the electromagnetic wave power into the waveguide, the power supply antenna being connected to the power line. The power supply antenna includes an antenna body having a first pole connected to the power line and a second pole connected to an inner conductor of the waveguide; and a ring-shaped reflection portion extending from opposite sides of the antenna body.

摘要翻译： 电磁辐射供电机构包括设置在同轴波导一侧的微波功率引入口，与微波功率引入口连接的电力线; 以及用于将电磁波功率辐射到波导中的电源天线，电源天线连接到电力线。 电源天线包括天线体，其具有连接到电力线的第一极和连接到波导的内部导体的第二极; 以及从天线体的相对侧延伸的环状的反射部。

公开(公告)号：US20120090782A1

公开(公告)日：2012-04-19

申请号：US13276642

申请日：2011-10-19

申请人： Taro Ikeda ,  Yuki Osada

发明人： Taro Ikeda ,  Yuki Osada

IPC分类号： C23F1/08

CPC分类号： H05H1/46 ,  H01J37/32293 ,  H05H2001/463

摘要： There are provided a microwave plasma source and a plasma processing apparatus capable of improving uniformity of a plasma density distribution within a processing chamber by controlling positions of nodes and antinodes of a standing wave of microwave within the processing chamber not to be fixed. The microwave plasma source 2 includes a microwave supply unit 40. The microwave supply unit 40 includes multiple microwave introducing devices 43 each introducing microwave into the processing chamber; and multiple phase controllers 46 for adjusting phases of the microwaves inputted to the microwave introducing devices 43. Here, the phases of the microwaves inputted to the microwave introducing devices 43 are adjusted by fixing an input phase of the microwave inputted to one of two adjacent microwave introducing devices 43 while varying an input phase of the microwave inputted to the other microwave introducing device 43 according to a periodic waveform.

摘要翻译： 提供了一种微波等离子体源和等离子体处理装置，其能够通过控制处理室内的微波驻波的节点和波腹的位置来改善处理室内的等离子体密度分布的均匀性而不被固定。 微波等离子体源2包括微波供给单元40.微波供应单元40包括多个微波引入装置43，每个微波引入装置43将微波引入处理室; 以及用于调整输入到微波导入装置43的微波相位的多相位控制器46.这里，通过将输入到两个相邻微波之一的微波的输入相位固定，输入到微波导入装置43的微波的相位进行调整 引入装置43，同时根据周期波形改变输入到另一个微波导入装置43的微波的输入相位。

公开(公告)号：US09543123B2

公开(公告)日：2017-01-10

申请号：US13435552

申请日：2012-03-30

申请人： Taro Ikeda ,  Tomohito Komatsu ,  Shigeru Kasai

发明人： Taro Ikeda ,  Tomohito Komatsu ,  Shigeru Kasai

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J37/32 ,  C23C16/455 ,  H05H1/46 ,  C23C16/511

CPC分类号： H01J37/3222 ,  C23C16/45565 ,  C23C16/511 ,  H01J37/32211 ,  H01J37/32229 ,  H01J37/3244 ,  H01J37/32449 ,  H05H1/46 ,  H05H2001/463

摘要： A plasma generation antenna and a plasma processing apparatus can supply a gas and an electromagnetic wave effectively. A plasma processing apparatus 10 includes a processing chamber 100 in which a plasma process is performed; a wavelength shortening plate 480 configured to transmit an electromagnetic wave; and a plasma generation antenna 200 having a shower head 210 provided adjacent to the wavelength shortening plate 480. The shower head 210 is made of a conductor, and has a multiple number of gas holes 215 and a multiple number of slots 220 through which the electromagnetic wave passes. The slots 220 are provided at positions isolated from the gas holes 215.

摘要翻译： 等离子体发生天线和等离子体处理装置可以有效地提供气体和电磁波。 等离子体处理装置10包括其中执行等离子体处理的处理室100; 构造成透射电磁波的波长缩短板480; 以及等离子体产生天线200，其具有与波长缩短板480相邻设置的淋浴喷头210.喷头210由导体制成，并具有多个气孔215和多个槽220，电磁 波通。 槽220设置在与气孔215隔开的位置处。

公开(公告)号：US20110018651A1

公开(公告)日：2011-01-27

申请号：US12922702

申请日：2009-03-09

申请人： Taro Ikeda ,  Shigeru Kasai

发明人： Taro Ikeda ,  Shigeru Kasai

IPC分类号： H01P5/18

CPC分类号： H01P5/12 ,  H01J37/32192 ,  H01J37/3222 ,  H05H1/46

摘要： A power combiner 100 comprises a tubular main container 1, a plurality of power introduction ports 2 provided on the lateral surface of the main container 1 and introducing power as electromagnetic waves, a plurality of feeding antennas 6 provided, respectively, on plurality of power introduction ports 2, a combiner part 10 performing spatial combining of electromagnetic waves radiated from the plurality of feeding antennas 6 into main container 1, and an output port 11 for outputting electromagnetic waves combined at combiner part 10. Each feeding antenna 6 consists of an antenna main body 23 having a first pole 21 to which electromagnetic waves are supplied from a power introduction port 2 and a second pole 22 for radiating the electromagnetic waves thus supplied, and a reflection part 24 so provided as to project sideways from antenna main body 23 and reflecting electromagnetic waves.

摘要翻译： 功率组合器100包括管状主容器1，设置在主容器1的侧表面上并且作为电磁波引入电力的多个电力引入口2，分别设置在多个电力引入件上的多个馈电天线6 端口2，将从多个馈电天线6辐射的电磁波空间组合到主容器1中的组合器部分10和用于输出组合在一起的电磁波的输出端口11.每个馈电天线6由天线主体 主体23具有从功率引入口2供给电磁波的第一极21和用于照射如此供给的电磁波的第二极22，以及设置成从天线主体23侧向突出并反射的反射部24 电磁波。

公开(公告)号：US08424866B2

公开(公告)日：2013-04-23

申请号：US13181378

申请日：2011-07-12

申请人： Taro Ikeda

发明人： Taro Ikeda

IPC分类号： B65H3/14

CPC分类号： B65H3/128 ,  B65H3/48 ,  B65H3/68 ,  B65H2404/512 ,  B65H2801/06

摘要： A sheet feeding apparatus may include a sheet storage unit, an air blowing unit, a suction conveyance unit, and a conveyance guide. A sheet in the sheet storage unit blown by the air blowing unit may be conveyed to the conveyance guide by the suction conveyance unit. The conveyance guide has a guide surface and inclined portions arranged upstream in the sheet conveyance direction, formed therein from a sheet conveyance center to ends in a sheet width direction perpendicular to the sheet conveyance direction. The inclined portions are inclined from the upstream side towards the downstream in the sheet conveyance direction. As a distance in which an inclined portion resides away from the suction conveyance unit increases, the inclined portion becomes positioned more upstream in the sheet conveyance direction.

摘要翻译： 片材进给装置可以包括片材存储单元，送风单元，抽吸传送单元和输送引导件。 由吹送单元吹送的片材存储单元中的片材可以通过抽吸输送单元输送到输送引导件。 输送引导件具有引导表面和布置在纸张输送方向上游的倾斜部分，其从片材输送中心形成在纸张输送方向上的纸张宽度方向上。 倾斜部分在片材传送方向上从上游侧向下游倾斜。 随着倾斜部分远离吸引传送单元的距离增加，倾斜部分在片材输送方向上位于更上游。

公开(公告)号：US08328181B2

公开(公告)日：2012-12-11

申请号：US12695955

申请日：2010-01-28

申请人： Isao Kannari ,  Taro Ikeda ,  Takashi Uno ,  Yuji Yamanaka ,  Yuuya Yokobori

发明人： Isao Kannari ,  Taro Ikeda ,  Takashi Uno ,  Yuji Yamanaka ,  Yuuya Yokobori

IPC分类号： B65H3/12

CPC分类号： B65H7/02 ,  B65H1/14 ,  B65H3/08 ,  B65H3/128 ,  B65H3/48 ,  B65H7/20 ,  B65H2701/111

摘要： A sheet feeding apparatus includes a sheet stacking unit, a suction conveyance unit configured to convey an uppermost sheet stacked on the sheet stacking unit, a suction unit configured to adsorb the sheets onto the suction conveyance unit, and an adsorption completion detection unit. In the sheet feeding apparatus, when the tab-attached sheets are stacked on the sheet stacking unit and fed such that their tab portions are on the downstream side in a sheet feeding direction, the suction unit starts to adsorb the sheet in response to a sheet feeding signal, and the suction conveyance unit starts to convey the sheet immediately after the adsorption completion detection unit detects the completion of the adsorption. When the sheets other than the tab-attached sheets are fed, the suction unit previously adsorbs the sheet onto the suction conveyance unit, and the suction conveyance unit starts to convey the sheet in response to the sheet feeding signal.

摘要翻译： 片材进给装置包括片材堆积单元，用于输送堆叠在片材堆积单元上的最上面的片材的抽吸输送单元，被配置为将片材吸附到吸入输送单元上的吸引单元和吸附完成检测单元。 在片材供给装置中，当片状片材堆叠在片材堆积单元上并进给使得其片状部分在片材进给方向的下游侧时，吸引单元响应于片材开始吸附片材 在吸附完成检测单元检测到吸附完成之后立即开始输送片材。 当进给了片状片材以外的片材时，吸引单元预先将片材吸附到吸引传送单元上，并且吸引传送单元响应于片材进给信号开始传送片材。

公开(公告)号：US20110150719A1

公开(公告)日：2011-06-23

申请号：US13059680

申请日：2009-08-21

申请人： Taro Ikeda

发明人： Taro Ikeda

IPC分类号： B01J19/08 ,  H01Q13/18

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/3222 ,  H01J37/32229 ,  H01J37/32256

摘要： A microwave introduction mechanism (43) includes: an antenna section (45) including a plane antenna (54) for radiating microwaves into a chamber (1); a coaxial tube (50) connected to the plane antenna (54) to guide microwaves to the plane antenna (54); and a tuner section (44) provided in the coaxial tube (50) for impedance adjustment. The plane antenna (54) has a plurality of arc-shaped slots (54a) for radiating microwaves, formed such that, assuming that a plurality of imaginary concentric circles, arranged at a spacing equal to an integral multiple of “λg/4+δ” (wherein λg represents the effective wavelength of microwaves, and δ is a value that falls within the range 0≦δ≦0.05λg), are drawn on a plane of the plane antenna, “n” (n is an integer not less than 2) arc-shaped slots having the same length are evenly arranged on each imaginary circle, and the plurality of arc-shaped slots form “n” groups where the slots belonging to each group arranged in a radial direction and have the same central angle and the same angular position.

摘要翻译： 微波引入机构（43）包括：天线部分（45），包括用于将微波辐射到室（1）中的平面天线（54）; 连接到平面天线（54）以将微波引导到平面天线（54）的同轴管（50）; 以及设置在同轴管（50）中用于阻抗调节的调谐器部分（44）。 平面天线（54）具有用于辐射微波的多个弧形槽（54a），其形成为使得以等于“λg/ 4 +δ”的整数倍的间隔排列的多个虚拟同心圆 “（其中λg表示微波的有效波长，δ是属于平面天线的平面上的δ”n“的值），n”（n是不小于 2）具有相同长度的弧形槽均匀地布置在每个假想圆上，并且多个弧形槽形成“n”组，其中属于每个组的槽在径向方向上布置并具有相同的中心角，并且 相同的角度位置。